Hydraulic

11 11 40 88 109 21 M10 x 1.25 37 136 30 11 25 to 800 0.13 0.18 40 65 45 12 42 3/8 11 11 11 46 95 118 21 M10 x 1.25 36 136 30 11 25 to 800 0.2 50 76 52 15 46 1/2 14 13 11 58 115 145 27 M10 x 1.25 43 150 30 13 25 to 800 0.15 63 90 63 15 52 1/2 18 15 14 65 132 165 27 M12 x 1.5 43 156 35 15 25 to 800 0.2 80 110 80 17 65 3/4 18 18 16 87 155 190 22 M16 x 1.5 44 166 35 18 25 to 1000 0.3 0.18 100

CLQ

-15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D CDLQB25-5D -100D -100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D

Compact Cylinder with Lock Series CLQ

-15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D CDLQB25-5D -100D -100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D

Compact Cylinder with Lock Series CLQ

CLJ2 CLQB: Without Auto Switch CLM2 Cylinder model Cylinder model Cylinder model Cylinder model Mounting bolt size CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt size Mounting bolt size CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting

CLQ

-10D M8 x 100l M10 x 125l -15D -15D -15D -15D x 105l x 130l -20D -20D -20D -20D x 110l x 135l -25D -25D -25D -25D x 115l x 140l 8.5 -30D -30D -30D -30D x 120l x 145l -35D -35D -35D -35D x 125l x 150l 16.5 15.5 8.5 -40D -40D -40D -40D x 130l x 155l -45D -45D -45D -45D x 135l x 160l -50D -50D -50D -50D x 140l x 165l -75D -75D -75D x 165l x 190l -100D -100D -100D x 190l x 215l 9-10-11 11 Series

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 82 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 84 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 98 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 102 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

Smooth Cylinder/Low Speed Cylinder

9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l CHQB100 10D (M) M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l CH QB40 5D (M) 15D (M) 10D (M) 20D (M) 15D (M) x 90l x 95l x 100l x 105l x 110l

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(M) 10D (M) 20D (M) 15D (M) 25D (M) 20D (M) 30D (M) 25D (M) 10 35D (M) 30D (M) 15.5 40D (M) 35D (M) 45D (M) 40D (M) 50D (M) 45D (M) 75D (M) 50D (M) 100D (M) CHQWB32 5D (M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l x 195l CHQWB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M)

Table of Contents

0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5

Table of Contents

-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) A 9 13 11 13.5 B 6 8.5 11.5 14.5 A 9.5 13.5 11.5 14 B 6.5 9 12 15 A 6.5 10.5 8.5 11 B 3.5 6 9 12 C 8 12 10 12.5 D 5 7.5 10.5 13.5 C 12 16 14 16.5 D 9 11.5 14.5 17.5 C 11 15 13 15.5 D 8 10.5 13.5 16.5 32

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

11.5 12 17 9 9 9 9 13 13 11.5 12 17 17.5 18 23 15 7 9.5 10 15 15 7 19 11 18 18.5 23.5 15.5 9.5 12 12.5 17.5 17 11 21 15 22.5 23 28 20 9.5 12 12.5 17.5 21.5 11 25.5 15 30.5 31 36 28 3 5.5 6 11 29.5 4.5 33.5 8.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Secondary Batteries

(Example) 90-RSDQB32-15D *Specifications and dimensions for the 90-series are the same as standard products. Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches.

Large Size Vacuum Module: Series ZR

Pressure Switch for Vacuum: ZSE2-0RIndicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer ZSE2-0RZSE2-0R-L ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN L SET H L SET H 15 15 9 9 2 x M2.5 x 41L Mounting thread 2 x M2.5 x 41L Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port

ZX

11 Series ZX Suction Filter Unit: ZX1-F Specifications ZX1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF 35 g Unit no.

Vacuum Module Series ZX

Filter JIS Symbol 32 41 51 2 x R1.8 1 10 8.8 (Mounting hole) 3.6 19 4.8 (Mounting hole) Filter M5 (or M6) IN port M5 (or M6) OUT port 2 x 3.5 (Mounting hole) (62) 58 50 8 OUT IN 18 15.5 4 11 20 4.2 6.8 11 8.8 Bracket A (Standard accessory) Note) Dimensions : For A mounting bracket. Filter case About this product Caution The filter mounted on the product is a simplified one.