m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
Mounting screw (M4) Terminal block cover M3 screw Gasket 6 mm Electrical entry 2-G3/4 Step 3. How to attach the terminal block cover Securely tighten the screws with the torque shown in the table below, after confirming that the gasket is installed correctly.
Thread size is M3. Note 21) Only M3 is available for PD port size. Use one-touch fitting (KJS series) or barb fitting (M series) for piping. Note 22) Select body for manifold. Select L for manifold type. When the common supply and individual supply are mixed, please contact SMC. Note 23) To prevent backflow of the manifold common exhaust, not for holding vacuum.
.: 04 (ø4), Thread: R, Port Size: M3 (M3 x 0.5)
.: 23 (ø3.2, use ø1/8" Tubing), Thread: R, Port Size: M3 (M3 x 0.5)
.: 04 (ø4), Thread: R, Port Size: M3 (M3 x 0.5)
.: 23 (ø3.2, use ø1/8" Tubing), Thread: R, Port Size: M3 (M3 x 0.5)
Actuation: 1 (Normally Closed), Piping: 2M (Body Ported), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: WO (M8 connector, w/o Connector Cable), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (M3 Port), Brackets: F (w/Bracket)
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18