End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 Bore (mm) 20 25 32 40 81 93 106 131 156 12.5 25 37.5 50 75 100 35 17 68 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 35 17 72 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 35 17 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 19 77 46 Refer to

Guide Cylinder/Compact Type Series MGC

MGJ Front mounting flange MGP MGQ 2 x P (Rc, NPT, G) MGG MGC MGF MGZ R Y + Stroke MGT (mm) R Y P Bore size (mm) 20 25 32 40 50 1/8 14 88 1/8 14 88 1/8 14 90 1/8 15 101 1/4 16 116 D-X Individual -X 395 Series MGC Slide Bearing Allowable End Load and Deflection F Y MGCM 20-R MGCM 25-R MGCM 32-R Stroke Stroke Stroke (Slide bearing type) (Slide bearing type) (Slide bearing type) Deflection Y

Air Slide Table Series MXW

31 31 31 B 104 124 149 174 199 MXW12 W 31 11 11 11 11 V 124 144 169 194 219 W V A 34.5 34.5 59.5 34.5 34.5 34.5 B 235.5 260.5 135.5 160.5 185.5 210.5 MXW16 W 14.5 14.5 39.5 14.5 14.5 14.5 V 225.5 280.5 155.5 180.5 205.5 230.5 A 43.5 43.5 43.5 43.5 68.5 43.5 43.5 B 293.5 318.5 243.5 268.5 168.5 193.5 218.5 MXW20 W 23.5 23.5 23.5 23.5 48.5 23.5 23.5 V 313.5 338.5 263.5 288.5 188.5 213.5 238.5

TABLE OF CONTENTS

BRACKET 1.63 (41.4) METERED EX PORT UNIVERSAL MOUNTING BRACKET All Models .88 (22.4) Models 21, 31 Consult Factory Models 21, 31, 51 1.17 (29.7) COIL OPTIONSsee page 79 Note: Availability of certain options or combination of options may vary with quantity of units ordered Consult representative or factory. 2.25 (57.2) MOLDED COIL All Models Mtg.

Sensor Monitor

Remarks ZS-31-B Straight, 5 m Power supply/output lead wire ZS-31-C Right angle, 5 m Assembly type connector PCA-1557743 Caution The sensor connection lead wire (M12-M12) is not provided by SMC. It should be prepared by the user.

LEY-OM007

1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10 30 11 31 12 32 13 33 14 34 15 35 NBR 16 17 18 101 19 POM 101 20 / 16 LEY-L016 LEY-F016 LEY-D016 16 LE-D-2-1 25 LEY-L025 LEY-F025 LEY-D025 25 LE-D-2-2 32 LEY-L032 LEY-F032 LEY-D032 32 LE-D-2-3 1 2 C /P.46 7.4 /P.47 7.5 -12- 3.

Series VQ Base Mounted Metal Seal/Rubber Seal

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

ZP

Thin flat type with ribs Deep type For workpieces with curved surfaces or for spherical workpieces C O N T E N T S Basic Pad ZP Series Variationsp. 27 Specifications p. 29 Thin Flat Type with Ribs How to Orderp. 95 Dimensions/Models p. 96 Deep Type How to Orderp. 104 Dimensions/Models p. 105 Flat Type How to Orderp. 31 Dimensions/Models p. 32 Flat Type with Ribs How to Orderp. 50

CV/MVGQ

D-B5 D-B64 D-G5NTL 2015 + 50 ( n 2) (n = 2, 4, 6) 2 75 15 10 75 + 55 (n 2) Data 20 + 50 ( n 2) (n = 2, 4, 6) D-B59W 2 20 75 15 10-15-33 Series CVM3 Built-in One-touch Fitting CVM3 Mounting style Bore size For How to Order, refer to page 10-15-31. F Built-in One-touch fitting Specifications One-touch fittings are installed on cylinders.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 8-29-10. 8-29-31

MGC

Made to Order Specifications (For details, refer to page 8-31-1.)

3

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

Stability of suction position,

Pad diameter 32, 40 Dimensions/With Ball Joint Adapter: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-TF32UMl-AL6 ZP3E-TF40UMl-AL6 14 14 Width across flats 8 2.5 M6 x 1 2.5 M6 x 1 Width across flats 8 Seal washer Seal washer 14.5 3 1.3 19.2 23.6 16 39.6 14.5 1.3 3 19.2 23.6 16 39.6 Width across flats 2.5(2) Width across flats 2.5(2) 17 17 31 31 14.41) 2.5 14.41) 2 30 (Rotating

Table of Contents

31 Series MHSH3 Construction Open condition 16 to 25 Closed condition !

Guide Cylinder Series MGG

12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201 82 37 52 16 38 65 12 21 14 114 Rc 1/8 200mm or more 101 350 to 800 238 92 44 62 20 47 84 12 25 15 138 Rc 1/4 250mm or more 116 350 to 1000 285 104 55 25 75 94 58 14 26 16 164 19 Guide Cylinder Series MGG Front mounting flange type/MGGF 63 to 100 Bracket (See table below.)

Compact Cylinder

weight reduction 32 Weight 106 g 36 20 40% volume reduction 30 27.5 + Stroke 34 + Stroke 36 Weight 82 g 45% weight reduction 36 Weight 150 g 40 25 40% volume reduction 30 + Stroke 33.5 37.5 + Stroke 40 Weight 135 g 33% weight reduction 43.5 1 32 Weight 202 g 49.5 35% volume reduction 32.5 + Stroke 41 40 + Stroke 45 Bore size [mm] Weight Reduction rate % CDQ2 JCDQ Weight Volume 40 290 g 201 g 31%

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Digital Flow Switch (Integrated display type) ( compatible)

offset 47 46 45 44 43 43 41 40 39 38 37 36 35 34 33 32 Item Flow measurement value (PD) Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Temperature measurement value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Reservation Temp.

PC Wiring System Series PCW

100 4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3