SI unit for CC-Link

significant bit). (3) Fuse disconnection details The power supply fuse disconnection for the SI unit solenoid valves can be monitored by the link special register of the master station. 0: Normal 1: Fuse disconnected Buffer area of master station Example: QJ61BT11N b15 b14 b13 b12 b3 b2 b1 b0 (688H)SW0088 16 15 14 13 4 3 2 1 (689H)SW0089 32 31 30 29 20 19 18 17 (68AH)SW008A 48 47 46 45 36

Mechanically jointed rodless cylinder With cam follower guide, With single-axis linear guide With double-axis linear guide

Table 1: Stroke adjustment range (Without spacer, with short spacer, with long spacer) -10 -20 -30 -40 -50 0 0 to 10 10 to 20 20 to 30 L unit MY2*16 Without spacer Short spacer Long spacer H unit 0 to 12 12 to 24 24 to 36 L unit MY2*25 Without spacer Short spacer Long spacer H unit 0 to 16 16 to 32 32 to 48 L unit H unit Without spacer MY2*40 Short spacer Long spacer -9- Warning 1.

Solenoid Valve

No.SQ1000V-OMQ0002-B 20 No.SQ1000V-OMQ0002-B 21 No.SQ1000V-OMQ0002-B 22 No.SQ1000V-OMQ0002-B 23 No.SQ1000V-OMQ0002-B 24 No.SQ1000V-OMQ0002-B 25 No.SQ1000V-OMQ0002-B 26 No.SQ1000V-OMQ0002-B 27 No.SQ1000V-OMQ0002-B 28 No.SQ1000V-OMQ0002-B 29 No.SQ1000V-OMQ0002-B 30 No.SQ1000V-OMQ0002-B 31 No.SQ1000V-OMQ0002-B 32 No.SQ1000V-OMQ0002-B 33 No.SQ1000V-OMQ0002-B 34 No.SQ1000V-OMQ0002-B 35 No.SQ1000V-OMQ0002-B 36

MHC2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11 2-M3 x 0.5 through Prepared hole dia. 2.6 through MHS 5 2.5 4.8 2 2 MHC MHT When closed 10 When open 30 4 MHY 2.5 14 20 12 MHW MRHQ 4 6 10 0.05 Auto switch mounting groove dimensions Misc. 36 D+0.022 0 7H8 depth 1.5 20(48) M3 x 0.5 Finger opening

High Vacuum Angle Valve

Heater: 422 B XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

ZP

18 36 M12 x 1 M12 x 1 M12 x 1 Vertical 36 Width across flat 14 Vertical Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 10 5 15 10 5 15 10 5 15 Lateral Lateral 2 2 2 With Adapter: Vacuum Inlet 17 16 11.4 1.8 13 8.4 1.8 11 10 6 1.8 With Adapter: Vacuum Inlet 14 Lateral With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-T10B

Vacuum System Peripherals:

36 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Table of Contents

0 3-5-80 81 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR5000 Plug-in 2 position single/double, 3 position closed center/exhaust center/pressure center 0 1 2 position single: VFR510 -F(Z) 21 [25] 32 [39] 40 [40.5] 31 [36] 25 [24] 31 [36] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB VK A B 32 [39] 40 [40.5] VZ 5-Rc 3/8, 1/2, 3/4 EA, EB port = Rc 1/2 in case of

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Inside panel standard cord cable 35) USB cable LEC-MR-J3USB Cable length: 3m For CN5 connector minB connector (5 pins) For personal computer connector A connector For connection with PC-AT compatible personal computer 36) Connector set LE-CSNS Connector: 10120-3000PE Shell kit: 10320-52F0-008 (Sumitomo 3M Limited or similar product) 11 5 11.

HRX-OM-R026

Table 3-12 Piping port size Name Port size1 Recommended Recommended piping tightening torque specification Circulating fluid supply Rc1 36 to 38Nm 1.0MPa and more Circulating fluid return Rc1 36 to 38Nm 1.0MPa and more Drain port Rc1/4 8 to 12Nm Facility water inlet *1 Rc1/2 28 to 30Nm 1.0MPa and more.

HRX-OM-W002

FLT Operation of this product will stop when the alarm occurs. 5.5 Advanced setting mode HRR Series 5-36 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Output of NOT TEMP READY 11. Press the [] key. Displays screen for setting the output of the NOT TEMP READY signal. The user can select whether thre is an output signal when alarm "AL13 NOT TEMP READY" occurs.

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 8-30-19 Solid state switch Reed switch Rail Grommet 8-30-20 Tie-rod Grommet 2-color indication 8-30-33 Band Grommet MX 8-30-34 8-30-35 Rail Grommet MTS 8-30-36 Tie-rod Grommet MY 8-30-37 CY Direct Grommet

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 8-30-19 Solid state switch Reed switch Rail Grommet 8-30-20 Tie-rod Grommet 2-color indication 8-30-33 Band Grommet MX 8-30-34 8-30-35 Rail Grommet MTS 8-30-36 Tie-rod Grommet MY 8-30-37 CY Direct Grommet

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 8-30-19 Solid state switch Reed switch Rail Grommet 8-30-20 Tie-rod Grommet 2-color indication 8-30-33 Band Grommet MX 8-30-34 8-30-35 Rail Grommet MTS 8-30-36 Tie-rod Grommet MY 8-30-37 CY Direct Grommet

Applicable Auto Switch Model

With timer Diagnosis output Diagnosis output With timer With timer Function 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 5.3-9 5.3-11 5.3-10 5.3-25 5.3-12 5.3-13 5.3-18 5.3-14 5.3-15 5.3-16 5.3-26 5.3-17 5.3-27 5.3-19/5.3-20 5.3-21/5.3-22 5.3-24 5.3-23 5.3-29 5.3-31 5.3-55 5.3-49/5.3-50 5.3-42 5.3-30 5.3-56 5.3-51 5.3-59 5.3-43 5.3-32 5.3-33 5.3-34 5.3-36

JXCx-OMY0006

Item Decimal Comm Format "Data-SINT" Input 36 [bytes] Output 36 [bytes] Configuration 0 [bytes] (4)(5) (1) (2) (3) -22No. JXC-OMY0006-A 4.4 EtherNet/IP object The controller supports the object classes below.

High-precision Digital Pressure Switch ( compatible)

Device state parameters (index 36) Readable device states are as follows.

SZ3000

For details on attachment of sockets, refer to the section "How to use plug connectors" on page 36.

XL

the bonnet assembly (1) is a heat resistant structure. 10 High Vacuum Angle Valve Series XLC, XLCV Dimensions (mm) 1in = 25.4mm (b) XLC/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) H J Heater (optional) B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36

Digital Flow Switch ( compatible)

Device state parameters (index 36) Readable device states are as follows.