CVRA1-E

Table 15 Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston(Seal groove) Slider(Sliding surface) GR-S-010 Piston seal Tube gasket 23 24 25 O-ring 5 11 1 16 12 7 23 24 12 11 4 25 4 24 25 23 -34- (2) Mount the tube gasket 11 to the left cover 3 to mount to the body 1 . (3) Insert the rack 16 and the piston 4 into the body 1 .

3-Position Rotary Table

Each operational contents Figure 3 Pressure port and active speed controller Table 1 Operating Pressure port Speed controller A, C B, D C port B port D port A port Clockwise-1 C Clockwise-2 1 l o ec Co s k Counterclockwise-1 w wi is 2 k un ec eo 2 Counterclockwise-2 l C te is rc kw lo oc ck cl wi er se nt -1 u o C 294 3-Position Rotary Table MSZ Series Angle Adjustment 1) Stop positions

ZPT/ZPX

EPR AMJ Material Pad diameter (mm) ZP 40HBN ZP 50HBN ZP 63HBN ZP 80HBN ZP100HBN ZP125HBN 40 1 0 17 +10 +1 50 2 0 33 +19 +1 N NBR Misc. 63 40 3 0 63 +37 +2 40 S Silicon rubber 80 50 6 0 103 +61 +2 50 U Urethane rubber 100 63 12 1 206 +121 +4 63 F Fluoro rubber 125 80 22 3 390 +228 +7 80 E EPR 100 100 Pad type 125 125 HB Large bellows pad Dimensions 40 50 63 80 100 125 ZP 40HB ZP HB ZP HB F

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

Peltier-type Chiller Thermo-con/ Compact Type

-made) Cable: 16AWG 1 1 24 VDC + Wire color Contents 2 Brown 24 VDC + Power connector Blue 24 VDC J.S.T. Mfg. Co., Ltd.

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

Option 1 W Nil DIN Rail Mounting Bracket (Order Separately) With lead wire with connector (2 m) Connector cover (Silicone rubber) ZS 33 R With lead wire with connector (2 m) ZS-33-F S Stations ZS-33-D ZS-33-D S 1 2 3 4 5 1 station 2 stations 3 stations 4 stations 5 stations IN IN N Note) If an accessory is required, order separately using ZS part numbers.

Diaphragm Valve for Ultra High Purity

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked