Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

pin.4) RX(n+3).6 Digital input 6 (CN2, pin.4) RY(n+2).6 Digital output 2 (CN2, pin.4) RX(n+3).7 Digital input 7 (CN3, pin.4) RY(n+2).7 Digital output 3 (CN3, pin.4) Unit No.2 EX600-GILB RX(n+3).8 IO-Link Port 1 event flag RY(n+2).8 RX(n+3).9 IO-Link Port 2 event flag RY(n+2).9 RX(n+3).A IO-Link Port 3 event flag RX(n+2).A RX(n+3).B IO-Link Port 4 event flag RY(n+2).B Reserve RX(n+3).C RY

AW

C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J Polycarbonate Nylon Metal Metal bowl

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 4.5 (1.5) 4.5 (1.5) 9 (5) 12 (7.5) 14 (10) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 3 (0) 3 (0) 7.5 (3.5) 10.5 (6) 12.5 (8.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 5 (2) 5 (2) 9.5 (5.5) 12.5 (8) 14.5 7.5 8.5 1.5 (0) 1.5 (0) 6 (2) 9 (4.5

HRX-OM-T002

commercial losses) (6) Expenses and compensation not covered in 2.

Single Axis Electric Actuator Series LJ1H

4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 3000 a = 2000 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 44

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

-M3 X 0.5 thread depth 6 (A, B, C common view) 3-3 depth 6 +0.02 0 34 (A, B, C common view) 12h9 0 -0.043 1.5 5 19.5 12 41.5 (45) 0 8 17 2 0 8 -0.05 2 3.5 0 -0.03 3.5 0 -0.03 Open: 22 Closed: 14 2-M3 X 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 SMH3, #6 2.3-11 2 Finger Air Gripper Series MHR2/MDHR2 With Auto Switch (Built-in magnet): MDHR2-15R P.C.D29 (Mounting thread

13

(Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without silencer) Box type: Type B Body ported type: Type D Box type (Built-in silencer) ZX Model

C95

9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

Vacuum Unit Ejector / Vacuum Pump System

purity class is 2:6:3 of ISO8573-1:2010.

HRX-OM-X037

3 B contact (normally closed) By default Setting of contact output signal 4 to 6 6.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Manifold Specifications

In the case of base mounting, 2(A) port of 3 port valve should be 2(B) port of manifold base.

MXW

2 !3 !4 !5 !6 !7 !8 !

Speed Controller with Indicator

6 !7 !5 r !8 !4 !6 !7 !5 !1 !1 !2 !2 !3 w t y q i o e u t y q i o e u w !0 !0 !9 Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread r !8 !4 !6 !7 !5 !1 !2 w t y q i o e !0 u @0 Meter-in type Meter-out type Component Parts No.

Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

Compact

Without brake 5.8 t-_1 r l o l : r = tl-Model D F J K L N L X S H _ B _ 5 0 4 6 270 1 7 7 177 6 52 55 L X S H _ B _ . 7 5 4 6 295 202 202 6 47 65 LXSH B -1OO 8 320 227 227 6 47 75 LXSH B -125 4 8 70 345 252 252 6 4 7 85 T-slot A dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake electrical

CNG

85 10 18 5.5 6 4 8 5 26 20 to 200 15.5 to 200 22 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 19.5 to 300 22 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 19.5 to 300 30 19 52 112 1/8 75 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 301 to 500 27 to 300 (mm) Bore size (mm) 20 25 32 40 P K KA MM NA PG PH PL S TA TDe8 TE TF TH TR

LEH_C

LEHF10K2-16 3 - 3.3 9 13 16 10 18 15 8 11 6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.