DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

IO-Link/ELECTRO-PNEUMATIC REGULATOR

F_1 and F_2 have setting ranges of 0-90%F.S. and 10-120%F.S., respectively. However, the set pressure exceeds rated output; 100F.S. is out of warranty. (refer to Fig.2,3) The values are necessary to satisfy F_1 + 10%F.S. < F2. If not, the previous values are reflected in this function. Default of Zero adjusting: 0x0 Bit Bit 13 (It is Bit 12 up to 100%.)

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 44 27 2 63 46 3 82 65 4 101 84 5 120 103 6 139 122 7 158 141 8 177 160 9 196 179 10 215 198 11 234 217 12 253 236 13 272 255 14 291 274 15 310 293 16 329 312 17 348 331 18 367 350 19 386 369 20 405 388 L1 L2 1427 VK3000 Series Type 42 Manifold/Base mounted (Side ported) VV5K3-42Station -01 Grommet: G DIN terminal: D Applicable

Air Suction Filter With One-touch Fittings

Applicable Element size Element O-ring filter model mm for cover I-34S-A ZFB10 10 x 6 x L33 10 pcs. 10 pcs. I-35S-A ZFB20 12 x 8 x L42 10 pcs. 10 pcs. I-36S-A ZFB30 14 x 10 x L45 10 pcs. 10 pcs. I-39S-A ZFA401 16 x 14 x L60 10 pcs. 10 pcs. -9- < Element Replacement > 1. Stop the operation and reduce the internal pressure of the filter to atmospheric pressure. 2.

Precision Cylinder Series MTS

241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16

SI unit for EtherNet/IP TM

3000 [mm] 05 5000 [mm] 10 10 [mm] Item Specifications Connector M12 Straight RJ45 Cable O.D. 6.4 mm Nominal cross section AWG26 Min. bending radius (Fixed) 26 mm (4) Seal cap Part number: EX9-AWTS This cap is used to protect the M12 connector opening when the connector is not used.

SI unit for Ethernet POWERLINK

3000 [mm] 05 5000 [mm] 10 10 [mm] Item Specifications Connector M12 Straight RJ45 Cable O.D. 6.4 mm Nominal cross section AWG26 Min. bending radius (Fixed) 26 mm (4) Seal cap Part number: EX9-AWTS This cap is used to protect the M12 connector opening when the connector is not used.

SI unit for PROFINET

3000 [mm] 05 5000 [mm] 10 10 [mm] Item Specifications Connector M12 Straight RJ45 Cable O.D. 6.4 mm Nominal cross section AWG26 Min. bending radius (Fixed) 26 mm (4) Seal cap Part number: EX9-AWTS This cap is used to protect the M12 connector opening when the connector is not used.

VK3000

Refer to external dimensions in pages 3-2-4 to 3-2-10, and then mount it. VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

SI unit for EtherCAT

3000 [mm] 05 5000 [mm] 10 10 [mm] Item Specifications Connector M12 Straight RJ45 Cable O.D. 6.4 mm Nominal cross section AWG26 Min. bending radius (Fixed) 26 mm (4) Seal cap Part number: EX9-AWTS This cap is used to protect the M12 connector opening when the connector is not used.

VN-OMP0002

3/8 B(9.5) 12 12 12 12(P1) (P1) (P1) (P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B(12.7) 20A 311 500-06 3/4 B(19.1) 25A 411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002

VFR3000-OMJ0001

10 10 10) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 40) 40) 40) 40) VFR3 VFR3 VFR3 VFR3 00,VFR3 00,VFR3 00,VFR3 00,VFR3 10 10 10 10 VFR3 VFR3 VFR3 VFR3 40 40 40 40 (N.C.)N.O.3 3 B A N.C.

EX600-WEN_WSV.eng

Link, No Activity (10 Mbps) Specification Str Frunzei 29, Sector 2, Bucharest, Romania Orange LED flashes. Link, Activity (10 Mbps) LINK/ACT2 100 Mbps: Green 10 Mbps: Orange Red LED is ON. IP address has been duplicated. EtherNet/IPTM is not connected.

Standby Regulator

(Values at the initial period) 10 - 4.

VFR3000 Series

Intermediate stops heat generated by the valve. 10.

Power Valve Precision Regulator

Air is supplied to port 2(A). 10 VEX-OMM0003-B Revision history A Safety Instructions Po B Renewal UV 1st printing : MZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016 SMC Corporation All Rights

VFRA3000, 4000 Series

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 10 VFR3000-OMH0005-B S Revision history A Renewal MZ B Safety Instructions PS 1st printing: AW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any

EXxx-OMV0028.eng

Tightening torque: 0.7 to 0.8 Nm 2 4 5 10 Thank you for purchasing an SMC EX600-WPN# SMC Wireless System. Please read this manual carefully before operating the product and make sure you understand its capabilities and limitations.

PFxx-OMK0003CN

PF-OMK0003CN-E / / PFMV5## 2 10 12 13 14 14 16 17 18 19 19 20 22 -1No.