24

st Over 175 st 25 st or less Over 25 st to 175 st Over 175 st 32 97 102 140 20 12.5 17.5 55.5 40 97 102 140 20 6 11 49 50 106.5 118 161 25 9.5 21 64 63 106.5 118 161 25 4.5 16 59 25 st or less Over 25 st to 75 st Over 75 st to 175 st Over 175 st 25 st or less Over 25 st to 75 st Over 75 st to 175 st Over 175 st 32 84.5 98 118 140 16 0 13.5 33.5 55.5 40 91 98 118 140 16 0 7 27 49 50 97 114

CA2

A A B A B A B A B A B A B Hs Hs Hs Hs Ht Hw Hw Hs Hs Ht Hs 40 13.5 0 11.5 12 15 23 8 0 0 0 18 3 15.5 0.5 40 31 38.5 31 38 50 14 0 12 12.5 15.5 23.5 8 0 0 0 18.5 3 16 0.5 43.5 35 42.5 35 43.5 63 18.5 0 16.5 17 20 28 9 0 0 1 23 4 20.5 1.5 85 85.5 93.5 49 42 91 91 93 48 42 50.5 80 22.5 1.5 20.5 21 24 32 11 0 0 3 27 6 24.5 3.5 93.5 94 102 55.5 50 107 107 101.5 54 50 59 100 25.5 2.5 23.5 24 27

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) 34.5 28 R P 26.5 B B B B B B B B 18.5 11 Note 2) P = 10.5 18.4 6 2n-C3, C4, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 M5: M5 thread (7.5) This drawing shows the case of VV5Q04-T2-D.

Air Cylinder Series CA2

A B A B A B A B A B A B A B A B A B Bore size 40 50 63 80 100 6 4 3.5 1.5 3 1 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 3.5 1.5 3 1 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 5.5 4 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 9 7 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 10.5 9 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 Note 1) Adjust

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

If valves other than the non-polar type are used, this may cause malfunction. 8 0 1 9 10 2 B B B B B 11 3 12 4 D side U side 13 5 A A A A A 14 6 15 7 + + + + + SoL. A SoL.

1

CP95 Front mounting flange Hs B A A B B B A Hs Hs Hs Hs Hs A NCM 20 22.5 7 5 12 6.5 4 11 23.5 29.5 26 29 25 8 7.5 25 B 25.5 7 5 12 6.5 4 11 26.5 32.5 29 32 28 8 7.5 CDM2 NCA 32 29 8 6 13 7.5 5 12 30 36 32.5 35.5 31.5 9 8.5 HS 40 C D 33 13 11 18 12.5 10 17 34 40 36.5 39.5 35.5 14 13.5 D20 25.5 30.5 [9.5] 21.5 (29.5) 18.5 (26.5) 25.5 (33.5) 28 [7] 35 [14] 21 (29) View C-C 26.5 32.5 29 32 28

Valve Single Unit

L1 L2 L3 L4 160.5 173 185.5 185.5 198 210.5 223 235.5 M3 Terminal screw A: Orange B: Green 150 162.5 175 175 187.5 200 212.5 225 129 139.5 150 160.5 171 181.5 192 202.5 15.5 16.5 17.5 12.5 13.5 14.5 15.5 16.5 (Rail mounting hole pitch 12.5) Stations n 10 stations 11 12 13 14 15 16 17 stations 248 248 260.5 273 285.5 298 310.5 310.5 L1 L2 L3 L4 237.5 237.5 250 262.5 275 287.5 300 300 213 223.5

5 Port Solenoid Valve

83 A 4 A 4 A 4 (114.8) 80.2 31.8 15 11 60.5 40.9 1P 1.7 30.2 B 2 B 2 B 2 B 2 B 2 B 2 4.6 22.2 4 x M4 mounting hole 4.6 L2 34.7 1.5 M5 x 0.8 [4(A), 2(B) port] SI unit L4 (DIN rail mounting hole pitch: 12.5) 5.3 One-touch fitting [4(A), 2(B) port] L3 Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" [External pilot] (Station n) (Station 1) One-touch fitting [PE: Pilot EXH port] [X:

Cylinder with Lock

0.6 55 50 70 15 76 96 13.5 20 19 11 353.5 393.5 Rotating Angle Bore size [mm] A B A + B + 90 32, 40 25 45 160 50, 63 40 60 190 80, 100 30 55 175 32 C96N Series Construction (Double Rod) @0!

0.4

4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 94.9 76.2 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Dimensions Formula: L1 = 17.5n + 52, L2 = 17.5n + 106 n: Stations (Maximum 16 stations) 16 332 386 412.5 423 15 314.5 368.5 400 410.5 14 297 351 375 385.5 13 279.5 333.5 362.5 373 12 262 316 337.5 348 11 244.5 298.5 325 335.5

Table of Contents

Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover A Motor cover B Auto switch Magnet Brake Material Note 200W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.

10

A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

Base Mounted Metal Seal/Rubber Seal Series VQ

B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 (1.5) 37.5 17.5 A 1 2 3 4 5 6 7 8 10 11 12 L n 13 14 15 16 Dimensions Formula L1 = 22n + 24 n: Station 7.5 4 9 46 75 85.5 178 200 210.5 376 400 410.5 68 87.5 98 354 375 385.5 90 112.5 123 112 137.5 148 134 162.5 173 288 312.5 323 310 337.5 348 332 362.5 373 156 175 185.5 266 287.5 298 200 225 235.5 222 250 260.5 244 262.5 273 L1 L2 L3 How to Order Double

MGP

FA C + Stroke E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50st Over 50st B C DA DB FA FB G GA GB GC H HA J K L 25, 50st Over 50st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RR RB RA QB QA

SQ1000/2000

B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

MB

45 45 60 60 75 85 89 93 105 105 129 129 157 12 16 16 20 20 25 25 92 96 109 109 134 134 163 62 80 80 100 100 120 142 7 9 9 11 11 13.5 13.5 MB-S04 MB-S06 MB-S10 MB-S12 Double clevis pivot bracket B DX DB Z + Stroke DD B 90 B 4-DT A DH DS DA DL DU DU 4-DR DE DC DO DO Without Air Cushion (mm) Bore size (mm) Part no.

V100

A B A B DIN terminal: VP3165-D Conduit terminal: VP3165-T Conduit terminal with indicator light (TL) Light Light G 1/2 Max. 11 Applicable cable 6 to 12 G 1/2 Rc 1/4 ( ): With indicator light (TL) 4-10-6 7 Large Size 3 Port Solenoid Valve Rubber Seal Series VP3145/3165/3185 Dimensions: VP3185 A B Grommet: VP3185-G V100 G 1/2 SY SYJ Manual override Lead wire length 200 mm External pilot

CQ2

13.5 17.5 21.0 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5 31 33.5 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 9 12 12 12 13.5 17.5 15.5 18 22 25.5 B 14.5 15 17.5 17.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

MGP

XX detail 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard stroke (mm) Bore size (mm) ML NN OA B C DA FA FB G GA GB GC H HA J K L MM 84.5 62.5 16 12 10 48 12.5 9 12.5 112 M6 24 24 34 M8 x 1.25 20 M8 x 1.25 6.6 32 25, 50, 75, 100 125, 150, 175 200, 250, 300 350, 400 91 69 16 12 10 54 14 10 14 120 M6 27 27 40 M8 x 1.25 20 M8 x 1.25 6.6 40 97