HRX-OM-W060

Item CH1 CH2 Setting range 15 to 25 20 to 40 CH2 set temperature CH1set By default 20 25 temperature [Tips] Sample set temperature: To change from CH1SP: 25C and CH2SP: 30C status, to CH2SP: 15C, first set CH1SP to 15C and then CH2SP to 15C. If CH2SP is set to 15C before setting CH1SP to 15C, then the following message appears: Please set CH1SP first.

ZX

11 Series ZX Suction Filter Unit: ZX1-F Specifications ZX1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF 35 g Unit no.

Thermo-chiller

No anchor bolt is included. *10 Weight when the circulating fluid is not included. *11 The capacity is 60 Hz even in the 50 Hz area when option C is selected. *12 The capacity is 60 Hz even in the 50 Hz area when option P is selected. *13 The weight will increase by 4 kg when option C and P is selected. 11 A Thermo-chiller Compact Dual/Basic Type for Lasers HRLE Series Scheduled to acquire

ZSE2/ISE2

Indicator light (Red) 20 L H SET Vacuum supply port Vacuum pad connection port 7 35.6 Pressure setting trimmer Pneumatic circuit 600 (3000) + O 32 59 58 10.2 PV 6.5 18 V 8 10 17.6 10 5.5 2-3.3 Mounting hole Vacuum supply port M5 x 0.8 Vacuum pad connection port M5 x 0.8 16-6-11 6 Series ZSE2/ISE2 01 T1 Dimensions/Standard Type: ZSE2Grommet type: ZSE2-15 01 T1 Connector type: ZSE2-15C 01

Lightweight and Compact

Lights up during remote operation. 11 Changing pressure unit Pressure unit can be changed. MPa PSI t [RUN] lamp Lights up when the product is started, and goes off when it is stopped.

HRS100/150

Lights up during remote operation. 11 Changing pressure unit Pressure unit can be changed. MPa PSI HECR t [RUN] lamp Lights up when the product is started, and goes off when it is stopped.

energy saving effect

Lights up during remote operation. 11 Changing pressure unit Pressure unit can be changed. MPa PSI HECR t [RUN] lamp Lights up when the product is started, and goes off when it is stopped.

53

(In locations where strong electric fields, strong magnetic fields and surge voltage occur.) 11. In locations where static electricity occurs, or conditions which make the product discharge static electricity. 12. In locations where high frequency occurs. 13. In locations where damage is likely to occur due to lightning. 14.

LEC-OM02904

11.1.1 113 11.1.2 116 11.1.3 118 11.1.4 11-10 11.1.5 SSCNET 11-12 11.2 11-14 TM 11-17 11.3 MR Configurator2 11.4 LEC-MR-J3BAT 11-19 3 - 11.5 11-20 11.6 () 11-24 11.7 11-25 11.8 11-31 11.9 EMC() 11-34 12 121 125 12.1 122 12.2 123 12.3 124 12.3.1 124 12.4 124 12.5 125 13 131 136 13.1 132 13.1.1 132 13.1.2 134 13.2 . 135 13.3 . 135 13.4 . 135 13.5

Refrigerated Air Dryers

Finalize the model number. 7 Refer to pages 7, 11, 14, 19. Refer to pages 22 and 25.

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 20 Not included for Option Z (Removed parts) 21 Not included for Options Z and Z1 (Removed parts) 11 1 No condensation should be present.

TABLE OF CONTENTS

LEAD EGRESS .11 (2.8) DIA. WIRE LEAD EGRESS .11 (2.8) DIA. WIRE 1.31 (33.3) 1.31 (33.3) R.18 (4.6) TYP . R.15 (3.8) TYP . R.18 (4.6) TYP . R.15 (3.8) TYP . .66 (16.8) .66 (16.8) .15 (3.7) DIA. THRU (2) PLACES .15 (3.7) DIA. THRU (2) PLACES Mtg. HOLES #6-32 UNC THD. X .22 (5.6) MFT 2 PLACESAS SHOWN Mtg. HOLES #6-32 UNC THD.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

33

Note 11) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher. 200 A Thermo-chiller Basic Type HRSE Series Note 1) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher.

HRL

(including 6 M8 bolts)*7 Weight (dry state)*11 kg Approx. 240 Approx. 260 Approx. 330 *1 Use fluid in condition below as the circulating fluid.

76

(per 1 m3 ) The amount of moisture at the intersection C the amount of moisture at the intersection H = the amount of condensed water 18.2 3.0 15.2 g/m3 11 Series IDF100FS/125FS/150FS Specific Product Precautions 1 Be sure to read before handling. Refer to page 14 for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) for Air Preparation Equipment Precautions.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF1D-1 AM150-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11

CATALOG

10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.