CV/MVGQ

D-Z7/Z80 MVGQ D-A3/A44 D-A3C/D-A44C CC 9 10 11 11 11 Features Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W D-F5NTL D-G5NTL D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV D-A5/A6 D-B5/B64 D-A59W D-B59W Type Model RB 13 13 14 14 15 14 14 17 16 18 Reed switch Grommet (In-line) Without indicator light J D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-F5/J5 D-F5W

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Compact Cylinder with Air Cushion Series RQ

Applicable bore size (mm) UA C d1 d2 H K L UT Mass (g) -X YB-05 50, 63 11 60 120 22 6.5 12 YU-03 32, 40 15.8 14 M8 x 1.25 8 25 7 17 6 11 Individual -X YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YB-08 80 14 75 230 28 8.5 16 YU-08 80 M16 x 2 24.8 23 13 90 9 22 8 20 Technical data YB-10 100 18 90 455 36 18 10.5 YU-10 100 M20 x 2.5 29.8 28 14 160 11 26 10 26 785 Series RQ Minimum Auto Switch

Compact Rotary Actuator Series CRQ2

D: Shaft dimension S L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU CA CB F H J JA JB Size Rotating angle 20 30 40 90, 180, 360 63 (11) 14 34 14.5 30.4 7 4.7 10 2.5 30 M 8 x 1.25 11 6.5 50 25 90, 180, 360 69 (11) 14 39 16.5 49 16 34.7 8.1 4.9 12 3 32 M10 x 1.5 14 8.5 68 30 90, 180, 360 78 (13) 16 47 18.5 55 16 40.4 8.3 5.2 15 3 36 M10

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Grommet D-90A/93A 11-11-13 Direct MSQ D-R731/R732 11-11-14 D-R801/R802 11-11-14 MRQ 11-11-15 D-R731C/R732C Connector 11-11-15 D-R801C/R802C DRail D-A79W 11-11-16 2-color indication 2-color indication With diagnosis output 2-color indication Water resistant 2-color indication With timer Grommet 20D-A59W Tie-rod Grommet 11-11-17 D-F79/F7P/J79 11-11-18 Grommet D-F7NV/F7PV/F7BV 11-11-19 Rail

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13

Table of Contents

Cylinder port is located at U side of body. 1(P) SUP port 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread P = 11 2-C6 3(R) EXH port Dimensions 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 26.5 71 100 110.5 37.5 82 100 110.5 48.5 93 112.5

0.

Formula: L5 = 16n + 11 L3 = 16n + 22 n: Stations (Max. 20 stations) Dimensions L n 2 3 110.5 100 70 20.5 59 4 123 112.5 86 18.5 75 5 135.5 125 102 17 91 6 148 137.5 118 15 107 7 173 162.5 134 19.5 123 8 185.5 175 150 18 139 9 198 187.5 166 16 155 10 223 212.5 182 20.5 171 11 235.5 225 198 19 187 12 248 237.5 214 17 203 13 260.5 250 230 15.5 219 14 285.5 275 246 20 235 15 298 287.5 262 18

IDX-OM-W017

11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 14-1 . 14-1 IDFA Series 2 IDX-OM-W017 i i i 1 () OFF 3 ON OFF i-1 IDFA Series i 1 IDX-OM-W017 i i-1-1 3 IDFA Series i-1-1 i 2 IDX-OM-W017 i i 2 5 i-2-1 IDFA Series IDX-OM-W017 i i-2 i-2-2

VZ5000

16 12.5 15.5 12.5 15.5 12 15 (mm) 11 12 13 14 15 16 17 18 19 20 485.5 475 458 14 Stations (Station n)(Station 1) L1 310.5 335.5 348 373 385.5 410.5 423 448 473 L2 300 325 337.5 362.5 375 400 412.5 437.5 462.5 L3 287 306 325 344 363 382 401 420 439 L4 12 15 11.5 14.5 11.5 14.5 11 14 17 VV5Z5-45Station U-C4C C6C (Pitch) Separation lever (mm) 2 123 112.5 97 13 3 148 137.5 116 16 4 160.5 150

Stainless Steel One-touch Fittings Series KG

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

Series KG Stainless Steel One-touch Fittings

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

Pin Clamp Cylinders

8.5 20 18 13 27 4 4 5 5.5 11.6 6 7.5 16.4 9.5 095 9.6 096 9.7 097 9.8 098 9.9 099 10.0 100 13.5 19.5 135 13.6 136 13.7 137 13.8 138 13.9 139 14.0 140 195 19.6 196 19.7 197 19.8 198 19.9 199 20.0 200 10 7.5 20 14 10.5 25 20 13 27 4 4.5 9.2 6 5.5 12.6 6 8 17.2 145 14.6 146 14.7 147 14.8 148 14.9 149 15.0 150 10.5 105 10.6 106 10.7 107 10.8 108 10.9 109 11.0 110 14.5 11 7.5 20 15 10.5 25 4

HRX-OM-M091

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. 4 High circulating fluid return temp. 5 High circulating

CV/MVGQ

11 13 16 147 157 173 189 203 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

HRX-OM-M090

HRS Series HRX-OM-M090 Contents 9.5.1 HRS012--10,HRS018--10 . 9-11 9.5.2 HRS012--20,HRS018--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012

Precautions 1

Y-020B Y-032B Y-040B Bore size 20 25, 32 40 +0.2 +0.1 9 20 25 36 46 M8 x 1.25 16 18 41 25 9 9 10 14 11 66 M8 x 1.25 +0.2 +0.1 25, 32 9 20 25 38 48 18 9 9 10 14 14 69 22 45 25 M10 x 1.25 M10 x 1.25 +0.3 +0.1 40 M14 x 1.5 12 24 55 68 22 12 13 25 13 92 16 24 50 49.7 49.7 M14 x 1.5 Applicable pin par no. Retaining ring Cotter pin size U1 R1 NX NZ Part no.

HRX-OM-T002

Blue(DC COM) 11 Terminal No. Black (Output1) 3 Terminal No. Black(Output1) Fig. 3-14 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue(DC COM) Brown (DC 24V) Brown(DC 24V) 14 Terminal No. Blue(DC COM) 6 Terminal No. Flow switch 13 Terminal No. 3 Terminal No. Black(Output1) Black (Output1) 11 Terminal No.