IR1000/2000/3000

Order Made Specifications Series Variations Model Basic type Air operated type Specifications Symbol Specifications/Content Clean room specifications Copper-free specifications Ozone resistant specifications For high temperature For low temperature Non-grease specifications Manifold (except series IR2120, IR3000) IR100 IR200 IR2120 IR3120 IR300 10 0.2MPa 20 Maximum set pressure 0.4MPa 80

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

MGZ Series

: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 8-9-10 10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !

AMP

P-80 (YG)

FQ1

P-80 (N) All specifications in this catalog are subject to change without notice. This catalog is printed on recycled paper with concern for the global environment.

KP/KPQ/KPG

P-80 (D)

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1131 20 or less 0.19 0.20 0.80 0.19 0.20 0.79 15 or less Rubber seal 80 2 position 3 position 4 position SQ1230 0.14 0.11 0.63 0.14 0.10 0.62 15 or less Metal seal 80 Double (Latching) SQ1231 0.19 0.20 0.80 0.19 0.20 0.79 20 or less Rubber seal 80 Double (Double solenoid) SQ1230D 13 or less 0.14 0.11 0.63 0.14 0.10 0.62 10 or less Metal seal 95 SQ1231D 20 or less 0.19 0.20 0.80 0.19

Table of Contents

VQ0 VQ0 0.59 0.50 10.5 Up to 40 VQ1000 1.0 0.84 11 Up to 50 VQ4 VQ2000 2.7 2.3 16 Up to 80 Flip type demonstrates space-saving effect. Cassette type enables flexible, speedy station increasing/decreasing.

VZS

.: 1.7 mm) White(B side solenoid) Red (COM) Mold coil Black (A side solenoid) L/M plug connector assembly 80 A DXT170 Lead wire length Lead wire color Connector Lead wire with socket Symbol Lead wire length (mm) Symbol Note Lead wire Nil Socket only (2 pcs.)

Vacuum Module Series ZX

ZCUK PV, V port size Electrical entry AMJ Nil Nil M5 x 0.8 M6 x 1 (Option) Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector Y L C CL CN AMV Output specifications NPN Open collector 30 V 80 mA 15 AEP 55 PNP Open collector 30 V 80 mA HEP Vacuum pressure setting Related Caution Observe the following precautions when setting the vacuum pressure.

Vacuum Pad

If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'. Thus, if the leakage volume is 30 L/min (ANR) the L type can attain a higher vacuum pressure, and if the leakage volume is 5 L/min (ANR), the S type can attain a higher vacuum pressure.

Vacuum Pad

If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'. Thus, if the leakage volume is 30 L/min (ANR) the L type can attain a higher vacuum pressure, and if the leakage volume is 5 L/min (ANR), the S type can attain a higher vacuum pressure.

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5 V or

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5 V or

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5 V or

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5 V or