10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 10M[pulse] 1M[pulse] 0 0 10M[pulse] 1M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses) D Bus voltage
A L 3 7 # 0 0 P B 1 0 P B 1 1 P B 1 2 P B 1 6 P o s 0 0 1 Point table error details For the point table No.1 position data error Point table No. with error Error item Pos: position data Spd: speed Acc: acceleration time constant Dec: deceleration time constant Dwl: dwell Aux: auxiliary function 10 15 11. OUTLINE DRAWINGS 11.
] CMX CDV = 0 10 S = 0 10 1/n Pb = 10 10-3 10 1/2 10 = 20 1 Hence, set 20 to CMX and 1 to CDV.
(2) (10.2) 50 [ms] 40 30 T8 T9 20 T7 10 T6 T5 0 0 1000 2000 3000 4000 5000 6000 [r/min] LE-T10.3.2 [] LE-T5LE-T6LE-T730 LE-T8LE-T910 6 10. 10.4 a 1 10 8 5 10 7 1 10 7 5 10 6 a: [ms] 1 10 6 5 10 5 b: SSCNET 1 10 5 5 10 4 1 10 4 b 5 10 3 1 10 3 4 7 10 20 40 70 100 200 [mm] 10.5 2500kVA1mAC240V()LECSS2T5LECSS2-T9AC200V (A0-P) (L1L2L3) (L11L21) LECSS2-T5LECSS2-T7 LECSS2-T8
A C Auto Switch Proper Mounting Position D-M9, D-M9W D-M9AVL D-A93 D-A90, D-A96 D-M9V, D-M9WV Bore size (mm) A B C D A B C D A B C D A B C D CXSJ15 to 32 B D 6 10 15 20 25 32 15.5 13.5 5.5 15.5 11 8 19.5 0.5 9.5 9.5 19.5 0.5 11.5 7.5 25.5 23.5 3 25.5 21 5.5 29.5 3 19.5 7 29.5 3 21.5 5 31.5 6 29.5 4 31.5 6 27 1.5 35.5 10 25.5 0 35.5 10 27.5 2 39 9 37 7 39 9 34.5 4.5 43 13 33 3 43 13 35
pulses) 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses)
12.7 A B C D E 10120-3000PE 10320-52F0-008 22.0 33.3 14.0 10.0 12.0 AWG2430 9 4 9 (b) M2.6 [mm] E D A C F LOG 39.0 23.8 5.2 B 12.7 A B C D E F 10120-3000PE 10320-52A0-008 22.0 33.3 14.0 10.0 12.0 27.4 AWG2430 (3) SCR (3M()) 36210-0100PL 36310-3200-008 [mm] 39.5 34.8 22.4 11.0 9 5 10 10 . 2 10.1 . 2 10.2 . 3 10.3 . 5 10.3.1 . 5 10.3.2 . 6 10.4 . 7 10.5 . 7 10 1 10 10 10.1
B Model A B C D E F G CXS6 9 2.1 3.25 6.5 7 1.2 x 12 10 CXS10 9 2.1 5 10 7 2.5 x 14 10 G CXS15 12 2.1 6 12 7 3 x 16 13 CXS20 15 3.1 7 14 10 4 x 20 16 CXS25 20 3.1 7 14 10 5 x 22 21 CXS32 26 4.1 9 18 12 6 x 32 27 Dimensions other than those listed above are the same as for the standard type. 6 -XC18 NPT finish piping port Specifications CXS XC18 Bore size Stroke Auto switch Slide bearing
Electrical entry direction: Outward D B A C Operating Range D B D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A C 11.5 (10) 18.5 (17) 26.5 (25) 34 (32.5) 34 (32.5) 44 (42.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D C 5.5 12.5 20.5 28 28 38 Auto switch model Bore size (mm) 6 10 15 20 25 32 9 7 9 9 9 11 6 10 15 20 25 32 5.5 2.5 5.5 3 1 1
(I$odell A A I D E t H WT $tl oEfio.l il{s} 57.0 6i.0 l(10 x 1.0 3.0 N/A 8.6 49.4 8.6 10.? N/A r{/A N/A 0 t.t5rir(B) 8 t . 8 91.1 Ml2 x 1.0 3.3 l.l/A 8,6 71.4 0.9 14.2 N/A .0 9.7 (r.R)0Efl.251rr(r)8r.8 9 1 . ? M l { x 1 . 5 J.J /A 1.2 71.4 0.9 t4.2 N/A r2.0 12.1 (r.R)0Efti.35rJr(Bl 100,6 0.7 l l 6 x 1 . 5 4.0 N/A ).2 87.4 1.2 t4.5 0.5 t4.0 12.7 l0 [.5t](B] 9E_6 I t 0,5 [!
3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !
Toggle Lever/VFM350-02-08 Panel mounted hole JIS Symbol 15N F.O.F. 0.5MPa supply 40 T.T. 3.5-50 VFM300 Series VFM300 Push Button (Mushroom)/VFM350-02-30R, B, G, Y Panel mounted hole JIS Symbol 21N F.O.F. 0.5MPa supply 4.8mm P.T. 1.7mm O.T. 6.5mm T.T.
(Total Travel) 40 Hexagon nut thick 11, across flats 27 (Pilot exhaust port) JIS symbol 0.5 MPa supply 3-4.5 mounting hole 15 N F.O.F. 40 T.T. 5-6-57 Series VFM200 Series VFM200 Push button (Mushroom) VFM250-02-30R/B/G/Y Panel mounting hole (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. 3-4.5 mounting hole 1.7 mm O.T. 6.5 mm T.T.
This is a legacy product, and replaced by10-CDJ2B6-15RZ-B, CYL, DBL ACT, CLEAN ROOM, ACTUATOR, CJ2 ROUND BODY CYLINDER, C5, 6MM CJ2 CLEAN-ROOM, .03740 lb
3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !
(Total Travel) 40 Hexagon nut thick 5, across flats 17 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 2-3.2 mounting hole 15 N F.O.F. 40 T.T. 5-6-44 5 Port Mechanical Valve Series VZM500 Series VZM500 Push button (Mushroom) VZM550-01-30R/B/G/Y Panel mounting hole SA (Pilot exhaust port) JIS symbol VA SA VA VM 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.
Magnet: Built-in, Mounting: Basic Style, Bore Size: 6mm, Stroke: 30mm, Cushion: Rubber Bumper, Head Cover Port: Axial, Auto Switch: Band Type Switch, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -
Clean Series: 10 (Relief Type), Magnet: D (Built-in), Mounting: B (Basic Style), Stroke: 30mm, Cushion: Rubber Bumper (Standard), Head Cover Port: R (Axial), Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire
Clean Series: Relief Type, Magnet: Built-in, Mounting: Basic Style, Stroke: 30mm, Cushion: Rubber Bumper (Standard), Head Cover Port: Axial, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Bore Size: -
Magnet: Built-in, Mounting: Basic Style, Bore Size: 6mm, Stroke: 30mm, Cushion: Rubber Bumper, Head Cover Port: Axial, Auto Switch: Band Type Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made-to-Order: Fluororubber Seals