m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38

m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

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For vacuum/compound pressure : kPa For positive pressure : MPa Setting range Set pressure range Lead wire length 100.0 to 100.0kPa 101.3 to 101.3kPa 100.0 to 100.0kPa Nil 0.6m 3m 10.0 to 101.3kPa 0.1 to 1.000MPa L 1.000 to 1.000MPa 2 High Precision Digital Pressure Switch Dimensions ZSE40(F)/ISE40 01 T1 20 30 M5 x 0.8 thread depth 5 MPa 30 20 OUT2 OUT1 SET Width across flats 2-M3 x 0.5 thread

IS3000

Thread using for the terminal is M3. Only for gasket mounting style Mounting/Piping Dimensions Caution 1. Allow the space required for maintenance. Otherwise, maintenance or pressure adjustment cannot be made, since the adjusting screw is on the top of the body. 2. Mounting is possible in either horizontal or vertical orientations. SMC Pressure Setting Indicator light Caution 1.

ZSE40/ISE40

The function then returns to the measurement mode. 16-2-22 9 Series ZSE40/ISE40 High Precision, Digital Pressure Switch Dimensions ZSE40(F)/ISE40-01 T1 20 30 M5 x 0.8 thread depth 5 MPa ZSE ISE 30 20 OUT2 OUT1 SET PSE Width across flats 12 2-M3 x 0.5 thread depth 4 6.4 Z I SE3 18.35 Atmospheric release port PS Lead wire length 600 (3000) 3.5 Z I SE1 2 Courtesy of Steven Engineering, Inc.-

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

Series DXT474

Tightening torque Thread Appropriate tightening torque Nm (kgfcm) M3 M5 0.3 to 0.5 (3 to 5) 1.5 to 2 (15 to 20) Wiring 1Polarity When DC power is to be connected to a solenoid valve equipped with light and/or surge voltage suppressor, check for polarity indications.

VQ4000

Note 2) Double wiring is used on sub-plate VQ410 . 0 1 Suitable tightening torque Nm Plug lead: Grommet Connect each corresponding wire. 0.8 to 1.2 Mounting screw (M3) Lead wire color Lead wire color SOL.A SOL.A () Black () Black COM COM (+) Red (+) Red SOL.B SOL.B () White () White Single solenoid Double solenoid Caution Changing the One-touch Fittings Single solenoid Double solenoid Black