Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

ZP

Bolt Bolt tightening torque ZP (40/50) H ZP (40/50) HB 0.7 to 0.9 Nm 40, 50 M3 x 8 ZP (63/80) H ZP (63/80) HB 0.9 to 1.1 Nm 63, 80 M4 x 8 100, 125 ZP (100/125) H ZP (100/125) HB 2.3 to 2.7 Nm M5 x 10 Assemble parts with recommended tightening torque.

Made to Order

50 to 600 100 to 2000 50 to 600 601 to 1000 2001 to 5000 (Up to 3000 for 16) 10 to 100 20, 25, 32 110, 120, 125, 150, 175, 200 601 to 1500 (Up to 1000 for 16) 80, 90, 100, 110, 120, 125, 150 110, 120, 125, 150 110, 120, 125, 150, 175, 200 MY3A MY3B MY3M 16, 20, 25, 32, 40, 50, 63 2001 to 3000 100 to 2000 10 to 75 10 CXS 2001 to 3000 100 to 2000 16, 25, 40, 63 10 to 100 15 CY3B 2001 to 3000

Stability of suction position,

to 125)(UM/BM)lJB (10/30/50) q Stopper Form/Diameter Part no.

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

CATALOG

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy

Compact Cylinder

) Note 10) Note 10) Note 8) Note 9) Note 10) With boss on rod end (Standard) Note 11) 180 to 200: (p), for 125 to 160 only Note 12) The body shape is the same as the existing product.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

A

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy

smcmaintenancepartslist

Seal kit includes a grease pack (32 to 50: 10 g, 63, 80: 20 g, 100, 125: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 27 Air Cylinder/Double Rod Series MBW Replacement Procedure is 32, 40, 50, 63 80, 100, 125 P.284 Construction !3 !4 !2 !6 !

Compact Hydraulic Cylinder

-125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175

NCQ2/CQ2

Applicable stroke: Available in 5 mm intervals T Q G A + Stroke B + Stroke With switch: 20, 25 Without switch: 20 to 32 With switch: 32 Series (N)CQ2 B A T Q G 50 stroke or less 75, 100 stroke 125 to 300 stroke 50 stroke or less 75, 100 stroke 50 stroke or less 125 stroke or more 100 stroke or less 125 stroke or more 125 to 300 stroke Bore size (mm) 20 25 32 40 50 63 80 100 10 10 10 10 10

10

125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 [mm] Rubber Bumper Bore size [mm] h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401

2

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100

Vacuum Pad

Bolt Bolt tightening torque ZP (40/50) H ZP (40/50) HB 0.7 to 0.9 Nm 40, 50 M3 x 8 ZP (63/80) H ZP (63/80) HB 0.9 to 1.1 Nm 63, 80 M4 x 8 100, 125 ZP (100/125) H ZP (100/125) HB 2.3 to 2.7 Nm M5 x 10 Assemble parts with recommended tightening torque.

Vacuum Pad

Bolt Bolt tightening torque ZP (40/50) H ZP (40/50) HB 0.7 to 0.9 Nm 40, 50 M3 x 8 ZP (63/80) H ZP (63/80) HB 0.9 to 1.1 Nm 63, 80 M4 x 8 100, 125 ZP (100/125) H ZP (100/125) HB 2.3 to 2.7 Nm M5 x 10 Assemble parts with recommended tightening torque.

Vacuum Pad

Bolt Bolt tightening torque ZP (40/50) H ZP (40/50) HB 0.7 to 0.9 Nm 40, 50 M3 x 8 ZP (63/80) H ZP (63/80) HB 0.9 to 1.1 Nm 63, 80 M4 x 8 100, 125 ZP (100/125) H ZP (100/125) HB 2.3 to 2.7 Nm M5 x 10 Assemble parts with recommended tightening torque.

Vacuum Pad

Bolt Bolt tightening torque ZP (40/50) H ZP (40/50) HB 0.7 to 0.9 Nm 40, 50 M3 x 8 ZP (63/80) H ZP (63/80) HB 0.9 to 1.1 Nm 63, 80 M4 x 8 100, 125 ZP (100/125) H ZP (100/125) HB 2.3 to 2.7 Nm M5 x 10 Assemble parts with recommended tightening torque.