Clean Series: Relief Type, Magnet: None, Series: J2, Mounting: Basic Style, Bore Size: 16mm, Stroke: 45mm, Cushion: Air Cushion, Head Cover Port Location: -, Version: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Type: -

Clean Series: Relief Type, Magnet: None, Series: J2, Mounting: Basic Style, Bore Size: 16mm, Stroke: 45mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: Z, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Type: -

Clean Series: Relief Type, Magnet: None, Series: J2, Mounting: Basic Style, Bore Size: 16mm, Stroke: 45mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Axial Direction, Version: Z, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Type: -

Clean Series: Relief Type, Magnet: None, Series: J2, Mounting: Basic Style, Bore Size: 16mm, Stroke: 125mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: Z, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Type: -

Clean Series: Relief Type, Magnet: None, Series: J2, Mounting: Basic Style, Bore Size: 16mm, Stroke: 75mm, Cushion: -, Head Cover Port Location: -, Version: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Type: -

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Air cushion, Operating Pressure(MPa): 0.1 to 0.7, Specification: Without magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Without magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Air cushion, Operating Pressure(MPa): 0.1 to 0.7, Specification: Without magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Without magnet, Auto Switches: Without

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

1

st 10 15 12 14 3.3 3.2 12 4 18 20 M4 x 0.7 4.8 22.5 5 8 45.5 53 65 77 16 15 18.3 20 5 6.5 18.3 5 23 20 M5 x 0.8 4.8 27.5 8 10 45.5 54 66 78 84 108 126 138 Bore size Z ZZ 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 10 73.5 81 93 105 78.5

2

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

Electric Actuators

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

CATALOG

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy

Table of Contents

10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

Table of Contents

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 150 150 100 100 50 50 10 10 1 1 10 10 15.1 15.1 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 40 40 3.8 3.8 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 2.0 1.9 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 100 150 50 10 1 10 10.1 15.1 5.1 1.1 0.2

A

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy

ISO Cylinder

, 25, 50 50 10 12 16 10, 25, 50, 100, 150 150 20 25 Refer to pages 101 to 111 for cylinders with auto switches. *1 Other strokes are available on request.

Air Slide Table

10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg