CHKD/CHKG

CHKGL--XC64 A C C B 293

IDG

of a membrane air dryer.

5 Port Air Operated Valve

/3 (R) port ] 5 (Pitch) P=27.5 VFRA 28 1/8 (Pilot port: Upward) VPA4 (Station n) (Station 1) SYJA 1/8 [Pilot port: Lateral (-P)] VZA 67 VTA 48.5 30 VGA 2 (Breathing hole) VPA 1/4 [4 (A), 2 (B) port ] VPA3 A A 28 B B (29.7) (Distance between ports) 10 23 (Pitch) P=27.5 Dimensions n: Stations 20 11 12 19 18 17 16 15 14 13 2 3 n L 10 9 8 7 6 5 4 578.5 L1 L2 83.5 111 138.5 166 193.5 221 248.5

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A B High precision type Basic type Port location Nil E Side ported Front ported Size 1 2 3 7 A With adjustment bolt Dimensions Clean series products do not have a hollow axis.

MXW Series Long Stroke Slide Table

82.5 103.5 128.5 153.5 178.5 203.5 4 MXW 8 W 35.5 14.5 10.5 10.5 10.5 10.5 V 96.5 117.5 142.5 167.5 192.5 217.5 A 48 28 28 28 28 B 107 127 152 177 202 4 MXW12 W 34 14 14 14 14 V 121 141 166 191 216 A 56.5 31.5 31.5 31.5 31.5 31.5 B 138.5 163.5 188.5 213.5 238.5 263.5 5.5 MXW16 W 42.5 17.5 17.5 17.5 17.5 17.5 V 152.5 177.5 202.5 227.5 252.5 277.5 A 65.5 40.5 40.5 40.5 40.5 40.5

MK

25.5 25.5 A 32.5 33 37 28 32.5 32.5 A 31.5 22.5 27 27 A 35.5 26.5 31 31 MKl20 MKl25 MKl32 MKl40 MKl50 MKl63 Auto Switch Mounting Bracket Part No.

Compact Type Dual-Rod Cylinder Series CXSJ

V) Power supply voltage 10 mA or less Current consumption 24 VDC (10 to 28 VDC) 28 VDC or less Load voltage 5 to 40 mA 40 mA or less 80 mA or less Load current 1.5 V or less (0.8 V or less at 10 mA load current) 4 V or less 0.8 V or less Internal voltage drop Leakage current 100 A or less at 24 VDC 0.8 mA or less Operating position Red LED lights up Optimum operating position Green LED

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

3.2 6.5 7 7 15 1 3H9 ( ) depth 3 +0.025 0 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20 28 23 28 GA 17 12 33 43 43 83 G 9 12 13 15 20 27

Compact 5-Port Solenoid Valve

2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

SYJ300/500/700

2-3.2 (For mounting) 2-3.2 (For mounting) 28 28 28 Refer to page 4-4-61 for dimensions with connector cable. 4-4-40 41 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Base Mounted (With Sub-plate) [ ] for AC Grommet (G), (H): SYJ74G H 01 02 1/4, 1/8 port (A port) 25 12 12 V100 SY G: Approx. 300 H: Approx. 600 (Lead wire length) 48.5 SYJ 70.7 [72.9] VK A VZ 18 20 27 34 Courtesy

HRX-OM-W002

For a facility having a large installation area (that can vent the air naturally): Make an air outlet on a wall at a high level and air inlet on a wall at a low level, to allow for adequate airflow. 2. For a facility having a small installation area (that can not vent the air naturally): Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

New

1A VXN Z 1 2 A A Enter standard product number.

MLGP

50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) X YY YL Z st25 st50 5028 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 42 60 80 100 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E

MLGP

50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) X YY YL Z st25 st50 5028 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 42 60 80 100 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E

High Vacuum Angle Valve, XL Series

In the case of 0.8MPa, when port A is a vacuum, port P can be pressurized to 0.8MPa (7kgf/cmG).

HRX-OM-W038

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

CLQ

A A1 E1 L1 Part no.

Compressed Air Preparation Filter

AD27-6-A With bowl guard AD27-6C-A AD37m-6-A AD47m-6-A Normally open (N.O.) With bowl guard AD38m-6-A AD48m-6-A Automatic (Auto drain) Manual With drain cock C2SF-2-A C3SF-2-A C4SF-2-A With level gauge C3LF-8-A C4LF-8-A With drain guide (without valve function) C2SFm-2J-A C3SFm-2J-A C4SFm-2J-A With level gauge C3LFm-8J-A C4LFm-8J-A Metal Normally closed (N.C.)