Manifold Specifications

O.D.: 6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 D-sub connector cable assembly Symbol VZS B Both sides Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Stations Symbol VFS 02 2 stations 1 D side VS4 16 stations 16 Max. 16 stations.

Multi Channel Pressure Sensor Controller

C: Revision D: Limited warranty and Disclaimer and measurement laws are added. E: Contents revised in several places. F: Contents revised in several places.

Lubricator Series AL10 to 60

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 14-2-63 Series AL10 to 60 Dimensions AL10 AL20 L D Bracket (Option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50/60 AL30/40 L D D L Port size Bracket (Option) Bracket (Option) G F G F Port size M K M K E J C B R

Modular Type Lubricator Series AL

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 503 Series LVD Dimensions Basic type A D L K 4 x M (Q) 2 x P One-touch fitting Breathing port PB H C PA G A B N E J B (F) T 2 x U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

HAW

) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PV D-M9P DC24V DC12V Relay PLC 2-wire D-M9BV D-M9B DC24V DC5V,12V 3-wire (NPN) D-M9NWV D-M9NW DC24V IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PWV D-M9PW Yes Grommet DC24V DC12V Relay PLC 2-wire D-M9BWV D-M9BW DC24V DC5V,12V 3-wire (NPN) D-M9NAV D-M9NA DC24V IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PAV D-M9PA DC24V DC12V Relay PLC

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Reuse AS-FE Nominal thread size Chamfered dimension D Min.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PV D-M9P DC24V DC12V Relay PLC 2-wire D-M9BV D-M9B DC24V DC5V,12V 3-wire (NPN) D-M9NWV D-M9NW DC24V IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PWV D-M9PW Yes Grommet DC24V DC12V Relay PLC 2-wire D-M9BWV D-M9BW DC24V DC5V,12V 3-wire (NPN) D-M9NAV D-M9NA DC24V IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PAV D-M9PA DC24V DC12V Relay PLC

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

When auto switches D-M9/M9W/Y59 D-M9A D-Y7, Y7W are used A B L Auto Switch Hysteresis MHZ When auto switches D-M9V/M9WV/Y69 D-M9AV D-Y7V, Y7WV are used Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc. MHF A B MHL L MHR MHK MHS Max.

Common Supply Regulator

Domensions Plate thickness AR20M/30-MD: Max.3.5 AR40-D: Max.5 Dimensions Optional specifications Round type pressure gauge (Semi-standard:Z) Round type pressure gauge (with color zone) Standard specifications Round type pressure gauge Model P1 P2 P3 A BNote 1) C D F J K L1 H J H J H J AR20M-D 1/81/4 1/8 1/81/4 40 66.8 26.5 21 M28X1 26 2 9 37.5 62.5 37.5 63.5 37.5 63.5 AR30M-D 1/43/8 1/8 1

VFR4000-OMH0003

Note 3) Station numbers are started from D side although connector is mounted on D or U Side. connector is mounted on D or U Side. 11 VFR4000-OMH0003-D VFR4000 Series Construction Be sure to read this before handling. 12 VFR4000-OMH0003-D VFR4000 Series Construction Be sure to read this before handling. 13 VFR4000-OMH0003-D TROUBLE SHOOTING Trouble phenomenon Remedy Cause expected Faulty

Digital Pressure Switch

Panel mount rear piping + Front protective cover Z/ISE10(F)-M5R-#-##D# -61No.PS-OMM0005-J Panel cut-out dimensions DIN rail mounted side piping Z/ISE10(F)-M5-#-##R# -62No.PS-OMM0005-J Revision history A: Revision B: Revision C: Modified errors in text.

SYJ300-OMU0003

Series LM S + Z S Z + 4WA 4WA R U +3WA 3WA R U 4(WA ) 4(WA ) 3(WA ) 3(WA ) () DC24V,12V +1/4 DC24V W WA + ,W13WA 43 DC24V,12V 62ms i1:i2 WA 11 No.SYJ300-OMU0003 SYJ Series S 904 3.57 JIS C 3306 0.5mm L M DIN ) (Z) 22 3 0.4Nm (DZ) (1.652.5N m) () NL: () () (3 ) 1V (0.20.25Nm) DIN Y Y DIN DIN 8mm DIN D SY100-61-3-05 DDIN 9.4mm D DIN DC24V 24V SY100-61-3

Dedicated Controller

SETUP I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C Directs a program operation. RUN Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP Executes a JOG operation.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Compact

D-M9V, D-M9WV D-M9A D-M9AV A B W A B W A B W A B W 12 6.2 6.2 3.8 6.2 6.2 1.8 6.2 6.2 5.8 6.2 6.2 3.8 16 6.7 6.7 3.3 6.7 6.7 1.3 6.7 6.7 5.3 6.7 6.7 3.3 20 7.5 10 7.5 10 7.5 10 2 7.5 10 25 8 12 8 12 8 12 8 12 Auto Switch Mounting Height U [mm] Auto switch model Bore size D-M9V, D-M9WV, D-M9AV U 12 19.5 16 21 20 23 25 24.5 W A B A Operating Range [mm] Auto switch model Applicable

ML1C

Range (mm) No. of auto switches mounted Applicable auto switch Bore size (mm) 25 6 4 D-M5, D-M5W, D-M5T D-E7A, D-E80A Auto switch model 40 6 4 D-M5, M5W, M5T D-E7A, E80A 32 6 4 10 15 5 10 1 pc. 2 pcs.

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

NTJ-015A 6 Solid State Switches D-F8/3 wire, 2 wire Auto Switch Specifications D-F8N D-F8B D-F8P Auto switch part no.