Refrigerated Air Dryer For Use in North, Central and South America

pressure dew point 50F (10C) 177 (300) 251 (426) 353 (600) 459 (780) Inlet air pressure [psi (MPa)] 100 (0.7) Inlet air temperature [F (C)] 100 (37.8) Ambient temperature [F (C)] 100 (37.8) Single-phase 115 VAC (60 Hz) Single-phase 230 VAC (60 Hz) Power supply voltage (Frequency)4 Maximum air flow capacity Air flow capacity calculated with the correction factors Power consumption5 [W] 1100

Ejector Valve Unit Series ZYY/ZYX

Wire the vacuum switch separately. 1100

3

fluid Dry air, N2 3-color/ 2-screen display Accumulated value 2-row display of main screen and sub screen Peak/Bottom value Instantaneous flow rate (Main screen) Set value (Sub screen) Line name Expanded flow range Compact, Space saving Wide range of flow measurement with one product Compared with the current PF2A, Flow ratio 78 % reduction Weight 74% reduction 100:1 Mounting space 1100

IZS30_eng

completed FET(Open Drain), DC28V, 100mA or less Effective elimination distance 50 to 2000mm (Sensing DC mode 200 to 2000mm) Ambient temperature 0 to + 50oC Ambient humidity 35 to 80% Rh (No dew condensation) Material Ionizer cover: ABS, Electrode: Tungsten Vibration resistance Endurance 50Hz Amplitude 1mm 2 hours to X,Y,Z each direction of vibration Impact resistance 10G Weight (g) 330 710 1100

MIST SEPARATOR

SPECIFICATIONS Model AFM20-A AFM30-A AFM40-A AFM40-06-A Port size 1/81/4 1/43/8 1/43/81/2 3/4 Fluid Air Ambient and fluid -5 60 (Should be no freezing) temperature Proof pressure Max. operating pressure 1.5 MPa 1.0 MPa Min. operating pressure 0.05 MPa 0.3 m (FILTRATION EFECIENCY 99.9%) Filtration MAX.1.0 mg/m3(ANR)(0.008ppm) Note1 Note2 Oil mist density at the out side 1100 Flow rateLminANR

Battery-less

850 10 to 300 In-line Stroke range 701 to 800 20 to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 30 to 1140 20 to 760 10 to 300 801 to 900 24 to 610 16 to 410 8 to 200 30 to 930 20 to 620 10 to 300 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 Speed2 1101 to 1200 30 to 570 20 to 380 10 to 190 [mm/s] Up to 450 10

MY1

) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

MXQ

1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 + 0.5 S Option Specifications Stroke Adjustment Range of Adjuster Option (Identical for extension and retraction ends) Optional wide adjustment range adjuster are available with rubber stopper and metal stopper.

Modular F.R.L. Unit

AC30C Air filter AF40 AF40-06 AF30 AF20 AF30 Mist separator AFM40 AFM40-06 AFM30 AFM20 AFM30 Component Regulator AR40 1/4 3/8 1/2 1/4 AR40-06 AR25 AR20 AR30 1/4 1/8 1/4 3/4 Port sizes 3/8 1/4 3/8 Note 1) 1/4 1/8 1/8 1/8 Air Pressure gauge port size Fluid Proof pressure Maximum operating pressure 1.5MPa 1.0MPa 0.05MPa Minimum operating pressure Set pressure range 0.05 to 0.85MPa Note 2) 1100

AIR COMBINATION

Note 1) 1/16 1/8 Fluid Air Ambient and fluid -5 to 60 (Should be no freezing) temperature Note 2) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Set pressure range 0.05 to 0.7 MPa 0.05 to 0.85 MPa Filtration / Air filter 5 m Filtration / Mist separator 0.3 m Filtration efficiency 99.9 Oil mist density on the secondary side Max 1.0mg/m3 (ANR) (0.8ppm) Note3) Note4) 200 450 450 1100

Mechanically Jointed Rodless Cylinder Series MY2

Slide table Guide unit Actuator unit (Cylinder) Stroke adjusting unit Hexagon socket head mounting bolt Slider Refer to pages 1100 and 1107 for the actuator unit (cylinder) replacement part numbers. End plate 7. Do not generate negative pressure in the cylinder tube.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With air cushion Rotation time (s/90) Rubber bumper Without cushion 0.25 x 100.2 to 0.7 10 0.39 x 100.2 to 0.7 15 0.12 0.2 to 1 40 0.025 20 0.25 0.2 to 1 40 0.048 30 0.40 0.2 to 1 40 0.081 40 ) Allowable kinetic energy with cushion Maximum energy absorption with optimal adjustment of cushion needle Weight Table (g) Standard weight Size 90 180 120 150 10 220 270 15 600 700 20 900 1100

REFRIGERATION AIR DRYERS, AIR COOLING SYSTEM, Series PDE

GB 4.1 TECHNICAL FEATURES OF DRYERS SERIES PDE 3 20 -S MODEL PDE3-S PDE5-S PDE8-S PDE10-S PDE15-S PDE20-S Flow rate at 35C 7 bar [l/min] 350 550 850 1100 1800 2300 [m/h] 21 33 51 66 108 138 [Scfm] 12 19 30 39 64 81 Dew point* +37.8F (+3C) equal to 0.73 gr/Nm di H2O Ambient temperature nom (max) [F/C] +100 (+115) / +37.8 (+45) Min. ambient temperature [F/C] +34 / +1 Nom (max) inlet air temperature

Digital Flow Switch (Remote type sensor unit)

5%F.S. max. (0 to 90 C, 25 C reference) Withstand voltage 1000 VAC, for 1 minute between the external terminals and case Insulation resistance 50 M or more (at 500 VDC) between external terminals and case Standards and regulations CE, RoHS Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Materials of parts in contact with fluid SUS, NBR 3, PPS Weight Product 410 g 4 470 g 4 650 g 4 1100

Environment

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

24 VDC) Max. number of step data 64 points Power supply voltage 24 VDC 12 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Specifications Battery-less Absolute (Step Motor 24 VDC) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.