2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5

Thermo-con

flow rate: 1.3 gpm (5 L/min) 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) Circulating fluid: 20% ethylene glycol HEC003 Circulating fluid: Clear water 50 70 90 110 130 150 F 50 70 90 110 130 150 F 1000 1000 800 800 Cooling capacity (W) Cooling capacity (W) Facility water: 68F (20C) Facility water: 50F (10C) 600 600

Aluminum High Vacuum Angle Valve

M12, L = 70 Refer to part no.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 @4 CS type snap ring Parallel pin Parallel key Seal washer Plug O-ring Steel balls Shock absorber @5 Size: 10 to 50 Size: 70 to 200 Carbon steel @6 NBR Brass NBR Stainless steel @7 @8 @9 #0 #1 Size: 70 to 200 only Size: 70 to 200 only Replacement Parts Description Kit no. Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

Electric Actuators

80% 90% 100% Set value of pushing force [%] Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 80 70 10 5 LEPY10 (Basic) 100 50 LEPY10L (Compact) 13.5 11.2 11.2 9.0 Lead 5 (LEPY10K) Lead 5 (LEPY10LK) 9.0 6.7 Force [lbf] Force [lbf] 6.7 4.5 Lead 10 (LEPY10J) Lead 10 (LEPY10LJ) 4.5 2.2 2.2 0 0 50% 60% 70% 80% 90% 100% 60% 70% 80% 90% 100% Set value of pushing

240

or less 100 70 30 3 100 15 1 LEC 11.

Industrial Filters

x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 x L500 65 x L250 65 x L750 65 x L250 65 to 70 x L250 65 x L250 65 to 70 x L250 Element size Cover Stainless steel 304 Case Stainless steel 304 Main materials Gasket Fluororesin Fluororesin Fluororesin O-ring NBR FKM Legs SS400 (Chromatic plating) Weight (kg) 10 13

JXCx-OMT0061CN

CC-Link (P.77) D 1 () E 2 F 0 OFFON 1 17 () 8F 1:ABS 2:INC 70 L 1 1mm/s 2 F8 H (-) (+) 3 F0 L 0.01mm 11.1 (P.47) )RWw0,bit6: ON 655.37 4 F0 H 70 L 1 (*3) 2 1 mm/s 5 1% F8 H 1 (*3) 70 L 2 1 mm/s [mm](65537d=1000 1h) RWw3=0001h RWw4=0001h 6 1% F8 H 70 L *3 1mm/s 1% F8 H 7 42 - 8 70 L *3 1% F8 H 9 70 L *3 1mm/s F8 H 10 70 L *3 1% F8 H 11 F0 L (-) (+) 1 0.01mm 12 F0

Large Size Vacuum Module: Series ZR

pressure Air consumption (l/min (ANR)) Suction flow (l/min (ANR)) Air consumption (l/min (ANR)) Suction flow (l/min (ANR)) 80 80 80 80 ZY Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) 70 70 70 70 ZF 60 60 60 60 Air consumption 50 50 50 50 ZP Air consumption 40 40 Vacuum pressure 40 40 Suction flow Suction flow SP 30 30 30 30 20 20 20 20 ZCUK 10 10

Modular Type Air Filters Series AF

W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G

XM, XY

80 40 50 65 70 88 90 P.C.D 27 70 P.C.D 58.7 6 x 6.6 114 P.C.D 92.1 8 x 8.4 95 110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

Compact Manifold Regulator Series ARM5

Handle Position Symbol Position Handle position Handle position Handle position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max. 28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 6 51.5 80 51.5 13 OUT IN 3 28 13 OUT IN 13 OUT IN 3 3 2. OUT Piping Position 3.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83

Refrigerated Thermo-chiller

1 0 0 20 30 40 50 60 70 80 90 20 10 0 10 20 30 40 Circulating fluid temperature (C) Circulating fluid temperature (C) HRZ002-W/008-W 4 HRZ008-W Heating capacity (kW) 3 HRZ002-W 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) 81 Series HRZ Pump Capacity (Thermo-chiller Outlet) HRZ001-L/002-L/004-L HRZ008-L 1.2 1.1 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0 0.9 70

High Vacuum Angle Valve

70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 H B A G *1 The E dimension applies when the heater option is included.

Electric Actuator Miniature Rod Type Miniature Slide table Type

%] Duty ratio (%) Pushing time (minute) 70 or less 100 LEPY10 LEPS10 Compact 80 70 10 100 50 5 7.4 Precaution on maintenance Caution 1.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

The load factor for each direction can be found as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 1000 1000 1000 Lz 800 800 800 600 600 600 L1 [mm] L3 [mm] L2 [mm] 400 400 400 Lx Ly 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 8 LEKFS Series Battery-less Absolute (Step

Compressed Air Preparation Filter

50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

100

rate Air consumption Air consumption 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Supply pressure [MPa] Supply pressure [MPa] Standard supply pressure: 0.33 MPa (Without valve) 0.35 MPa (With valve) Time to Reach Vacuum Tank capacity: 1 L Flow Rate Characteristics 100 90 80 70 60 50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa