1

A B A B A B A B A B A 14 A 14 A 14 A 14 A 14 A 14 A 14 A 14 A 116.7 (21.5) (For 12) 116.7 (126.3) (138.2) (For 12) 128.8 148.7 148.7 (9.6) B 12 B 12 B 12 B 12 B 12 B 12 B 12 B 12 PUSH LOCK PUSH LOCK One-touch fitting (SUP port, EXH port) Applicable tube O.D.: 6, 1/4" : 8, 5/16" : 10, 3/8" : 12 One-touch fitting (SUP port, EXH port) Applicable tube O.D.: 6, 1/4" : 8, 5/16" : 10, 3/8" : 12

Table of Contents

12 1 1 12 D12 -X 20Data 0.1 10 20 30 40 50 51 100 300 200 0.1 10 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) (15) l = 50 mm, V = 400 mm/s (16) l = 100 mm, V = 400 mm/s 50 50 100 100 100 100 80 80 80 80 63 63 50, 63 50, 63 50 50 10 10 40 40 40 40 5 5 Load weight m (kg) Load weight m (kg) 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 20 30 40 50 51 100 300 200

2

) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

Electric Actuator/Slider Type

6: LEFS25B 10 10 Lead 12: LEFS25A 5 5 Lead 12: LEFS25A 0 0 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 50 50 Lead 8: LEFS32B 40 40 Work load: W [kg] Work load: W [kg] 30 30 Lead 16: LEFS32A Lead 8: LEFS32B 20 20 10 10 Lead 16: LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600

CATALOG

D I M E N S I O N S F L A N G E M O U N T (C A N B E F I T T E D T O E I T H E R E N D O F C Y L I N D E R) Bore Stroke range Effective thread A B C D E F FX FD FT GA (mm) (mm) length 20 191 350 15.5 18 40 14 8 12 2 28 5.5 6 12 25 291 400 19.5 22 44 16.5 10 14 2 32 5.5 7 12 32 289 450 19.5 22 53 20 12 18 2 38 6.6 7 12 40 285 400 27 30 61 26 16 25 2 46 6.6 8 13 50 285 1200 32 35 76 32 20 30

Table of Contents

300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Electric Actuators

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

15

M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 12.5 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 12.5 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 4.5 NM2 M4 x 12 2.5 10 12 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M3 x 12 1.5 14 17.5 NX M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 5 NM2 M4 x 12 2.5 10 12 Included Parts List

Electric Actuator

700, 800, 900, 1000 20 5 Servo motor (24 VDC) 16 100, 200, 300, 400 10 3 6 Clean room compatible 25 100, 200, 300, 400, 500, 600 12 6 25 100, 200, 300, 400, 500, 600 12 AC servo motor 8 3 32 100, 200, 300, 400, 500, 600, 700, 800 16 Clean room compatible 10 200, 300, 400, 500, 600, 700, 800, 900, 1000 40 20 1 The size corresponds to the bore of the air cylinder with an equivalent force.

A

D I M E N S I O N S F L A N G E M O U N T (C A N B E F I T T E D T O E I T H E R E N D O F C Y L I N D E R) Bore Stroke range Effective thread A B C D E F FX FD FT GA (mm) (mm) length 20 191 350 15.5 18 40 14 8 12 2 28 5.5 6 12 25 291 400 19.5 22 44 16.5 10 14 2 32 5.5 7 12 32 289 450 19.5 22 53 20 12 18 2 38 6.6 7 12 40 285 400 27 30 61 26 16 25 2 46 6.6 8 13 50 285 1200 32 35 76 32 20 30

Battery-less

25 30 20 45 50 25 55 65 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 Up to 450 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 451 to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

SpeedWork Load Graph/Conditions for Regenerative Resistor (Guide) LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead 6: LEFS25V6B Lead 12: LEFS25V6A Lead 6: LEFS25V6B Lead 12: LEFS25V6A LEF 25 15 Work load [kg] Work load [kg] 20 Lead 20: LEFS25V6H Regenerative resistor area LEJ 10 15 Lead 20: LEFS25V6H 10 LEL 5 5 0 0 LEM 0 200 400 600 800 1000 1200 1400 1600 Speed [mm/s] 0 200 400 600

Mechanically Jointed Rodless Cylinder Series MY1

Operating range MY1MW (Slide bearing guide type) MY1CW (Cam follower guide type) (mm) (mm) Auto switch model Bore size Auto switch model Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 63 D-A9/A9V D-A9/A9V 11 7.5 11 7.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 7.5 7.5 8.5 7 6 7.5 7.5 7 8 7 6 D-Z7/Z80 D-Z7/Z80 12 12 12 11.5 11.5 12 12 12 11.5 11.5 D-Y59/Y69

Electric Actuator

200 400 100 500 600 00 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY25 LEY25 30.1 77.2 Lead 3: LEY25AC 26.5 66.1 Lead 3: LEY25C Vertical work load [lb] Vertical work load [lb] 22.0 55.1 17.6 44.1 Lead 6: LEY25AB Lead 6: LEY25B 13.2 33.0 8.8 22.0 Lead 12: LEY25AA Lead 12: LEY25A 4.4 11.0 0 0 300 200 400 100 500 600 0 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] Allowable Lateral

Table of Contents

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

24

12 1 1 12 12 MGJ JMGP 0.1 10 30 50 51 100 300 200 0.1 10 30 50 51 100 300 200 MGP MGP Stroke [mm] Stroke [mm] MGPW MGQ (15) L = 50 mm, V = 400 mm/s (16) L = 100 mm, V = 400 mm/s 50 50 MGG 100 100 100 100 80 80 MGC 80 80 63 63 MGF 50, 63 50, 63 50 50 MGZ 10 10 40 40 40 40 MGT 5 5 32 32 Load mass m [kg] Load mass m [kg] 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 D0.1 10 30 50

Air Cylinder Series MB

, 16) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) n 2 (Different surfaces, same surface) 1 45 55 60 70 75 50 D-A9V 45 + 30 (n 4) 2 (n = 4, 8, 12, 16) 50 + 30 (n 4) 2 (n = 4, 8, 12, 16) 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) 60 + 30 (n 4) 2 (n = 4, 8, 12,

MG

12 1 1 12 D12 -X 20Data 0.1 10 20 30 40 50 51 100 300 200 0.1 10 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) (15) l = 50 mm, V = 400 mm/s (16) l = 100 mm, V = 400 mm/s 50 50 100 100 100 100 80 80 80 80 63 63 50, 63 50, 63 50 50 10 10 40 40 40 40 5 5 Load weight m (kg) Load weight m (kg) 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 20 30 40 50 51 100 300 200

Integrated Controller

to 225 401 to 450 10 to 700 5 to 360 3 to 170 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 451 to 500 10 to 600 5 to 300 3 to 140 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750