SMC Corporation of America
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PISTON SEAL B 1 20 RELEASE BOLT 1 42 CUSHION SEAL A 1 21 SEAL WASHER 1 43 CUSHION SEAL B 1 22 HEXAGON SOCKET CAP BOLT 4 44 CUSHION VALVE SEAL 2 45 CYLINER TUBE GASKET 2 Fig. 23 Construction 41 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

(Refer to Page 41) Output does not turn ON Air leakage Connect piping correctly and eliminate any air leakage. Setting is not correct Perform setting correctly. (Refer to Page 41) Output stays ON (Does not turn OFF) Clogged piping Apply pressure lower than the withstand pressure to eliminate the cause of clogging of piping. Incorrect wiring Connect wires correctly.

Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (

8 15.2 21.8 19 R 1/4 23 9.5 55.3 1.5 49.3 AS321F-N02-07ST AS321F-02-10ST 1/4" 13.2 27.8 39.3 17 21 31.8 43.3 10 18.5 AS321F-N02-09ST AS321F-02-12ST NPT 1/4 19 23 9.5 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 22 32.8 44.3 12 20.9 AS321F-N02-11ST AS321F-03-06ST 3/8" 17.9 31.8 43.3 21 17 27.8 39.3 6 12.8 AS321F-N03-07ST AS321F-03-08ST 1/4" 13.2 27.8 39.3 17 18.5 29.5 41 8 15.2 20.9 19 R 3/

50 66.5 4-M5 x 0.8 depth 8 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 -0.062 47h9 +2.2 -0.2 20.9 opened 0 -0.1 5 41 +0.03 0 3-4H9 depth 6 (one each on three sides) 4-M3 x 0.5 (attachment mounting screw ) M5 x 0.8 Finger closing port 0 -0.1 8 0 -0.7 14.9

Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.

VX31 VX31 VX32 VX33 1/8 1/4 1/4, 3/8 1/4, 3/8 46 91.5 1.5, 2.2, 3 Mounting hole 4 x 5.5 30 48.5 41 65.5 42 53.5 100.5 41 69.5 R S 1.5, 2.2, 3 2.2, 3, 4 2.2, 3, 4 33 36 56 51.5 51 68.5 52 56.5 103.5 51 72.5 105 64.5 54 59.5 71 60.5 59 106 59.5 75 113 (mm) Grommet Conduit DIN terminal Electrical entry (DC, AC/Class H) B Model Orifice diameter A Bracket mounting Port size P C D E F H Conduit

2.1 23 2.2 24 2.3 25 2.4 SSCNET 25 2.5 27 2.6 28 3 313-39 3.1 33 3.2 37 3.3 39 3.3.1 39 3.3.2 3-10 3.3.3 CNP1CNP2CNP3 3-12 3.4 3-19 3.5 () 3-20 3.6 3-23 3.7 3-24 3.7.1 3-24 3.7.2 3-25 3.7.3 3-27 3.8 3-28 3.9 SSCNET 3-29 3.10 3-31 3.10.1 3-31 3.10.2 3-32 3.11 3-33 3.11.1 3-33 3.11.2 3-34 3.11.3 (LE--) 3-37 3.12 3-38 3.13 3-39 1 - 4 41

(SeeLECSS2-T Operation Manual (Simplified Edition),section 6.3.2 for uploading.) -41- 6.7.2 To Load saved Parameters From the Parameter Setting window in the setup software, select Open. Please specify location of the file. Please select the file from which you wish to import parameters [.prm2]. Click Open.

Caution Combinations of Solenoid Valve, Manifold Gasket and Manifold Base Combinations of Blanking Plate Assembly and Manifold Base Body ported Base mounted Manifold gasket and screw assembly VK300-41-1A VK300-41-2A Common SUP/ Common EXH Common SUP/ Individual EXH Type 40(VV3K3-40): Base mounted (A port bottom ported) Type 20(VV3K3-20): Body ported (A port top ported) Type 42(VV3K3-42):

Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (

Built-in pulsation attenuator Process Pump Series PAX1000 Automatically operated type (internal switching type) Built-in solenoid valve/ Air operated type (external switching type) Prevents spraying of discharge and foaming in tank Built-in pulsation attenuator saves space and makes separate piping unnecessary A solenoid valve operated pump that fits in the palm of the hand 60 x 60 x 41

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing UR printing UR 11030SZ Printed in Japan. D-G

S ' 101 73 111 89 74 102 84 91 Rod flange: Head llange: 301 267 44 330 Foot: L,.

mounted (A, B port bottom ported) Applicable solenoid valve VK3140 VK334 How to Order VV5K3 40 05 M5 Type VK334 Type VK3140 VFS Thread type R port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Applicable blanking plate assembly VK3000-7-1A Valve stations VS4 Nil F N T Rc 01 1 station G NPT VQ7 20 20 stations NPTF A port: M5 x 0.8 EVS B port: M5 x 0.8 Applicable solenoid valve VK3140 VK334 Type 41

: Base mounted (A, B port side ported) Applicable solenoid valve VK3140-(-Q) VK334-(-Q) Type VK3140 VV5K3 M5 05 41 Type VK334 Solenoid direction Valve stations Applicable blanking plate assembly VK3000-7-1A 01 1 station Solenoid on opposite side of A and B port P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Nil R port: Rc 1/8 Thread type Type S41 20 20 stations Solenoid on same side of

Input 102 Input 14 110 Output 111 Output 112 Output 12 113 Output 4IO Input Assembly Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 100 2 ALM FG READY 3 0 OUT 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 2 ALM FG READY 101 3 4-7 4byte 8-9 2byte 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM

Signal Meaning 1 D0 Digit of 10-2 Bit0 19 D12 Digit of 101 Bit0 2 D1 Digit of 10-2 Bit1 20 D13 Digit of 101 Bit1 3 D2 Digit of 10-2 Bit2 21 D14 Digit of 101 Bit2 4 D3 Digit of 10-2 Bit3 22 D15 Digit of 101 Bit3 5 D4 Digit of 10Bit0 23 D16 Digit of 102 Bit0 6 D5 Digit of 10Bit1 24 D17 Digit of 102 Bit1 7 D6 Digit of 10Bit2 25 D18 Digit of 102 Bit2 8 D7 Digit of 10Bit3 26 D19 Digit of 102 Bit3

PSE531 PSE541 PSE561 Applicable pressure sensor PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) 5%R.D.

Note) Flow rate corresponds to VAC pressure of 101 kPa, SET pressure of 80 kPa, and initial flow rate setting of 0 l/min (ANR).