Slider Type Ball Screw Drive/11-LEFS Series

-LEFS Series AC Servo Motor Clean Room Specication Specifications 11-LEFS25, 32, 40 AC Servo Motor Model 11-LEFS25S2 6 11-LEFS32S3 7 11-LEFS40S4 8 Stroke [mm] Note 1) 50 to 600 50 to 800 150 to 1000 Work load [kg] Note 2) Horizontal 20 20 40 45 50 60 Vertical 8 15 10 20 15 30 LEF Up to 400 900 450 1000 500 1000 500 401 to 500 720 360 1000 500 1000 500 501 to 600 540 270 800 400 1000 500 601

MY1

Wall mounting z y P. 8-11-36 P. 8-11-6 MY1HT50-600 x y x z Wd: Workpiece (500 g) x 3. Ceiling mounting 4.

Mechanically Jointed Rodless Cylinder Series MY1

20 MY3M 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m1 MY1HT/m2 MY1HT/m3 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load mass kg Load mass kg Load mass kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 D20 20 20 -X 10 10 10 Individual -X 100 200 300 400

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to 500 kPa 50 to 500 kPa A sensor may be unconnected or miswired.

CA2

20 to 500 30 27 22 44 16 32 10 15 M8 x 1.25 14 11 M14 x 1.5 27 CA2 50 70 11 7 up to 600 20 to 600 35 32 27 52 20 40 10 17 M8 x 1.25 18 11 M18 x 1.5 30 63 85 11 7 up to 600 20 to 600 35 32 27 64 20 40 10 17 M10 x 1.25 18 14 M18 x 1.5 31 CS1 80 102 13 11 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 22 17 M22 x 1.5 37 100 116 16 11 up to 750 20 to 750 40 37 41 92 30 52 14 21 M12 x

CL

, #4 (#1+#4+#11) CLAG63SCLA63, #4 (#1+#4+#11) CLAG80SCLA80, #4 (#1+#4+#11) CLAG100SCLA100, #4 (#1+#4+#11) Single Clevis/CLAC (mm) Stroke range (mm) Bore (mm) CX GB BP BQ C GC J CD GD AL D GL A E GR B F H1 BN GA B1 W/o rod boot W/ rod boot 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 40 50 63 80 100 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 22 27 27 32

Air Cylinder Series CA2

20 to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 50 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 CS1 63 M10 x 1.25 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 7 18 14 M18 x 1.5 31 80 M12 x 1.75 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 11 22 17 M22 x 1.5 37 CS2 100 M12 x 1.75 Up to 750 20 to 750 40 37 116 41 92 30 52

15

1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless Motorless 500 500 500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500

Magnetically Coupled Rodless Cylinder

Allowable driving force Fn (N) 1000 Allowable driving force Fn (N) 500 50 40 30 20 300 200 10 5 100 Usable range Usable range 20 30 40 50 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B63 CY3B20 200 1000 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400

JXCx-OMT0023

11 11.

Air Cylinder Series CM2

53 53 77 154 154 36 11 10 54 30 55 75 23 27 10 3.2 134 171 44.5 Up to 300 Up to 500 177 188 47.3 143.5 to 500 Up to 300 Up to 300 Precautions on Trunnion Style, Flange Style 1.

Combination Cylinder

11 14 17 17 30 24 26 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M30 X 1.5 M30 X 1.5 M36 X 1.5 27 30 31 37 40 35 35 39 84 90 98 116 126 98 98 106 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 22 19 22 8 0 0 0 0 3.1-58 Lock-up

Electric Actuator/Slider Type

1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L3 L3 [mm] L3 [mm] L3 [mm] L3 [mm] 1,000 1,000 1,000 Mer m 500 500 500 500 0 60 50 40 30 20 10 0 0 2 4 6 8 10 Work load [kg] 0 0 Work load [kg] 0 0 Work load [kg] 0 Work load [kg] 5 10 15 20 10 20 30 40 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 1,000 1,000 1,000 500 500 500 500 Mep m 0 0 0 1 2 3 4 5 Work

Electric Actuator

Electric Actuator Series LEYG Guide Rod Type Pushing force (lbf) Vertical work load (lb) Screw lead (mm) Speed (mm/s) Stroke (mm) Controller series Specifications Series Page 15 to 500 8 to 250 4 to 125 18 to 500 9 to 250 5 to 125 24 to 500 12 to 250 6 to 125 15 to 500 8 to 250 4 to 125 18 to 500 9 to 250 5 to 125 3.3 7.7 16.5 15.4 33 64 19.8 44 90.4 3.3 7.7 16.5 4.4 11.0 24.3 8.5 16.6 31.7

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12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Basic type / Direct mount type Series CY3B/CY3R

1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range 5 Usable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Battery-less

Lx = 500 mm, Ly = 240 mm, Lz = 500 mm 4.

MY1

speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m MY1HT/m MY1HT/m 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load weight kg Load weight kg Load weight kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 20 20 20 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s

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7 12 11 18 11 18 19 28 19 28 29 43 29 43 130 220 210 320 210 320 330 500 330 500 520 770 520 770 1.4 1.5 VX 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 4 1 2.5 2.6 VX3 5.7 5.8 32 JIS Symbol VXA Valve type Type N.C.

Electric Actuators

A B C D Maximum Speeds for Each Transfer Load Unit (mm/s) Transfer load (kg) 15 20 25 30 1000 1000 930 740 600 500 Note Model LJ1H202PC-500LJ1H202PC-600LJ1H202PC-700LJ1H202PC-800LJ1H202PC-900LJ1H202PC-1000700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-1B2H1Power supply: 200/220(V)AC 10% Compatible controller