JXCx-OMT0061CN

0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1 DRIVE (1) No.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

JXCx-OMT0028CN

0,1 5 JOG(-) bit 0 6 JOG(+) bit 0 7 FLGTH bit 0 ID1 0,1 2 1 No. 063 1ABS() 2 INC( 3 1 )0: ( ) 4 H 2 065500 mm/s 5 L 6 H 7 4 2147483647 0.01mm 8 9 L 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L H=L= (LECP6)(LECA6) 42 - Bit/Byte / Address ID No. 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s ID1 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1

JXCx-OMT0034CN

() 0.01mm 37 - Bit/Byte / ID No. 0 1 Bit[70] 1 RWwn 1) 063 1ABS() Bit[F8] 1 2) 2INC() Bit[70] H RWwn+1 1) 2 065500 mm/s Bit[F8] L Bit[70] 3 RWwn+2 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWwn+3 1) Bit[F8] 0 Bit[70] H RWwn+4 1) 2 065500 mm/s2 Bit[F8] L Bit[70] H RWwn+5 1) 2 065500 mm/s2 Bit[F8] L Bit[70] 1 030 10% RWwn+6 1) Bit[F8] 1 030 10% Bit[70] 1 0255 mm/s RWwn

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount), Specifications: Y (Upward Facing Knob)

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: None, Thread: Rc, Port Size: 1/8, Accessory: Set Nut for Panel Mount, Specifications: Upward Facing Knob, Pressure Unit: -

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 1/8, Accessory: Set Nut for Panel Mount, Specifications: -, Pressure Unit: -

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K)

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 8) : Combination available for options : E1, E2, E3, E4. 1094 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Specifications Model 10-ARP20 (K) 10-ARP30 (K) 10-ARP40 (K) 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Port size Air Fluid 1.2 MPa Proof pressure 0.7 MPa Maximum operating pressure

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 8) : Combination available for options : E1, E2, E3, E4. 1094 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Specifications Model 10-ARP20 (K) 10-ARP30 (K) 10-ARP40 (K) 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Port size Air Fluid 1.2 MPa Proof pressure 0.7 MPa Maximum operating pressure

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VER 3 L L 2 2 VEA 10 AFM AF ARP20K/30K/40K VHS VY1 1 1 12 2 4 14 Solenoid valve: Non-lube type VBA VBAT 5 1 3 AP100 2 1 2 1 2 1 L L AFM AF ARP 701 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Symbol Regulator with backflow function Regulator

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VY1 3 L L VBA VBAT 2 2 10 AFM AF ARP20K/30K/40K VHS AP100 1 1 12 2 4 14 Solenoid valve: Non-lube type 5 1 3 2 1 2 1 2 1 L L AFM AF ARP 759 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Symbol Regulator with backflow function

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount), Specifications: 3Y (3+Y)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount), Specifications: Y (Upward Facing Knob)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount), Specifications: 3 (0.008 to 0.6 MPa Setting)

Side, Connection Diameter: 1/8, Pressure Gauge: [Not Provided] No Pressure Gauge, Size of Body: 20, Accessory: With set nut (for panel mount), Set Pressure: 0.008 to 0.6 MPa, Pressure Unit: Nameplate and pressure gauge units: MPa, Handle Direction / Position: Handle downward

Side, Connection Diameter: 1/8, Pressure Gauge: [Not Provided] No Pressure Gauge, Size of Body: 20, Accessory: With set nut (for panel mount), Set Pressure: 0.008 to 0.6 MPa, Pressure Unit: Nameplate and pressure gauge units: MPa, Handle Direction / Position: Handle upward