SL5200

0.5 to 10 psig (0.0034 to 0.07 MPa) Sub-atmospheric (A): 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Range options 1) Specification Code Ports 2 ports 3 ports Standard (Cv: 0.07) Code Specification Standard Sub-atmospheric 2PW 3PW No code 01 No code A High flow (Cv: 0.15) HF 0.5 to 30 psig (0.0034 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 1 to 100 psig (0.007 to 0.7 MPa) 02 06

Clean Regulator/Fluororesin Type SRF Series

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 04 06 08 10 12 19 03 05 07 11 13 19 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable

VEX1

Regulator valve Option Bracket Foot Pressure gauge Silencer for bleed port Dimensions of port P1 B F G SRP Type Precision regulator Operation Air operated type Manual knob type Fixed orifice SRF N Port P1 0 3 ITV Thread type Fittings for M5 IC Nil F N T Rc G Note 1) Body size Port size Body size Port Port size 1(P), 2(A) 3(R) ITVH NPT NPTF 8 1 01 02 02 03 04 04 06

Series VER2000/4000 5 Port Electro-Pneumatic Proportional Valve How to Order Port size Nil Without sub-plate 1 4 02 3 8 03 ARJ 02 VER2000 Series VER2000 AR425 to 935 AMR 03 0 VER400 Series VER4000 ARM Thread type Pilot type ARP 0 Internal pilot Rc Nil Por

Series VER2000/4000 5 Port Electro-Pneumatic Proportional Valve How to Order Port size Nil Without sub-plate 02 03 1 4 3 8 ARJ VER2000 02 Series VER2000 AR425 to 935 AMR 03 0 VER400 Series VER4000 ARM Thread type Pilot type Internal pilot External pilot ARP 0 1 Nil Rc Port size F N G NPT T IR Nil Without sub-plate 03 04 06 3 8 1 2 3 4 NPTF IRV VEX1 SRH Note) To order valve with interface

VEX1

Rc G NPT NPTF Nil F N T 4 5 6 7 Base gasket VEX1 11 2 9 Other Option Body size Port size Electrical entry (Only with solenoid) Port size Body size Electrical entry Port 1(P), 2(A) 3(R) 1 8 1 8 01 1 02 G Grommet (Lead wire length 300 mm) 1 4 1 4 H Grommet (Lead wire length 600 mm) 1 4 1 4 02 3 03 D DIN terminal 3 8 3 8 DO DIN terminal (Without connector) 04 1 2 1 2 1 2 3 4 1 2 3 4 1 04 5 06

VG342

(Normally open) B Electrical entry G Grommet D DIN terminal Thread type Rc Nil G F T Conduit terminal E Grommet terminal NPT N NPTF T Light/Surge voltage suppressor Nil None Port size S With surge voltage suppressor (Only grommet type is only available.) 04 06 10 1 2 3 4 1 Z With light/surge voltage suppressor (Except grommet type) How to Order Pilot Valve Assembly X84 VO307 G 1 SYJ Valve

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Without sub-plate 00 VPA4 54, 4 74 JIS Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 03 2 position double 2 position single Body size VPA4150/4170 VPA4250/4270 04 06 10 0 1 VPA4 5 Piping standard 3 4 standard 11 4 Side ported Bottom ported W/o sub-plate 5 7 0 1 12 14 0 1 VPA4 7 4 Option Side piping only 3 position exhaust center 3 position closed center VPA4350 VPA4450

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 03 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ VP Conduit terminal

VX

001 # ) # ) #' ) L 5 % ) / *% 06 ! ' 002 003 Z 5 % *%+ * ,* -07 ( =+4 7> 08 (? =+4 7> Terminal box 13 ( =+4 7> Electrical entry Nil # T 5 % & 23 (( =+4 7> 51 4 ! G 53 55 56 (? ! C ) ! ! D !"# Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

VX

001 # ) # ) #' ) L 5 % ) / *% 06 ! ' 002 003 Z 5 % *%+ * ,* -07 ( =+4 7> 08 (? =+4 7> Terminal box 13 ( =+4 7> Electrical entry Nil # T 5 % & 23 (( =+4 7> 51 4 ! G 53 55 56 (? ! C ) ! ! D !"# Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

E-P HYREG ® VY1 Series

Nil 1 to 5 V 10 k 67 k 1 0 to 10V Note 2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Mounting Port 1(P), 2(A) Port 3(R) Applicable pilot valve (4) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06

Series ZB Compact Vacuum Unit

Latching Symbol 50.8 psi (0.35 MPa) 50.8 psi (0.35 MPa) 50.8 psi (0.35 MPa) 72.5 psi (0.5 MPa) 00 Note 1) 58 psi (0.4 MPa) 65.3 psi (0.45 MPa) Supply Valve/Release Valve Electrical Entry Note 4) 1 Single unit 03 04 05 06 0.3 mm PV, PD 0.4 mm PV, PD common port (PV = PD) L-type plug connector With lead wire 0.5 mm L 0.6 mm Note 1) Vacuum pump system only L-type plug connector Without

ModelMin. operating pressure differential (MPa)Max. operating pressure differential (MPa)Flow characteristicsMax. system pressure (MPa)Weight (g) ACDCCbCv3/4 (20A)20VXZ2350-06--1.00.738.00.209.51.51300

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VACUUM PAD W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, UL, ZP PAD SIZE 10-25, .06139

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, Y TYPE ADAPTOR, ZP SERIES, VACUUM SERIES, ZP VACUUM PAD, 22, ZP NO SIZE RATING, .04400

Available in standalone or manifold configurations.Vacuum ejector, Stations: 01, 02, 03, 04, 05, 06, 07, 08, Right, left, or both side vacuum supply, "Manifold, VACUUM EJECTOR

Available in standalone or manifold configurations.Vacuum ejector, Stations: 01, 02, 03, 04, 05, 06, 07, 08, Right, left, or both side vacuum supply, MANFD VAC GENERATOR, VACUUM SERIES, ZZX1 MANIFOLD UNIT, JC, ZZX1 1/8 PORTED, .77686 lb

.: 04, 06, 08, 10, 12, "SPEED CONTROLLER, FLOW CONTROL

NZX is available in standalone or manifold configurations.Vacuum ejector, Stations: 01, 02, 03, 04, 05, 06, 07, 08, Right, left, or both side vacuum supply, ZZX1 MANIFOLD UNIT, VACUUM EJECTOR

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VAC PAD (BELLOWS) W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, UL, ZP PAD SIZE 10-25,