Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: S (Single Shaft), Type: Pneumatic, Size: 63mm, Port: Rc, Rotating Angle: 180°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: L (Foot Type), Shaft: S (Single Shaft), Type: Pneumatic, Size: 100mm, Port: TN (NPT), Rotating Angle: 90°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: S (Single Shaft), Type: Pneumatic, Size: 50mm, Port: TN (NPT), Rotating Angle: 180°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: S (Single Shaft), Type: Pneumatic, Size: 50mm, Port: Rc, Rotating Angle: 180°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: Y (Double Shaft w/Key), Type: H (Air-hydro), Size: 63mm, Port: Rc, Rotating Angle: 180°, Air Cushion: None, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: S (Single Shaft), Type: Pneumatic, Size: 100mm, Port: TN (NPT), Rotating Angle: 190°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: S (Single Shaft), Type: Pneumatic, Size: 63mm, Port: Rc, Rotating Angle: 90°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: S (Single Shaft), Type: Pneumatic, Size: 100mm, Port: Rc, Rotating Angle: 180°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: S (Single Shaft), Type: Pneumatic, Size: 50mm, Port: Rc, Rotating Angle: 90°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: W (Double Shaft), Type: Pneumatic, Size: 50mm, Port: Rc, Rotating Angle: 180°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: S (Single Shaft), Type: Pneumatic, Size: 80mm, Port: Rc, Rotating Angle: 190°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: W (Double Shaft), Type: Pneumatic, Size: 100mm, Port: Rc, Rotating Angle: 180°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z (5m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: X (Single Shaft w/Four Chamfers), Type: Pneumatic, Size: 80mm, Port: Rc, Rotating Angle: 180°, Air Cushion: None, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: F (Flange), Shaft: W (Double Shaft), Type: Pneumatic, Size: 100mm, Port: TN (NPT), Rotating Angle: 100°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z (5m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: F (Flange), Shaft: W (Double Shaft), Type: Pneumatic, Size: 100mm, Port: TN (NPT), Rotating Angle: 90°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z (5m)
Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft: S (Single Shaft), Type: Pneumatic, Size: 100mm, Port: TN (NPT), Rotating Angle: 90°, Air Cushion: C (w/Air Cushion), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)