Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 82 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 84 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 98 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 102 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11

Table of Contents

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

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-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

A

S F O O T E Diameter Model No d2 CK S5 K1 K2 13 G1 l1 G2 EM G3 CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 D I M E N S

5 Port Solenoid Valve Series SY3000/5000/7000/9000

11 7.5 (P, EA, EB port) 1/8 20.5 41 L plug connector (L): M plug connector (M): M8 connector (WO): 10-SY3 40(R)-M-01 3 4 5 10-SY3 40(R)-WO-01 3 4 5 10-SY3 40(R)-L-01 3 4 5 Approx. 300 (Lead wire length) 38.1 53.5[60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6[71.6] 66.5 34 41.4 115.3 60 97.5[101.9] 117.1[121.5] 42.3[44.5] 20.5 11 11 20.5 11 20.5 11 11 11 32.5[34.7] 27.5 7.5 16.5

Hydraulic

(mm) Bore size (mm) C B BB GA LX P LW LT F J LH NA T SS S Z X1 Y1 R M CD 32 62 58 38 11 16 158 220 11 32 11 40 8 3/8 40 222 37 30 39 32 M10 x 1.25 25 to 800 13 0.15 0.13 40 69 65 45 11 12 158 220 11 32 11 43 8 3/8 46 222 36 33 42 32 M10 x 1.25 25 to 800 13 50 85 76 52 14 15 176 241 13 35 11 50 8 1/2 58 246 43 37 46 40 M10 x 1.25 25 to 800 15 63 98 90 63 18 15 186 263 15 42 14 60 10 1/2 65

V100

(50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or equivalent (130C) (6) 51 45 17 (5.3) 11 (2.9) 5.5 50 Hz 60 Hz 50 Hz 60 Hz Inrush Apparent power (VA) (Power consumption (W)) VP AC Holding S070 Power consumption (W) DC Bracket (AXT338-11)/For body ported type VQ Accessory (Option) Indicator

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60 1.

Air Slide Table

Bottom view of MXQ12A-40Z Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ12A-10Z 28 17 11 32 46 11 32 82.5 4 2 62.5 75 MXQ12A-20Z 28 19 11 32 48 13 32 92.5 4 2 64.5 77 MXQ12A-30Z 38 21 11 40 58 15 40 102.5 4 2 74.5 87 MXQ12A-40Z 34 27 60 23 50 120.5 6 3 92.5 105 MXQ12A-50Z 34 11 37 39 60 23 60 130.5 6 3 102.5 115 MXQ12A-75Z 36 25 41 36 100 42 85 174.5 8 4 146.5 159 MXQ12A-100Z 36

Compact Cylinder

35 40 45 50 55 60 35 40 45 50 55 60 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt part no.

Electric Actuator

Lead 8: 11-LEFS32B 20 20 AC Servo Motor Specific Product Precautions 10 10 Lead 16: 11-LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Speed: V [mm/s] Vertical 11-LEFS40/Ball Screw Drive Horizontal 60 60 Lead 10: 11-LEFS40B 50 50 Work load: W [kg] Work load: W [kg] 40 40 Lead 20: 11-LEFS40A 30 30 20 20 Lead 10: 11-LEFS40B 10 10 0 0 0 100 200 300 400 500 600

NCQ2/CQ2

Non-rotating rod end mounting Mounting bolt Mounting bolt Surface treatment: Nickel plated Material: Chromium molybdenum steel D C D C C 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 130 155 D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80

Table of Contents

Stroke range (mm) Bore size (mm) A N AD AC M AF L AE F K AB C E J AA AP B D G H I 99 45 75 16.5 25 80 30 60 11 92 55 24 5.5 12 25 108 60 30 20 75, 100, 125, 150, 200 M5 x 0.8 depth 10 9.5 depth 6 M8 x 1.25 depth 14 109 54 85 16.5 35 100 30 70 13 26.5 113 6.6 65 16 30 130 65 35 25 11 depth 8 M10 x 1.5 depth 18 M6 x 1 depth 12 75, 100 125, 150 200, 250 300 129 60 100 19 35 106 35 80 16 118

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D 35 40 45 50 55 60 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 50 55 60 65 70 75 80 D' 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D' 40 45 50 55 60 65 45 50 55 60 65 70 45 50

CQ2

Model C Mounting bolt Mounting bolt D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 Model C Mounting bolt D 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 C' D' 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70

Table of Contents

Frequency (Hz) 45 40 55 50 65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.

Smooth Cylinder/Low Speed Cylinder

(mm) DDH10 (Hole) Bore size (mm) DA DL DU DC DX DE DO DR DT DS DH DF B Z Part no. +0.058 0 40 CA2-B04 57 35 11 65 15 85 10 9 17 8 40 52 60 165 10 +0.070 0 50 CA2-B05 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 +0.070 0 63 CA2-B06 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 196 16 +0.084 0 80 CA2-B08 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 +0.084 0 100 CA2-B10 93 60 16.5 100

4/5 Port Solenoid Valve

Hz 25 2500 mm 2 200 VAC 50/60 Hz 30 3000 mm 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 50 5000 mm 3 M plug connector 220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 M8 connector For type W, DC voltage is only available.

Table of Contents

-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

ZP

Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3-Y13B:6-B5 ZP3-Y13B:10-B5 13.2 14.2 16.3 13.4 14.4 16.5 26.5 29 33 44 50 60 11 14.5 20.5 13.8 15.1 17.5 26.5 29 33 44 50 60 11 14.5 20.5 14.0 15.3 17.7 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."