AC Servo Motor Driver (Pulse input type/Positioning type ）

However, setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the 50 [%] time of 50% or more oscillation level.

Table of Contents

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

108(122) 37 50 16(20) 71 89 M10 x 1.5 depth 22 10 M22 x 1.5 182(196) 22 22 80 Rc 3/8 60.5 Up to 300 301 to 1400 20 108(122) 37 60 16(20) 71 110 M12 x 1.75 depth 22 10 M26 x 1.5 182(196) 22 22 100 Rc 1/2 71 Up to 300 301 to 1500 CP95 Note) ( ): Denotes the dimensions for long stroke.

CV/MVGQ

22 26 0 0.033 -X Up to 300 16 50 7 88 154 16 29.8 8 10 84.5 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 22 41 14 24 32 0 0.039 With Rod Boot 20l h B3 e f Bore size (mm) 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Data 20 25 32 40 12.5 68 30 36 17 81 93 106 131 156 25 37.5 50 75 100 185 12.5 125

CV/MVGQ

0 0.039 154 88 M32 x 2 42.5 21.5 M14 x 1.5 50 14.2 16 46.5 29.8 24 84.5 21 16 Up to 300 22 41 8 10 32 With Rod Boot h Bore (mm) f B3 e 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 68 12.5 81 93 106 131 25 37.5 50 75 17 30 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 77 12.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

10 to 50 75,100 10 to 50 75,100 10 to 50 75,100 32 13 16 45 17 M8 x 1.25 60 10.5 14 5.5 9 depth 7 Rc 1/8 8 55.5 7 34 30 40 13 16 52 17 M8 x 1.25 69 10 14 7 40 5.5 9 depth 7 Rc 1/8 8 62 30 50 15 20 64 22 M10 x 1.5 86 13 17 8 6.6 11 depth 8 Rc 1/4 10 77 39 50 63 15 20 77 22 M10 x 1.5 103 13 17 8 60 9 14 depth 10.5 Rc 1/4 10 90 39 80 21 25 98 26 M16 x 2.0 132 16 22 11 17.5 depth 13.5 Rc 3/8

Air Cylinder

Rc1/4 18 18 40.5 20 63 Rc1/4 18 18 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1 For dimensions other than listed above, refer to the dimensions with rubber

CL

X 1.25 M12 X 1.75 M12 X 1.75 M14 X 1.5 M14 X 1.5 M16 X 1.5 40 45 50 65 75 85 100 106 30 35 35 40 40 50 50 56 59 67 73 77 85 6 7 7 11 11 15 15 17 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 15 17 17 21 21 16 16 11 11 11 11 11 16 16 14 18 18 22 26 31 31 36 9 9 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 32

Combination Cylinder

25 30 36 36 40 40 50 55 65 80 90 90 90 32 40 40 52 52 6.5 6.0 6.0 8.0 8.0 43 43 43 15 17 17 21 21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 14 18 18 22 26 31 31 36 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 14 14 14 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 9 9 40 45 50 65

5-Port Solenoid Valve

223 223 235.5 248 260.5 273 285.5 298 298 310.5 323 335.5 348 360.5 L4 112.5 125 137.5 150 150 162.5 175 187.5 200 212.5 212.5 225 237.5 250 262.5 275 287.5 287.5 300 312.5 325 337.5 350 L5 20.5 21.5 22.5 23.5 18 19 20 21 22 23 18 19 20 21 22 23 23.5 18.5 19.5 20.5 21.5 22.5 23.5 50 SY3000/5000/7000 Series Type 10/Side Ported Plug-in Connector Connecting Base Flat Ribbon Cable Dimensions:

JIS Standard Hydraulic Cylinder

15 40 19 11 43 35 1/2 46 155 13 14 50 8 58 37 35 15 220 225 55 52 15 15 25 to 1400 63 M12 x 1.5 90 98 63 15 42 19 14 43 35 1/2 52 163 15 18 60 10 65 45 42 18 240 247 65 55 15 20 25 to 1500 80 M16 x 1.5 110 118 80 17 40 22 16 44 44 3/4 65 184 18 18 72 12 87 50 50 20 269 284 65 17 20 80 25 to 1800 1/4 stroke 100 M18 x 1.5 135 150 102 19 42 22 18 44 44 3/4 75 192 20 22 85 12 109 55 55 23 287

ZP

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

CA2

18 18 22 26 40 50 63 80 100 Specifications and dimensions other than the above are the same as the standard type.

SMC

67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 FF 40 40 40 50 35 60 70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With connector cable Note 1) W 50 60 4 220 VAC Hz [230 VAC Hz] 50 60 50 60 For type W, DC voltage is only available.

CG1

20 22 25 30 35 43 11 13 15 18 20 22 18 22 26 32 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65 With rod boot ZZ Bore (mm) Applicable pin part no.

Proposals for Energy Saving

Dimensions Dimensions Q FB X Y + Stroke B + Stroke A + Stroke Bore size (mm) Y Q X 86 (94) 96 (105) 109 (121) 25 39 32 40 A Bore size (mm) 29 31 46 57 B FB 51 stroke or more 97.5 99 114 114 129 129 148 166 50 stroke or less 66 67.5 109 109 117.5 117.5 121 141 50 20 25 32 40 50 63 80 100 66 67.5 71.5 78 83 88 102.5 120 19 20 22 22 23 23 24 29 Note 1) Dimensions other than the above are the

Table of Contents

19 22 22 24 KQ2ZF10-02S 20.6 29 D2 M5 x 0.8 10 18.5 21 18.5 KQ2ZF10-03S 45.5 45.5 50 24.5 24.5 74 77 101 25.2 31.5 2-applicable tubing KQ2ZF12-03S 25.2 32.5 12 20.9 22 20.9 KQ2ZF12-04S 25 27 33 Connection thread Reference dimensions after R thread installation.

1

MT MD 12 16 20 25 32 40 50 63 80 100 28 29 34 40 52 60 68 84 114 140 16 19 30 30 38 38 50 50 50 65 14 14 22 22 27 27 36 36 46 46 22 22 30 30 37 37 47 47 58 62 9 9 12.5 12.5 16 16 20 20 28 28 M5 x 0.8 M5 x 0.8 M8 x 1.25 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M22 x 1.5 3 3 3 3 4 4 4 4 4 4 5 5 8 8 8 8 9 9 12 16 MT MA ML+ Adjustment MP Stroke MH + Stroke + Adjustment (A:

CM2

M10 x 1.25 15 30 M26 x 1.5 137 146 1/8 26 0 0.033 32 45 8 13 12 10 9 22 64 30 30 9 14 19.5 17 6 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 139 148 1/8 26 0 0.039 40 50 11 16 14 15 10 24 88 38 39 11 18 21 22 8 46.5 7 M14 x 1.5 21.5 42.5 M32 x 2 177 188 1/4 32 With Rod Boot l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50