ZL3-OM00801

No.ZL3-OM00801-A / / ZL3 ZL6 No.ZL3-OM00801-A 2 1. 5 2. 6 3. 7 3.1. 7 3.2. 8 3.3. 9 3.4. 10 3.5. 12 4. 13 5. 14 6. 15 7. 16 8. 20 9. 21 10. 24 11. ,, 25 11.1. 25 11.2. 26 11.3. 26 12. 27 13. 28 1 - No.ZL3-OM00801-A /ZL3ZL6 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

Vacuum Gripper

18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -10No.

Air Slide Table Series MXP ø 6, ø 8, ø 10, ø 12, ø 16

12 V Relay, PLC Yes Yes No Grommet 24 V IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 12 V IC circuit 3-wire (NPN equivalent) A96V A96 5 V 24 V Grommet A93V A90V A93 A90 Relay, PLC 100 V 2-wire 12 V IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.

Pin Clamp Cylinder Series CKQ/CLKQ

Lock Specifications Clamp Specifications Locking action Spring locking (Exhaust locking) Without shim With shim Clamp stroke 10 mm 0 0.5 Unlocking pressure 0.2 MPa or more 10 mm to 12 mm Lock starting pressure 1 pc.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

9 i i l : ; 1 : I .: i a ) : r : TApe 541,/ Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NWSJ 3S41i statrons-l M5 , B3T E ^ 12 Stations 5 7 8 10 1 l 12 13 14 1 5 16 17 18 19 20 L1 1.56 (39.5)1.97 2.38 (50) (60.5)2.80 (7i) 3.2 (8r.5)3.62 (92) 4.O4 (102.s) 4.45 (1131 4.8 5.2e (123.5) (134) 5.69 (144.5) 6.t0 6.52 (155) (165.5) 6.93 (176)7.34 (186.51 7.76 (197) 8.17 QA7.5, 8.54

Pneumatic Transfer System Series MF

When equipped with system 2, there are four supply ports, A through D. 32 Air supply ring 24 24 21 Air supply unit body 12 Rc(PT)1/8 Air supply port (plug) 32 IN IN 64 52 (Min. 29) 42 (Min. 29) Supply block unit OUT 342 (Min. 316) + Stroke Air supply ring Air supply unit circuit diagram Rc(PT) 1/8 Air supply port 110 12 2-Rc(PT)1/8 Stroke end air supply port (64) 34.5 32 12 65.5 9

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

343 362.5 373 66 Series VQ1000/2000 VQ1000/Flat Cable Kit Stations VV5Q11J 0-(D) U S (L4) Applicable connector: Flat cable connector (20P) (L3) 5.2 (conforms to MIL-C-83503) L2 23.5 Indicator light L1 28 P = 10.5 27 8.8 (12) 13 Manual override 1.5 4.8 7.7 18.7 (12) A B A B A B A B A A A (5.5) 40.5 66 93.5 = 2 40.7 (35) 35 52 61.5 63.5 4-M4 mounting hole Stations D Side U Side 1 2 3 4 5 6

Flow Sensor Series PFMV

output: 2 outputs Max. 80 mA, residual voltage 1 V or less Analog output: 4 to 20 mA Max. load impedance: 300 (at 12 VDC) 600 (at 24 VDC) Min. load impedance: 50 DC (+) DC (+) (Brown) Analog output (Brown) Analog output Load 12 to 24 VDC 12 to 24 VDC (Gray) Main circuit Main circuit (Gray) Load + + OUT1 OUT1 Load (Black) (Black) OUT2 OUT2 Load (White) (White) Load Load DC () DC () (

Water-cooledThermo-chiller

Outlet pressure [60 Hz] 75 75 60 60 Outlet pressure [50 Hz] 45 45 30 30 Return port pressure Return port pressure 15 15 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 0.53 gpm (2 L/min)., the shutdown alarm activates and operation stops.

High-precision Digital Pressure Switch

Check if there is a noise source nearby. (2) Check if the power supply voltage is in the range 12 to 24 VDC. (2) Supply power in the range 12 to 24 VDC. "HHH" is displayed. 6 (1) Reset applied pressure to a level within the set pressure range. (1) Check if the pressure exceeds the upper limit of the set pressure range. "LLL" is displayed.

Clean Air Module

/8 Restrictor (36.5) Clean air filter Note) One-touch fitting 12 103 85 13.2 34.8 3 (41) 111 59 71 80.4 41 59 59 Rc 3/8 (NPT 3/8) 521 3.5 (3.5) Note) This port is unavailable.

30

-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 8 10 10 12 12 12 16 16 1 1.5 1 1.25 1.5 1.75 1.5 2 D-X Technical Data 1139 JC Series Dimensions of Accessories Rod end nut (mm) d: Thread nominal size Model Order number M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11 B C 15 15 19.6 19.6 19.6

Series KV2 Fittings

(g) Bag/Box Quantity L 5/32 1/4 3/8 1/2 5/8 5/32 1/4 3/8 1/2 5/8 KV2E03-00 KV2E07-00 KV2E11-00 KV2E13-00 KV2E15-00 1/2-20 9/16-18 7/8-14 1-12 1 1/8-12 17.46 17.46 25.40 28.57 33.33 32.1 34.1 42.1 44.1 50.0 16 17 21 22 25 16 17 21 22 25 13.5 15.0 23.0 26.0 29.0 1.6 3.5 5.4 8.5 9.8 32 30 87 117 191 100/400 100/400 100/100 100/100 50/50 Female Bulkhead Connector KV2E_ _-_ _ L1 L2 M Thread H1

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Suction Guard (Produced upon receipt of order) FHG Series

HOW 10 (1 1/4B) 12 (1 1/2B) 16 (2B) 45 20 (2 1/2B) 24 (3B) Fixed Note) Refer to page 509 for the T dimension. Replacement Element Part No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1263.5 906 960 12 4 800 180 11-LEJS40S-10001323.5 1363.5 1006 1060 14 5 1000 80 11-LEJS40S-12001523.5 1563.5 1206 1260 16 6 1200 80 535 11-LEJS Series AC Servo Motor Clean Room Specication Dimensions: Ball Screw Drive 11-LEJS63 Body mounting reference plane Note 2) 4 x M8 x 1.25 depth 12 6H9 ( ) depth 7 +0.030 0 (172) 122 M4 x 0.7 depth 8 (F.G. terminal) 25 (3.1) 90 129 Motor cable (6) 68

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11 2 4 1/8 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/16" 1/4 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 5/16" One-touch fitting for 3/8" 1/4 3/8 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12

Modular Type Lubricators Series AL

How to Order AL800 AL 23 80 12 0 R AL900 Semi-standard R Flow direction: Right Left Body size Port size Semi-standard Lubricator 1 1S-1 1S-2 2 3 6 8 1000 cm3 tank 1000 cm3 tank with switch (Bottom limit ON) 1000 cm3 tank with switch (Bottom limit OFF) Metal bowl With drain cock Nylon bowl (Including sight dome) Metal bowl with level gauge Symbol 12 14 20 4 1 1 1 2 2 1 80 90 1 2 2 1 Thread

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

(mm) Elbow type TMH 6 8 10 12 Tube swivels 360 AS121F-M5-W2 M5 ASD Application to inch size tubing Metric size 6, 8, 10, 12 AS221F-01-W2 R1/8 AS221F-02-W2 R1/4 AS AS321F-02-W2 R1/4 Maximum operating pressure 1 MPa max.

SMC Pneumatic Clean Series

Series 10-/11-/12-/13Clean Series Available for clean environment. Particle generation in a clean room can be prevented.