HRX-OM-T002

the piping: Circulating fluid temperature: 30 This product Users equipment Serial communication Fluid discharge temperature: 30 Heat dissipation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 When only the "set circulating fluid temperature" needs to be the same as the circulating temperature supplied to the user's equipment: Use "MODE 1" of the

Ionizer

Workpiece electric charge voltage Workpiece electric polarity LED + OK +400 V or higher Positive Light ON +100 V to +400 V Flash at 4 Hz +30 V to +100 V Static neutralization completion Light OFF Within 30 V 30 V to 100 V 100 V to 400 V Negative 400 V or lower ALARM LEDIndicates abnormal states of the ionizer.

Power Clamp Cylinder

A B C CKZT50-A045B 30 to 105 30 to 120 CKZ50-42 3680N-R D E F CKZT63-A045S 30 to 105 30 to 120 63 CKZT63-A045B CKZT63-A015S 30 to 90 30 to 120 CKZT80-A045S CKZT63-A015B 30 to 90 30 to 105 63 80 CKZ63-42 3680N-R A B C CKZT80-A045B 30 to 105 30 to 105 CKZ63-42 3680N-R D E F For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended. 30 to 105 CKZT80-A015S

MXF

20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

40 30 20 10 Step 1 Check the speedwork load.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

HRX-OM-X071

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 31 Circulating fluid display temperature 30 Heat radiation Circulating fluid set 1 temperature 30 Offset temperature 30 1 To switch the offset mode, press the [ENT] key. "OFF" flashes, press the [], [] key, select "OFF", "MD1", "MD2", "MD3" and confirm with [ENT] key.

KR

30 29.5 30 32 15.2 18.5 8 14 Applicable tubing 40 49 14 27 20.3 21 31 18.5 20.6 10 Connection thread (With seal) 63 22 39 30.8 34 25.2 17 1 2 KRV12-04S 20.9 33.5 80 12 Reference dimensions after R thread installation.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing spacers in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF Series MQQ is not auto switch capable.

High Purity Fluoropolymer

3/8" 6 30 21 33.1 28 11 22 30 (M) N 28.5 1/2" 10 19 12 19 35 1/2" LQ2R52-M H 7 42.5 46 40 32 14 28 36 LQ2R54-M LQ2R53-M Class 4, 5 33.5 3/4" 12 Inch sizes Connection threads R/NPT Model Applicable tubing O.D.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

, when both fingers and attachments are in full contact with the workpiece as shown in the figure below. 50 50 Pressure Pressure 0.6 MPa 0.6 MPa 40 40 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 30 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2

Water-cooledThermo-chiller

Breaker Operating Characteristics Common for all models 4 h 2 h 1 h 5 s 10 s 20 s 30 s 1 min 2 min 4 min 6 min 10 min 14 min 20 min 30 min Max.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5

0.4

AXT661-13AL AXT661-13AL-6 AXT661-13AL-10 AXT661-13AL-20 AXT661-13AL-30 AXT661-13ANL AXT661-13ANL-6 AXT661-13ANL-10 AXT661-13ANL-20 AXT661-13ANL-30 AXT661-14AL AXT661-14AL-6 AXT661-14AL-10 AXT661-14AL-20 AXT661-14AL-30 AXT661-14ANL AXT661-14ANL-6 AXT661-14ANL-10 AXT661-14ANL-20 AXT661-14ANL-30 Note) When using the negative common specifications, use valves for negative common. 79 Plug Lead

LEC-OM07605CN

LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr. PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

Compact

mm] 0.35 0.20 0.20 0.30 ST 25, 30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 15, 20 ST 25, 30 0.20 0.1 0.10 ST 15, 20 ST 15, 20 0.15 0.10 ST 5, 10 0.05 0.05 ST 5, 10 ST 5, 10 0.05 0.00 0 10 20 30 40 0.00 0 10 20 30 40 0.00 0 10 20 30 40 Load [N] Load [N] Load [N] MXZ25 MXZ25 MXZ25 0.25 0.40 0.25 ST 45, 50 ST 35, 40 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table

VDW

Low frequency operation Switch valves at least once every 30 days to prevent malfunction. Also, in order to use it under the optimum state, conduct a regular inspection once a half year. 3.2 4 6 25 or more 26 or more 39 or more 29 or more 30 or more 39 or more 16 or more 20 or more 30 or more Recommended Unacceptable Caution Fig. 2 Binding tubes with bands 1.

HEC-OM-S008

31 30 33 42 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 34 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 41 34 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 39 34 4D HECR 5-6 MODBUS communication function 5.6 Function codes The table berow function codes to read or write register.