SMC Corporation of America
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.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSE3 Vacuum Q CE marked products Note) Only available with output specifications 21 and 23.

Case Replacement Parts q Gasket for cover case AL-204H AL-205H ZFA100 Part no. ZFA200 No. Description Selection Warning 1.

Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.

Operation tinre @ntinuous (ShourVday) =1.Syears Clean Air for Clean Room Seruice Clean roorn Comgessed ait C Supa Mist Seoarator q/silem B/Blcrrviq air b partsdebning ODerry pcint: -58'F or less (Atnospheric p(essure), OEfficiency: Less than 100 particles 0.3 microns ol1 larger per cubic foot.

1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q

be used within the max. operating flow rate (negative) range. ( ) Conditions/ Inlet pressure: 0.5 MPa, Fluid: Water 0.5 82 SMC Outlet pressure MPa 0.4 K P C U O S H L 0.3 0.2 82 0.1 0.0 10 20 30 40 50 60 70 0 Flow rate L/min (ANR) w INA-48-1-06, 10 142 (Max. 146) Conditions/ Inlet pressure: 0.55 MPa, Fluid: Air 0.5 r Outlet pressure MPa 0.4 0.3 OUT IN 0.2 33 0.1 2 x Rc 3/4 to 1 0.0 t e y q

9 12 Adjusting bolt Stainless steel q 13 Return spring Stainless steel @2 @3 14 Cushion Polyurethane elastomer !0 15 Poppet Polyurethane elastomer 16 Plate Steel + Electroless nickel plated @4 17 Spring Stainless steel !8 18 Guide ring Resin e 19 Guide ring Resin !

Bush Set bushing Aluminum alloy Aluminum alloy Special stainless steel Special stainless steel Aluminum alloy Aluminum alloy Resin Brass NBR Stainless steel/Piano wire Brass NBR NBR NBR Chromium-molybdenum Chromium-molybdenum Chromium-molybdenum NBR Gasket Spring Spring seat O-ring O-ring O-ring Hex. socket head cap screw Hex. socket head cap screw Hex. socket head cap screw Lock nut q

The oil that has been pumped from the tank passes through felt q where it is filtered, and is fed into the case through nozzle w. When the volume of oil reaches a certain level, float e ascends, valve t descends via lever r, nozzle w closes, and the feeding of oil stops, thus completing the oil feeding process.

Compact Direct Operated 2/3 Port Solenoid Valve for Chemicals Series LVM09/090 How to Order LVM 09R3 5 A Base Mounted CE compliant Symbol Lead wire length Nil None CE compliant Q Symbol Valve type Number of ports Nil 150 mm 300 mm 600 mm 3 6 09R3 N.C. (Symbol 1) IN (Symbol 2) OUT Nil cannot be selected in the case of function Y1. 2 Wetted part material 09R4 N.O.

How to Order ZM L Nozzle diameter 05 07 10 13 15 0.5 mm 0.7 mm 1.0 mm 1.3 mm 1.5 mm Release flow rate adjusting needle CE compliant Nil Q Nil L Without lock nut CE compliant With lock nut Compatible with release valves only. Vacuum port location Made to Order Refer to pages 1004 to 1006 for details.

in contact with uid PPS, PP , POM, FKM, Stainless steel 303, Stainless steel 304, SCS13 Non-grease specications Piping port size 03: Rc3/8 04: Rc1/2 Weight 515 g 530 g Input Signal Flow Rate Characteristics Output Signal Pulse Frequency Flow Rate Characteristics FC2W504 (Graph 1) FC2W504 Wiring Diagrams Flow rate [L/min] 4.0 Flow rate command value [L/min] Connector 4.0 4.2 (Brown) Vcc q

AL-128H AL-129H AL-131H AL-132H AL-134H AL-135H AL-136H AL-137H KA00813 (V120) AL-128H-V AL-129H-V AL-131H-V AL-132H-V AL-134H-V AL-135H-V AL-136H-V AL-137H-V KA00728 (V120) KA00815 (V85) KA00812 (V100) KA00813 (V120) KA00814 (V150) KA01800 (V175) KA00731 (V85) KA00727 (V100) KA00728 (V120) KA00729 (V150) KA00730 (V175) KA00470 (P28) AL-130H Differential pressure indicator Blanking cap q

Note 4) q Ambient temperature: 25C, w Circulating fluid temperature: 20C, e Rated circulating fluid flow rate, r Circulating fluid: Clear water, t Facility water temperature: 25C Note 5) Use a 15% ethylene glycol aqueous solution if operating in a place where the circulating fluid temperature is 10C or less.

Note 3) q Ambient temperature: 25C, w Circulating uid temperature: 20C, e Circulating uid rated ow, r Circulating uid: Tap water Note 4) Temperature at the thermo-chiller outlet when the circulating uid ow is rated ow, and the circulating uid outlet and return port are directly connected. Installation environment and the power supply are within specication range and stable.

Accessories Weight10 [kg] 45 1 It should have no condensation. 2 If tap water is used, use water that conforms to Water Quality Standards of the Japan Refrigeration and Air Conditioning Industry Association (JRA GL-02-1994 cooling water system circulating type make-up water). 3 q Ambient temperature: 25C, w Circulating uid temperature: 20C, e Circulating uid rated ow, r Circulating uid: Tap

Input/Output specications Nil None S With automatic cleaning unit W With adjustable louver Y With automatic cleaning unit + adjustable louver Nil NPN input/output P PNP input/output Power supply cable, AC adapter Nil With power supply cable (3 m) Z With power supply cable (10 m) Q With AC adapter (with AC cord) R With AC adapter (without AC cord) N None Bracket Nil None B With bracket 11

07 35 S Series Sealant Body Style With Sealant (as applicable) S Male Connector Straight Union Cartridge Straight H Thread Size 1/16 NPT 33 Male 45 Elbow Cartridge 45 Elbow K 1/8 NPT 34 Male 90 Elbow Plug-In 90 Elbow Union 90 Elbow Cartridge 90 Elbow 1/4 NPT 35 L 3/8 NPT 36 1/2 NPT 37 3/4 NPT 38 Male Branch Tee Union Tee T Union 00 Male Branch Y Union Y Plug-In Y Plug-In 99 U Cartridge Q

Special bearing material Carbon steel Copper Piano wire Copper alloy Carbon steel Bearing steel Special steel NBR NBR NBR NBR NBR Description Outer tube Inner tube Piston rod Piston Bearing Spring guide Lock ring Return spring Seal holder Stopper Steel ball Set screw Accumulator Rod seal Scraper Gasket Gasket Treatment Gray coated Heat treated Electroless nickel plated Heat treated No. q

VEA 5 (R1) 4 (A) 1 (P) 2 (B) VY2 OFF state VBA VBAT F1 < F2 condition: See figure q. 2 (B) 3 (R2) AP100 4 (A) ON state Immediately after turning on F1 > F2: See figure e. Thereafter F1 = F2: See figure w. 4 (A) 1 (P) 2 (B) 3 (R2) Inw, port 3(R) is half open. 705