Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

-M9NL u Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage (Pam3/s or less) Note 1) Symbol Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM

NCQ8

L M9NL 197in (5 m) .

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !3 o i q w Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Material Note No. Description No.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-25D -30D CDQ2B16-5D -10D -15D -20D -25D -30D CDQ2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQ2B63-10D -15D -20D -25D -30D -35D

CQ2

-25D -30D CQ2B16-5D -10D -15D -20D -25D -30D CQ2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-25D -30D -35D -40D -45D -50D -75D -100D CQ2KB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2KB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2KB12-5D -10D -15D -20D -25D -30D CQ2KB16-5D -10D -15D -20D -25D -30D CQ2KB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2KB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2KB32-5D -10D -15D -20D -25D -30D -35D

CATALOG

10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

A

10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

CQS

9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

Hydraulic

11 11 40 88 109 21 M10 x 1.25 37 136 30 11 25 to 800 0.13 0.18 40 65 45 12 42 3/8 11 11 11 46 95 118 21 M10 x 1.25 36 136 30 11 25 to 800 0.2 50 76 52 15 46 1/2 14 13 11 58 115 145 27 M10 x 1.25 43 150 30 13 25 to 800 0.15 63 90 63 15 52 1/2 18 15 14 65 132 165 27 M12 x 1.5 43 156 35 15 25 to 800 0.2 80 110 80 17 65 3/4 18 18 16 87 155 190 22 M16 x 1.5 44 166 35 18 25 to 1000 0.3 0.18 100

CLQ

-20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D CDLQB25-5D -100D -100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D

Compact Cylinder with Lock Series CLQ

-20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D CDLQB25-5D -100D -100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D

CLQ

-15D -15D x 105l x 130l -20D -20D -20D -20D x 110l x 135l -25D -25D -25D -25D x 115l x 140l 8.5 -30D -30D -30D -30D x 120l x 145l -35D -35D -35D -35D x 125l x 150l 16.5 15.5 8.5 -40D -40D -40D -40D x 130l x 155l -45D -45D -45D -45D x 135l x 160l -50D -50D -50D -50D x 140l x 165l -75D -75D -75D x 165l x 190l -100D -100D -100D x 190l x 215l 9-10-11 11 Series CLQ Construction: 20 to 32 i o

CQS

CQSWB125D 10D 15D 20D 25D 30D CQSWB165D 10D 15D 20D 25D 30D CQSWB205D 10D 15D 20D CQSWB2025D 30D 35D 40D 45D 50D CQSWB255D 10D 15D 20D 25D 30D 35D 40D 45D 50D 6.5 10 6.5 7 10 Note) Appropriate plain washer must be used for through-hole mounting.

MHF2

Double piston construction achieves compact design with strong holding force. q r Mounting is possible from 4 directions. e w Model Bore size Holding force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 Features 2 Series MHF2 Model Selection Model Selection Selection procedure Confirm gripping force Confirm

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 82 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 84 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 98 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 102 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11

Smooth Cylinder/Low Speed Cylinder

9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.