Table of Contents

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Table of Contents

20 50 40 1001 2 3 4 5 10 20 30 4050 30 Air Cushion Stroke (mm) m3 max. m1 max. m2, m3 max.

Air Cylinder

10 7.5 15 27 39 0.5 16 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 D-A9lV 10 7.5 7.5 15 27 39 0.5 16 7 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 Rail mounting D-F7l/F7lV D-J79/J79C D-A7lH/A80H D-A73C/A80C 10 10.5 10.5 18 30 42 3.5 16 10 10 18.5 30.5 42.5 48.5 72.5 90.5 102.5 4 D-F7lW/J79W D-F7lWV/F79F D-F7BA/F7BAV 10 10.5 18 30 42 3.5 16 10 18.5 30.5 42.5 48.5 72.5 90.5 102.5 4 D-F7NT 10 15.5

Free Mount Cylinder

Action D Double acting Standard stroke (mm) Port thread type 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Nil TN TF Applicable Auto Switches/Refer to page P.68 to 72 for further information on auto switches.

Compact Hydraulic Cylinder

CHKm Standard Strokes JIS symbol CHN CHM Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 CHSm 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CH2m 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CHA 10, 15, 20, 25, 30, 35, 40,

Table of Contents

MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0803-10 MI-A0803-20 MI-A1203-10 MI-A1203-20 MI-A1203-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503

ISO Cylinder

GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 12 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75

NCQ2/CQ2

Dimensions (Without auto switch) Double acting, Single rod: Female thread H thread effective depth C A + Stroke B + Stroke L 12 20 32 40 50 63 80 100 Bore size 5, 10 20, 30 40, 50 26.5 (28.5) 23 3.5 (5.5) 15, 25 5, 10 20, 30 40, 50 5, 10 20, 30 40, 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 Stroke (mm) 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15,

NCG/CG1

5.5 25 39 28 3.2 (35.8) 42 16 28 47.6 Up to 125 8 2-TD8 (Pin O.D.) 0.025 0.047 10 5.5 30 43 33 3.2 (39.8) 42 20 28 53 45.5 Up to 200 10 0.032 0.059 10 6.6 35 54.5 40 4.5 (49.4) 48 22 28 67.7 54 Up to 200 12 0.032 0.059 10 6.6 40 65.5 49 4.5 (58.4) 56 30 30 78.7 63.5 Up to 200 14 Consists of pin, flat washer and hexagon socket head cap bolt.

Air Cylinder Series CM2

19 8 13 8 41 28 5 6 30 15 24 9 62 14 13 5 20 M8 x 1.25 M20 x 1.5 133 142 15.5 10.5 8 1 25 22 9 30 25 10 19 10 13 8 45 8 30 15 30 9 62 14 17 6 26 5.5 M26 x 1.5 137 146 M10 x 1.25 19.5 10.5 33.5 8 1 32 22 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 17 6 26 5.5 M26 x 1.5 139 148 M10 x 1.25 19.5 10.5 37.5 34.5 4 1 40 24 10 11 11 38 15 30 14 16 50 12 39 88 18 22 8 21 7 M32 x 2 32 M14 x 1.5 177

Compact Cylinder

Dimensions (Without auto switch) Double acting, Single rod: Female thread H thread effective depth C B + Stroke L A + Stroke 20 32 40 50 63 80 100 12 Bore size 15, 25 5, 10 20, 30 40, 50 5, 10 20, 30 40, 50 26.5 (28.5) 23 3.5 (5.5) 5, 10 20, 30 40, 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 Stroke (mm) 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15,

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

0.4 MPa External grip 0.4 MPa 0.3 MPa MHK 0.3 MPa 10 10 F 0.2 MPa 0.2 MPa MHS MHC 0 0 10 10 20 20 30 30 40 40 Gripping point L (mm) Gripping point L (mm) F F MHT MHS4-25D MHS4-25D MHY 50 50 Pressure 0.6 MPa Pressure 0.6 MPa MHW 40 40 F Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa -X 30 30 Internal grip 0.4 MPa 0.4 MPa 20 20 MRHQ 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 MA D0 0 10 10

XM, XY

temperature XLA16A-30-1H XLA25A-30-1H XLA40A-30-1H XLA50A-30-1H XLA63A-30-1H XLA80A-30-1H XMC XYC General use XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1 XLC63-30-1 XLC80-30-1 High temperature XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H XLC63-30-1H XLC80-30-1H XMD XYD XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD63-30-1 XLD80-30-1 General use : Standard High temperature XLD25-30-1H XLD40-30-1H

Free Mount Cylinder Series CU

) 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 Precautions Be sure to read before handling.

Smooth Cylinder/Low Speed Cylinder

stroke (mm) 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 Precautions Be sure to read before handling.

Air Cylinder Series MB

(1) 40 50 64 80 80 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 + 0.058 0.0 Y-04M (1) 12.5 CS1 + 0.30 + 0.10 + 0.30 +

Auto Switch Guide

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Auto Switch Guide

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Auto Switch Guide

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet