Clean Series: 10 (Clean Room), Stations: 06, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS3 (w/5 m Cable, Side Entry), Option: BD (w/Back Pressure Check Valve, DIN Rail Mount Style)

Clean Series: 10 (Clean Room), Stations: 06, Cylinder Port: M5 (M5 Thread), Kit: FU0 (w/o Cable, Top Entry), Option: BD (w/Back Pressure Check Valve, DIN Rail Mount Style)

Clean Series: 10 (Clean Room), Stations: 07, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS0 (w/o Cable, Side Entry), Option: BD (w/Back Pressure Check Valve, DIN Rail Mount Style)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS0 (w/o Cable, Side Entry), Option: BD (w/Back Pressure Check Valve, DIN Rail Mount Style)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS3 (w/5 m Cable, Side Entry), Option: BD (w/Back Pressure Check Valve, DIN Rail Mount Style)

Clean Series: Clean Room, Stations: 03, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/1.5 m Cable, Top Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 05, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 05, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/5 m Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 06, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 06, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/5 m Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 06, Cylinder Port: M5 Thread, Kit: w/o Cable, Top Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 07, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/5 m Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Plug-inmManifold for VQ1*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MANIFOLD ASSY, 10-STA, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 2.83514 lb

Plug-inmManifold for VQ1*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MANIFOLD, 10-STA, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 2.04714 lb

CLS

8 15 13 3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL 7 7 7 6 6 B D-F5/J5

Table of Contents

MHSL3-100D MHSL3-125D 10 10 10 10 40 40 40 40 5 6.4 5 6.4 12 5 13 10 90 7 15 90 (mm) G 86 112 FZ 10 12 FY 54 68 FX 59 74 EC 41 48 EO 65 80 DO 103 132 DC 79 100 BA 134 166 CA 18 24 CB 44.5 54 BC 134.6 166.6 BD 56 66 AD 78 102 K 15 21 AC 6 8 J 38 52 AA 135 175 AB 129 167 H 31 43 Model MHSL3-100D MHSL3-125D BB 184 234 I 14 17 L +0.036 0 +0.036 0 SB 14 17.5 SA 9 11 NB SC 31 32 R 118 148 O 7.5

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

LX

10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40