Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS0 (w/o Cable, Side Entry), Option: BD (w/Back Pressure Check Valve, DIN Rail Mount Style)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS3 (w/5 m Cable, Side Entry), Option: BD (w/Back Pressure Check Valve, DIN Rail Mount Style)

Clean Series: Clean Room, Stations: 03, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/1.5 m Cable, Top Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 05, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 06, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 06, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/5 m Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 06, Cylinder Port: M5 Thread, Kit: w/o Cable, Top Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 07, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 07, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/5 m Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/5 m Cable, Side Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style

Rotary Table/Rack & Pinion Style Series MSQ

CRQ2X MSQX MRQ Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch D-M9(V), D-M9W(V) D-A9, D-A9V Size Rotation Hysteresis angle Hysteresis angle Operating angle m 10 10 10 10 10 10 10 Operating angle m 10 10 10 10 10 10 10 A B A B 90 80 65 50 45 40 35 55 45

CLS

8 15 13 3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL 7 7 7 6 6 B D-F5/J5

Cylinder with Lock Series CLS

10 10 10 10 RLQ D-A59W 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL MLU D-A3/A44 D-G39/K39 BS1-125 BS1-140 BS1-200 BS1-160 BS1-180 12 13 7 7.5 8 MLGP D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL BS4-125 BS4-125 BS4-160 BS4-180 BS4-200 ML1C 5 5 5.5 6 6 D-G39/K39 11 11 10 10 10 [Mounting screw set made of stainless steel] Since this is a guideline

Table of Contents

MHSL3-100D MHSL3-125D 10 10 10 10 40 40 40 40 5 6.4 5 6.4 12 5 13 10 90 7 15 90 (mm) G 86 112 FZ 10 12 FY 54 68 FX 59 74 EC 41 48 EO 65 80 DO 103 132 DC 79 100 BA 134 166 CA 18 24 CB 44.5 54 BC 134.6 166.6 BD 56 66 AD 78 102 K 15 21 AC 6 8 J 38 52 AA 135 175 AB 129 167 H 31 43 Model MHSL3-100D MHSL3-125D BB 184 234 I 14 17 L +0.036 0 +0.036 0 SB 14 17.5 SA 9 11 NB SC 31 32 R 118 148 O 7.5

Compact Rotary Actuator Series CRQ2

6 i D249 Series CRQ2 Dimensions Size 10/15 3H9 effective depth 2 0.6 TA 30 BU 2 x M5 x 0.8 through (Opposite side 7.6 counterbore depth 4.2) B With double shaft DD W D 2 10 2 x M5 x 0.8 (Port) H Q (US) (UW) BD BC M ab BA BA BB D (AU) Max.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MHSL3-100D MHSL3-125D 10 10 10 10 40 40 40 40 5 6.4 5 6.4 12 5 13 10 90 7 15 90 (mm) G 86 112 FZ 10 12 FY 54 68 FX 59 74 EC 41 48 EO 65 80 DO 103 132 DC 79 100 BA 134 166 CA 18 24 CB 44.5 54 BC 134.6 166.6 BD 56 66 AD 78 102 K 15 21 14 17 AC 6 8 J 38 52 AA 135 175 AB 129 167 H 31 43 Model MHSL3-100D MHSL3-125D BB 184 234 L SB 14 17.5 SA 9 11 R 118 148 NB SC 31 32 Q 23 31 NA 37 43 O 7.5 10.5

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

LX

10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40

LX

10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40