Series VCL

Q=14.2Cv 10.2 P l/min G Formula based on effective area (Smm) Q=0.8S 10.2P l/min G Other : Flow rate (l/min) : Pressure differential (P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor : Fluid specific gravity (water = 1) Q P P1 P2 S Cv G 1. Materials FKM: Fluoro rubber Trade names: Viton, Dai-el, etc. 2.

Series VQ Base Mounted Metal Seal/Rubber Seal

(Including the mounted valves. ) 1.10-148 Manifold optionsSV5Q11OP, #1 to #3 VQ 1000/2000 Plug-in Unit Base Mounted EXH block base assembly VVQ1000-19A-(C3, C4, C6, M5) F P L Manifold block ass'y Electrical entry F1 F2 F3 P1 P2 P3 L0 For F kit (2 to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Effective area (Cv) (1) SYJ 0.8MPa 0.15MPa 5 to 50C 2.7mm2 (0.15) 180 c.p.m SUP side pressure (P1) To CYL port SX Note 1) As per JISB8375-1981 (Supply pressure: 0.5MPa) VK Max. operating frequency VZ Dimensions 21.5 (5) Manifold 18 VF Valve 29 10.5 2n-C4, C6 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 VFR 2n-C4, C6 C6: One-touch fitting ass'y for 4 C8: One-touch fitting

XL

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).

Multistage Ejector Series ZL112/212 1

(the condition of P1 and Q1) 3. If the suction port is opened completely, the suction flow rate increases to the maximum (Qmax), while the vacuum pressure then drops almost to 0 (atmospheric pressure). When adsorbing work pieces which are permeable or subject to leakage, etc., caution is required as the vacuum pressure will not be very high.

ZU

Pmax P1 Vacuum pressure Qmax Q1 Suction flow rate 13-6-4

Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad improves response time.  The ZA is available as a single unit or manifold type, with or without pressure sensors and suction filters.  Compact

Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad improves response time.  The ZA is available as a single unit or manifold type, with or without pressure sensors and suction filters.  Compact

Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad improves response time.  The ZA is available as a single unit or manifold type, with or without pressure sensors and suction filters.  Compact

Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad improves response time.  The ZA is available as a single unit or manifold type, with or without pressure sensors and suction filters.  Compact

Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad improves response time.  The ZA is available as a single unit or manifold type, with or without pressure sensors and suction filters.  Compact

Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad improves response time.  The ZA is available as a single unit or manifold type, with or without pressure sensors and suction filters.  Compact

Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad improves response time.  The ZA is available as a single unit or manifold type, with or without pressure sensors and suction filters.  Compact

Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad impro, COMPACT VACUUM GENERATOR, VACUUM EJECTOR, L93, 50 lb

Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad improves response time.  The ZA is available as a single unit or manifold type, with or without pressure sensors and suction filters.  Compact

COQ2BP

) Length m ils in in It Torque It Ib h Ib Torque Length mm 0.0394 1.3559 N'm mm mm em m 2.54 25.4 2.54 0.3048 mils N'm 0.7375 It Ib in kg 10m 7.2330 It Ib 0.1383 kg m mm 0.0394 em 0.3937 in It Pressure mm(H20) 0.00142 psi Pressure in(H20) in(Hg) psi psi psi m 3.2810 2.5357 x 10-3kg/cm2 0.0351 8 6.897 0.06897 0.0703 kg/cm2 kPa bar kgiem2 Area in2 in2 1t2 mm(Hg) 0.0197 psi Area mm2 cm2 m2

51

Allowable Kinetic Energy Bore size (mm) 20 0.29 0.18 25 0.46 0.29 32 0.84 0.52 40 1.4 0.91 50 2.38 1.54 63 4.13 2.71 80 6.93 4.54 100 1000 Male rod end Female rod end 0.2 0.11 Allowable lateral load at rod end (N) m1 : Mass of cylinder movable parts kg m2 : Load mass kg V : Piston speed at the end m/s Kinetic energy E (J) = (m1 + m2) V2 2 100 80 100 Table (2) Mass of Cylinder Movable Parts

Rotary Actuator/Vane Type

E Double shaft/Port location: Side ported L MRQ 2 x Q4 K V1 B D S M1 T G1 H Y2 U N V2 C Body (B) Body (A) F 2 x R G2 J A E L Size: 10 Size: 10, 15, 20, 30, 40 W 3 x Q1 (For unit mounting) B port N A port 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) P M2 DRefer to page 77 for details of shaft types J, K, T and Y.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 7.5 + Stroke 2-2.8 through 2-2.8 through 5 RQ 2.5 10 2.5 Single acting MU 3 13 + Stroke 18.5 + Stroke D-X 20Rod end male thread Data Width across flats 4 M2 x 0.4 M2 x 0.4 2 4.6 1.6 4 1.6 6 7 2.5 12.5 Rod end nut part no. : NTJ-004 7-2-9 9 Series CUJ

CUJ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 7.5 + Stroke 2-2.8 through 2-2.8 through 5 RQ 2.5 10 2.5 Single acting MU 3 13 + Stroke 18.5 + Stroke D-X 20Rod end male thread Data Width across flats 4 M2 x 0.4 M2 x 0.4 2 4.6 1.6 4 1.6 6 7 2.5 12.5 Rod end nut part no. : NTJ-004 7-2-9 9 Series CUJ