0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring Dual 3-port valves, 4 positions VQC1000/2000 (Rubber seal only) Model A side B side JIS symbol Two

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Water and Chemicals Digital Flow Switch Series PF2D How to Order PF2D5 13 20 1 Remote Type Sensor Unit Flow rate range 0.4 to 4l/min 1.8 to 20l/min 4 to 40l/min 04 20 40 Output for display unit Note 1) + analog output (1 to 5V) Output for display unit Note 1) + analog output (4 to 20mA) Output specifications 1 2 Port size: (inch) Note 1) Output for the display units of PF2D 300/301 11 13 19

EXxx-OMN0037CN

No.EX-OMN0037CN-A / EX600-AXA EX600-AYA EX600-AMB SMC 3 9 10 12 12 14 15 15 16 16 LED 18 19 19 24 25 25 26 26 LED 27 28 28 32 33 33 34 34 LED 36 37 37 44 -1No.EX-OMN0037CN-A 45 46 46 46 46 46 47 -2No.EX-OMN0037CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

AS-FPQ/AS-FPG

ASS ASR ASF Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

7.4

Voltage Symbol Type 5 24 VDC 6 12 VDC 747 S0700 Series Dimensions 2-Position Single Grommet: S0715(R)-mG-M5 21.2 11.4 M5 x 0.8 1(P) port 5.2 7.7 M5 x 0.8 3(R) port Manual override 3.3 7.4 19 300 (Lead wire length) 43 2 x 3.5 Mounting hole 21.4 300 (Lead wire length) 40 3.2 28 50.3 48.2 Indicator light 34.5 34.5 31.2 31.2 7 11.5 M5 x 0.8 2(B) port 5.7 10 With plug connector/light S0715(R

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

VZ5000

21Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/4 (1(P), 3/5(R) port) PE port G: 300 mm H: 600 mm Manual override (Non-locking) (Lead wire length) (mm) Stations 2 3 66 46 85 65 20 408 388 L1 L2 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275 255 14 294 274 15 313 293 16 332 312 17 351 331 18 370 350 19

Soft Start-up Valve

. *5 Only for the NPT thread -19- How to Order of Pilot Valve Assembly AV 2 0 1 G B A Applicable size Symbol Description AV AV AV AV 2000 3000 4000 5000 Body size 2 AV2000-A, AV3000-A 4 AV4000-A, AV5000-A 1 AC100V 2 AC200V AC 3 AC110V [AC115V] *1 (50/60Hz) a d Rated coil 4 AC220V [AC230V] *1 voltage DC 5 DC24V 6 DC12V G GrommetLead wire length: 300mm D Type DDIN terminal/With connector

ZR

. : P3270156 13-3-19 19 Series ZR Suction Filter: ZR1-FX Specifications ZR1-FX is to be used alone and cannot be combined with other units.

VZS

For details, refer to pages 3-7-19 and 3-7-20.

Smooth Cylinder/Low Speed Cylinder

21.5 24.5 27.5 B 13 16 19.5 22.5 27 33.5 B 15.5 19 16.5 19 22 25 A 20.5 24 21.5 24 27 30 A A B 15.5 18.5 22 25 29.5 36 B A B 32 40 50 63 80 100 10 13 16.5 19.5 24 30.5 7.5 10.5 14 17 21.5 28 3.5 6.5 9.5 12.5 17 24 15 18.5 16 18.5 21.5 24.5 10.5 13.5 17 20 24.5 31 12.5 16 13.5 16 19 22 8 11.5 9.5 12 15 18 MQ RHC RZQ Note) Adjust the auto switch after confirming the operating conditions in

5

13.5 24 18.5 16 10.5 17 11.5 50 19 19.5 15 15.5 16 16.5 16.5 17 21.5 22 13.5 14 14.5 15 63 21.5 22.5 17.5 18.5 18.5 19.5 19 20 24 25 16 17 17 18 80 24.5 27 20.5 23 21.5 24 22 24.5 27 29.5 19 21.5 20 22.5 100 27.5 33.5 23.5 29.5 24.5 30.5 25 31 30 36 22 28 23 29 Note) Adjust the auto switch after confirming the operating condition in the actual setting.

Miniature Regulator

POM, Stainless steel 12 Electroless nickel plated Electroless nickel plated OUT Rubber lining material: HNBR Nickel plated Zinc chromated Zinc chromated Zinc chromated 13 10 16 5 Zinc chromated 2 Zinc chromated Accessory Electrophoretic painting Accessory IN 675 ARJ310 Series Dimensions ARJ310-01 ARJ310F-01 31 56 56 35 32 22 M12 x 1 Panel cutout dimensions 12.5/Panel thickness: 4 or less 19

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

L1 L2 A (2) L3 H (1) T2 T1 D1 D2 Model ASR ASQ AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS120-M5 M5 x 0.8 M5 x 0.8 8 10 28.3 10.3 9 9 25 22.2 25.5 AS120-U10/32 10-32UNF 10-32UNF AS220-01 30.5 13.2 14.3 14.6 32.4 27.4 12 (12.7) 18 35.5 1/8 1/8 AS220-02 35.3 17.5 18 19.5 34.8 29.8 17 (17.5) 27.2 40.3 1/4 1/4 AS320-03 40.8 19.7 22.5 24.3 40.6 35.6 19 30 45.8 3/8 3/8 AS420

Air Cylinder Series CJ1

D-X Individual -X Bore size (mm) Symbol S Z 5 19.5 10 28.5 15 37.5 20 46.5 5 40 10 49 15 58 20 67 Stroke Technical data 4 19

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

-X 389 MK Series Specifications 12 16 20 25 32 40 50 63 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotary angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20, 30 10, 20, 30, 50 40 75 100 185 300 525 825 1400 Air 1.5 MPa Fluid Proof pressure Note 4) 0.1 to 0.6 MPa Operating pressure

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Auto switches are included, (but not assembled). 1 Rotary Clamp Cylinder: Standard Series MK Specifications 63 12 16 20 25 32 40 50 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotation angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20 20, 50 1400 525 825 40 75 100 185 300 Air 1.5 MPa

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19

Air/Manually Operated High Purity Chemical Valve Series LV

/N.O. with same configuration/Double acting Compatible with 100C fluid temperature 1.12-4 Integral Fitting Type Series LVC Air Operated P.1 to P.6 LVC20/23 4 4, 6 1/8, 1/4, 3/16 LVC30 8 6, 8, 10 1/4, 3/8 LVC40 10 10, 12 3/8, 1/2 LVC50 16 12, 19 1/2, 3/4 Model Orifice diameter Millimeter Tube outside dia. Inch Symbol Type Basic type Valve type N.C. PB PA PA N.O. B A B A B A PB N.C.

ZU

Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19.