Specification: Clean Series, Vacuum Type, Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: Metal Stopper Both Ends, Function: Axial Piping Type, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

1

3 8 12 15 4 11 10 4 6 7 XT34 14 7 5 Note) Cannot be used for movable wiring.

Table of Contents

6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I G 25 27 28 FY FZ 3 3 5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 0 0.030 0 0.030 0 0.030 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O P M3 x 0.5 M5 x 0.8 M5 x 0.8 Model MHS2-16D MHS2-20D MHS2-25D 4 5 5 5h9 6h9 6h9 2 2.5 3 11 13 14.5 VA 2H9 2H9 3H9 SC TB 5 6 6 RB 16 18 22

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Table of Contents

5 D-X 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 20Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Data CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Compact Hydraulic Cylinder

D-F5m/J5m/F59F D-F5mW/J59W D-F5BAL/F5NTL D-G5m/K59/G59F D-G5mW/K59W D-G5BAL/G5NTL D-G39/K39 D-A9m/A9mV D-A5m/A6m D-A59W D-B5m/B64 D-B59W D-A3m/A44 5 5 5.5 5 5 CHQ CHKm 4.5 4 4.5 4.5 4.5 4.5 CHN 4.5 5 5 6.5 6.5 8 12 9.5 11 10.5 8.5 8.5 13 10.5 12 9.5 11 8.5 9.5 13.5 11 13 10 11.5 9.5 9.5 14.5 12.5 14 11 11.5 9.5 10 14.5 13 14 11 12.5 10.5 11 15.5 14.5 15 12 CHM Note 1) Auto switch models

Free Mount Cylinder

5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 7 10 11 12 15.5 19.5 3.2 3.2 4.5 5.5 5.5 6.6 12.5 14 18 22 13 15 20 26 32 40 7 9 12 16 20 24 22 24 32 40 50 62 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 3 4 6 8 10 12 7 7 7 9 10 11 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 13 16 16 19 23 27 10 11 14 16 20 24 17 18

Table of Contents

Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo

Table of Contents

(different sides) D-M9N/M9P/M9B 15 3 3 3.5 2 pcs. (same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs. (same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs.

NCQ2/CQ2

5 5.5 6.5 10.5 8.5 11 14 18.5 B 3 2.5 3.5 4 3.5 6 9 12 16.5 21.5 A 6 9 9 9.5 10.5 14.5 12.5 15 18 22.5 B 7 6.5 7.5 8 7.5 10 13 16 20.5 25.5 A 4.5 7.5 7.5 7.5 9 13 11 13.5 17.5 21 B 5.5 5 6.5 7 6 8.5 11.5 14.5 18 24 A 5 8 8 8 9.5 13.5 11.5 14 18 21.5 B 6 5.5 7 7.5 6.5 9 12 15 18.5 24.5 A 10 13 13 13 14.5 18.5 16.5 19 23 26.5 B 11 10.5 12 12.5 11.5 14 17 20 23.5 29.5 A 2 5 5 5 6.5 10.5 8.5

ISO Cylinder

5 4 4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3] 10 (7) [4] 16 7.5 (8.5) 16 6 (7) 3.5 (4.5) 5 (6) 4.5 (5.5

NCG/CG1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 114 119 121 139 162 162 196 196 11 11 11 12 13 13 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 12 12 12 13 14 14 20 20 Up to 350 Up to

Air Cylinder

[mm] Bore size A B C D F FB FC FT FX FY FZ GB H MM NA NB NN 6 15 8 9 3 8 11 4.5 1.6 24 14 32 5 28 M3 x 0.5 3 9.5 M6 x 1.0 10 15 12 14 4 8 13 4.5 1.6 24 14 32 5 28 M4 x 0.7 4.8 9.5 M8 x 1.0 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 5 28 M5 x 0.8 4.8 9.5 M10 x 1.0 S Z 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to

Air Cylinder Series CM2

(3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJP 20 6.5 (4) 5.5 (3) 0 () 1 () 1.5 (0) 2.5 (0.5) 5 (3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJ2 25 7.5 (5) 6.5 (4) 1 (0) 2 (0) 2.5 (0.5) 3.5 (1.5) 6 (4) 7 (5) 10.5 (8) 0.5 (0) 11.5 (9) 1.5 (0) 4 (2) 5 (3) 7 (5) 8 (6) CM2 32 40 11.5 6 7 13.5 7.5 8.5 11 12 15.5 5.5 17.5 6.5 9 10 12 13 CG1 ( ): Setting position

Compact Cylinder

13.5 17.5 21 B 5.5 5 6.5 7 6 8.5 11.5 14.5 18 24 A 5 8 8 8 9.5 13.5 11.5 14 18 21.5 B 6 5.5 7 7.5 6.5 9 12 15 18.5 24.5 B 11 10.5 12 12.5 11.5 14 17 20 23.5 29.5 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 3 2.5 4 4.5 3.5 6 9 12 15.5 21.5 A 9 7 9.5 13.5 17 B 4.5 7.5 10.5 14 20 A 10 13 13 13 14.5 18.5 16.5 19 23 26.5 A 2 5 5 5.5 6.5 10.5 8.5 11 14 18.5 A 6 9 9 9.5 10.5 14.5 12.5 15 18 22.5 12 16

Free Mount Cylinder Series CU

12.5 17.5 2.5 -2.5 2 -3 0 -5 -1.5 -6.5 -2.5 -7.5 7.5 12.5 8 13 10 15 11 16 12.5 17.5 3.5 8.5 4 9 6 11 7 12 8.5 13.5 0.5 -4.5 0 -5 -2 -7 -3.5 -8.5 -4.5 -9.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 10 12.5 16.5 16.5 16 16 20 20 20 20 24 24 25 22.5 26.5 26.5 32 23.5 27.5 27.5 Note 1) Figures in the table above are used as a reference when mounting the auto switches for stroke end detection

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 5mm