Specification: 11- (Clean Series, Vacuum Type), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal
Specification: 11- (Clean Series, Vacuum Type), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal
1 3 8 12 15 4 11 10 4 6 7 XT34 14 7 5 Note) Cannot be used for movable wiring.
6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I G 25 27 28 FY FZ 3 3 5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 0 0.030 0 0.030 0 0.030 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O P M3 x 0.5 M5 x 0.8 M5 x 0.8 Model MHS2-16D MHS2-20D MHS2-25D 4 5 5 5h9 6h9 6h9 2 2.5 3 11 13 14.5 VA 2H9 2H9 3H9 SC TB 5 6 6 RB 16 18 22
70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.
70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.
5 D-X 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 20Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Data CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance
5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 7 10 11 12 15.5 19.5 3.2 3.2 4.5 5.5 5.5 6.6 12.5 14 18 22 13 15 20 26 32 40 7 9 12 16 20 24 22 24 32 40 50 62 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 3 4 6 8 10 12 7 7 7 9 10 11 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 13 16 16 19 23 27 10 11 14 16 20 24 17 18
Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo
Specification: Clean Series, Vacuum Type, Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: -, Function: -, Switch Rail: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Specification: 11- (Clean Series, Vacuum Type), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 5mm
(different sides) D-M9N/M9P/M9B 15 3 3 3.5 2 pcs. (same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs. (same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs.
5 4 4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3] 10 (7) [4] 16 7.5 (8.5) 16 6 (7) 3.5 (4.5) 5 (6) 4.5 (5.5
D-X 1211 Series CG1Y Auto Switch Mounting 2 Operating Range (mm) Auto switch model Bore size 20 25 32 40 50 63 80 100 D-A9 (V) D-M9 (V) D-M9W (V) D-M9A (V) 7 6 8 8 8 9 4.5 5 4.5 5.5 5 5.5 D-C7/C80 D-C73C/C80C 9 10 10 11 10 8 D-B5/B64 D-B59W 9 10 10 11 11 11 10 8 18 14 14 14 17 16 13 13 D-H7/H7mW D-H7NF 4.5 5 6 6.5 4 4 D-H7C 9 10 9.5 10.5 8.5 7 D-G5/G5W/G59F D-G5BA/K59/K59W 7 4.5
Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95
4.5 5.5 5 5.5 20 25 32 40 50 63 80 100 D-H7/H7mW D-H7NF 4 4 4.5 5 6 6.5 REA D-H7C 7 8.5 9 10 9.5 10.5 D-G5/G5W/G59F D-G5BA/K59/K59W 4 4 4.5 5 6 6.5 6.5 7 D-A9(V) 7 6 8 8 8 9 D-C7/C80 D-C73C/C80C 8 10 9 10 10 11 REB D-G5NT 4 4 4.5 5 6 6.5 6.5 7 D-G5NB 35 40 40 45 45 45 45 50 D-B5/B64 8 10 9 10 10 11 11 11 D-B59W 13 13 14 14 14 17 16 18 REC * Values which include hysteresis are for
Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed No setting No setting MHZ2-6 1 7.5 6 4 1 3 2 6.5 5 3 2 1 No setting No setting No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting
No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting (Normally open) Single acting (Normally closed) 2 4 1 3 2 3 2 1 No setting MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 16 18 12 16 9 14.5 3 11 9.5 MHZJ2-6 No setting No setting MHZJ2-10 No setting No setting MHZJ2-16 3 2
A A 16 25 Angle type M9N In-line type 1 5 6 2 3 4 7 2.
CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 The mounting hole position varies depending on the motor capacity. w 40 4 -# type LECYU2-V Connector name Description CN1 I/O signal connector CN2 Encoder connector CN3 Note) Digital operator connector CN6A MECHATROLINK-3communication