Clean Room: 10 (Relief Type), Magnet: D (Built-in), Mounting Direction: B (Lateral Mounting), Bore: 8mm, Stroke: 6mm

Cylinder (Tube) Inner Diameter(φ): 8, Stroke(mm): 6, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 8, Stroke(mm): 6, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet

Table of Contents

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

Parallel Type Air Gripper Series MHZ

A wide variety of types and broad size variations With dust cover Compact series (without auto switch) 10 to 25 New New 6 New New 6 Standard type New New Long stroke 10 to 25 New New New New 6 32, 40 10 to 25 II Parallel Type Air Gripper Series MHZA2-6/MHZAJ2-6 Compact Series (Without Auto Switch) How to Order MHZA 2 6 D MHZAJ 2 6 D Dust cover type With dust cover Nil F S Chloroprene rubber

Direct Solenoid

Mtrual opralor assmbly $llh Odng PA0@1 PBO{01 I 1 Raplacdr3nl coll only-4.C. sol6nold 1Al0 aot@ 1O/@ cl2A{9 cl2A-10 cl2A.1t 10 I Sol6noi, aBsmbly-4,C. conplst wllh coll, 120/ao 24(m0 a0,t0 @14O9 @ta-10 cora-1t At2A{9 412A,10 1 l '| NXT01010 NXT0307.3 12 1 NXTO1G12 NXTO1G12 13 @t|vo scr6w .nd locl wa5hsr xTt)10-21 xT010.21 DIRECTIONAL AIR YALVE MANIFOLD ASSEMBLY SERIES NVS 3115, 3125 NVS 3135

MHC2-6/MHCA2-6

MHC2-6 MHCA2-6 Model (2) (1) Cylinder bore (mm) MHCA2-6 Axial ported (With hose nipple) Opening/Closing angle (Both sides) Mass (g) Action Model Gripping moment (Effective value) Nm MHC2-6D MHCA2-6D MHC2-6S MHCA2-6S 22 19 22 19 6 6 6 6 Double acting 30 to 10 0.038 30 to 10 Single acting (Normally open) JIS Symbol Double acting 0.024 Note 1) At the pressure of 0.5 MPa Note 2) Excluding the

MHZA2-6/MHZAJ2-6

Model Gripping force Note) Opening/ Closing (Both sides) (mm) Action Model Bore size (mm) JIS Symbol Double acting Gripping force per finger Effective value (N) External Internal Mass (g) MHZA2-6D MHZAJ2-6D MHZA2-6S MHZAJ2-6S MHZA2-6C MHZAJ2-6C 26 27 26 27 26 27 4 4 4 4 4 4 6 6 6 6 6 6 Double acting 3.3 6.1 Normally closed Normally open 1.9 Single acting Single acting type, Normally open

Clean Room: 10 (Relief Type), Magnet: D (Built-in), Mounting Direction: B (Lateral Mounting), Bore: 8mm, Stroke: 6mm, Rod End Thread: Rod End Female Thread, Auto Switch: F8N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Clean Room: 10 (Relief Type), Magnet: D (Built-in), Mounting Direction: B (Lateral Mounting), Bore: 8mm, Stroke: 6mm, Rod End Thread: Rod End Female Thread, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Clean Room: Relief Type, Magnet: Built-in, Mounting Direction: Lateral Mounting, Bore: 8mm, Stroke: 6mm, Rod End Thread: Rod End Female Thread, Auto Switch: F8N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.

Cylinder (Tube) Inner Diameter(φ): 8, Stroke(mm): 6, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet,

Cylinder (Tube) Inner Diameter(φ): 8, Stroke(mm): 6, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet,

CATALOG

32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5

A

32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

5 Port Solenoid Valve

SS0700-80A-2 SS0700-80A-4 SS0700-TR-l 10 S0700-GS-5 Applicable tube Applicable tube 2 Applicable tube 3 Applicable tube 4 Applicable tube 1/8" Applicable tube 5/32" Symbol C2 C3 C4 N1 N3 Gasket, Screw 10 Note 1) Gasket 10 Note 1) Clip Note) Above part number consists of 10 units. Each unit has one gasket and two screws. 2 Note 2) Tie-rod assembly Note 1) 1 set includes 10 pieces.

10

If there is something you do not know, please contact SMC. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

MB

11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 50 12.5 CS1 64 16.5 80 23.5 C76 80 23.5 119 28.5 Note) For a double clevis, a pin (cotter pin) and a flat washer are equipped as standard.