5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

C10 Option 10 10 stations M Mixed D side For bottom ported: Rc 1/4, 3/8 only.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

F 3 8 Option VV5FS4-10-061-03-A VFS4110-5D 1 4 The asterisk denotes the symbol for assembly.

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Smooth Cylinder/Low Speed Cylinder

D-M9A D-M9V Qty. of auto switches mounted D-A9 D-M9 D-P3DW Note 1) 5 10(5) 15 (10) 15 (5) 1 pc. 10 15 5 10 10 15 (10) 15 (5) 2 pcs. 10 15 5 Note 1) 25 is only applicable for D-P3DW.

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

2

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

Free Mount Cylinder

1 pc. 10 5 10 2 pcs.

Compact Hydraulic Cylinder

8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore size (mm) K MM NA NB NN P S T V W ZZ IA 0.020 0.053 0.020 0.053 0.025 0.064 0.025 0.064 20 5 M8 x 1.25 17 15 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 23f8

Hydraulic

10 15 15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Free Mount Cylinder Series CU

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

42

Description Material Q'ty VFR VVQ5000-80A-1 Gasket HNBR 10 Type VVQ5000-80A-2 Gasket HNBR 10 Option VQ7 A For 1 station Note) Spare parts consist of sets containing 10 pcs. each.

11-cqss-e

Contents Bore size (mm) CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS 12 16 20 25 CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS !3 !4 !5 Rod seal Set of left nos. !3, !4, !5. Piston seal NBR Tube gasket Seal kit includes !3, !4, !5. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 69

Rotary Clamp Cylinder/Standard Series MK

Contents Bore size (mm) CQSB12-PS 12 16 20 25 32 40 50 63 CQSB12-PS CQSB16-PS MK20Z-PS MK25Z-PS MK32Z-PS MK2T40-PS MK2T50-PS MK63Z-PS !0 !1 !2 13 !

Compact Cylinder/Anti-lateral Load Type

Contents Bore size (mm) CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS 12 16 20 25 CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS !3 !4 !5 Rod seal Set of left nos. !3, !4, !5. Piston seal NBR Tube gasket Seal kit includes !3, !4, !5. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 69

03-mk-e

Contents Bore size (mm) CQSB12-PS 12 16 20 25 32 40 50 63 CQSB12-PS CQSB16-PS MK20Z-PS MK25Z-PS MK32Z-PS MK2T40-PS MK2T50-PS MK63Z-PS !0 !1 !2 13 !

CLQ

Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Weight (g) 25 9 YB-03 32, 40 6.5 10 18 50 80 YU-03 15.8 14 M8 x 1.25 8 7 17 6 11 11 YB-05 50, 63 6.5 12 22 60 120 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-08 M16 x 2 80 24.8 23 13 90 9 22 8 20 14 YB-08 80 8.5 16 28 75 230 YU-10 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 18 YB-10 100 10.5 18 36 90 455 9-10-25 25 Series CLQ Proper

Compact Cylinder with Lock Series CLQ

CNG YA-03 YA-05 YA-08 YA-10 18 6.8 16 6 42 6.5 10 YA 03 20 9 20 8 50 6.5 12 MNB Applicable air cylinder bore 26 11 25 10 62 8.5 16 31 14 30 12 76 10.5 18 CNA 03 05 08 10 32, 40 50, 63 80 100 Bore size (mm) 32, 40 50, 63 80 100 Mounting bracket U V W Mass (g) Part no.

Free Mount Cylinder for Vacuum Series ZCUK

Proper Tightening Torque Hexagon socket head bolt diameter (mm) M3 M4 M5 M6 Bore size (mm) Proper tightening torque (Nm) 10 16 20, 25 32 1.08 10% 2.45 10% 5.10 10% 8.04 10% 1251 Series ZCUK Standard Stroke Mounting Stroke (mm) Double acting style/Single rod type/Non-rotating rod Applicable cylinder Stroke (mm) Vertical mounting (Body through-hole) Bore size (mm) 10 16 20 25 32 5 10 15