Plug-in Unit

B 8B () (+) Station 8 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL. A 9A () (+) SOL. B 9B () (+) Station 9 SOL. A 10A () (+) SOL. B 10B () (+) Station 10 Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM. (+) () COM. Positive COM.

VQ5000

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Plug-in/Plug Lead: Single Unit

SOL.A 8A () (+) 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A SOL.B 8B () (+) 8 stations 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A () (+) SOL.B 9B () (+) 9 stations SOL.A 10A () (+) SOL.B 10B () (+) 10 stations (+) () COM Note) There is no polarity. It can also be used as a negative common.

VQ5000

SOL.A 8A () (+) 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A SOL.B 8B () (+) 8 stations 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A () (+) SOL.B 9B () (+) 9 stations SOL.A 10A () (+) SOL.B 10B () (+) 10 stations (+) () COM Note) There is no polarity. It can also be used as a negative common.

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

smcmaintenancepartslist

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

Air Fittings & Tubing

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB L2 65 40 61.5 47 73 55 86 19 26 29 39 41 57 KM11-04-08-6 6 10 18 29.5 19.5 27 12 16 18.5 6 10.6 8 4 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 19.5 31.5 21.5 31 13.5 17 21 7.5 13 10 6 KM11-08-12-6 6 85 KM11-08-12-10 10 116 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 12 8 SKM, #1 to #6 KM12 Thread Rc(PT) T Part No. N H (Hex.)

rep-modular-e

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

2

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW direction CW direction App. 20 APPENDIX Setting value Output item Description Setting value Output item Description 0A Feedback position (Note 1, 2, 3) (10 V/1 Mpulse) 0B Feedback position (Note 1, 2, 3) (10 V/10 Mpulse) CCW direction CCW direction 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

C10 Option 10 10 stations M Mixed D side For bottom ported: Rc 1/4, 3/8 only.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

10 stations Rc 3/4 Note 1) Max. 10 stations.

Table of Contents

Model Description AC10B G27-10-R1 G27-10-R1 (3) AD17 Y100 AC25B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC30B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC40B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC40B-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC50B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC55B G46-10-02 GC3-10AS G46-2-02 GC3-2AS

LEC-OM07605CN

) 10 [V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW CW 21 CCW CCW 0A (123) (10V/1Mpulses) 0B (123) (10V/10Mpulses) 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -10 [V] -10 [V] CW CW CCW 0C (123) (10V/100Mpulses) 0D 8[V] 10 [V] 100 [Mpulse] 0 400[V] 0 100 [Mpulse] -10 [V] CW CCW CCW 0E 2(3) 15 (345) (10V/10 pulses) 8 [V] 10

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

VFS

. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

Filter Regulator IW Series

Min. 207 Panel 54 72.5 10 69.5 2 R1/8 74 40 7 30 OUT OUT IN 2 x M6 depth 10 2 x Rc1/4 Pressure gauge port Rc1/8 78 70 A 160