High Vacuum Angle Valve

Flange type Symbol Nil KF(NW) K(DN) D Leakage (Pam3/s or less) Note) Symbol Changed part Quantity Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External Type XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 8-1 o 8-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 8-1 1.3 x 10-9 (FKM) r o 8-2 XLQ Note) Values at normal temperature

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

Aluminum High Vacuum Angle Valve

Flange type Symbol Nil KF(NW) K(DN) D Leakage (Pam3/s or less) Note) Symbol Changed part Quantity Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External Type XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 8-1 o 8-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 8-1 1.3 x 10-9 (FKM) r o 8-2 XLQ Note) Values at normal temperature

High Vacuum Angle Valve, XL Series

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External Operating time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum

XL

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External Operating time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Plug-inmManifold for VQ1*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MANIFOLD ASSY, 10-STA, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 2.83514 lb

Plug-inmManifold for VQ1*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MANIFOLD, 10-STA, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 2.04714 lb

Clean Series: 10 (Clean Room), Stations: 10, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 12, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FS1 (w/1.5 m Cable, Side Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: Clean Room, Stations: 10, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 12, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/1.5 m Cable, Side Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate