PSxx-OMR0001CN

) ON (41 ) ON(OFF) (34 ) ON (NPN/PNP) (100 kPa200 kPa) (27 ) ISA3 2 -61No.PS-OMR0001CN-J 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) [ON/OFF] [] [kPa] () -62No.PS-OMR0001CN-J Revision history A B C D E F [2018 3 ] G [2018 6 ] H [2019 9 ] I [2021 10 ] J [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-

HRX-OM-R026

PV SV HRSH Series 5.17Pump operation mode function 5-41 HRX-OM-R026 Chapter 5 Display and setting of various functions 5.18 Warming up function 5.18.1 Warming up function The power supply should be ON for this function. Otherwise this function cannot start.

Sensor Monitor

Sub display (left) setting Set the sub display (left) from the selection list on page 41. Press the button to set. Move to sub display (right) setting. Return to function selection mode. Sub display (right) setting Set the sub display (right) from the selection list on page 41. Press the button to set. Return to function selection mode.

DOC1023126

Refer to the operation manual of the setting software for how to perform a trial run. 41 - Operation . Operation flow The startup procedure varies depending on the power-on situation.

%silltr

1 0 1 101 101 102 103 104 104 104 105 8 BAS|C CIBCUITS lntroduction Flow Amplilication Signal Inversion Selec{ion Memory Function Time tunctions Delayed switching on Delayed switching otf Pulse on switching on Pulse on releasing a valve Cylinder Control Manual Control Single Acting Cylinder Direct Operation and Sped Control Intedock AND Function Inverse ODeration: NOT Function Double acting

SMC Basic Pneumatics

1 0 1 101 101 102 103 104 104 104 105 8 BAS|C CIBCUITS lntroduction Flow Amplilication Signal Inversion Selec{ion Memory Function Time tunctions Delayed switching on Delayed switching otf Pulse on switching on Pulse on releasing a valve Cylinder Control Manual Control Single Acting Cylinder Direct Operation and Sped Control Intedock AND Function Inverse ODeration: NOT Function Double acting

AC

11 19 33 1/4 1/4 Y51-02, 03 Y41-02, 03 AC4000, AC4020, AC4030 14 24 39 3/8 AC4000-06, AC4020-06 AC4030-06 AC5000, AC5500, AC6000 AC5020, AC5520, AC6020 1/4 Y61-03, 04 14 24 41 3/8 3/8 Caution on Assembling 15 30 50.5 1/2 When T type interface with bracket is required, order as example below.

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

Fluoropolymer Piping Equipment

8 30 26 18 36 41 78 74 49 Inch Size Model Applicable tubing O.D.

Plug-in/Plug Lead: Single Unit

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Example PSS5YJ7-20-03 . 1 pc. (Manifold base) SYJ7120-5G-01 . 2 pcs. (Valve) SYJ7000-21-1A .1 pc. (Blank plate ass'y) PSS5YJ7-41-03-01 . 1 pc. (Manifold base) SYJ7140-5LZ .1 pc. (Valve) SYJ7240-5LZ .1 pc. (Valve) SYJ7000-21-1A .1 pc.

A

1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

KJ

-01 KDM20S-03 KDM20S-07 KDM20P-01 20 KDM20P-03 KDM20P-07 KDM20S-09 KDM20P-09 Clamp bolt Panel mounting Loosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No. 2) until the bracket touches the stop ring.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Motor was not stationary when ABS encoder was communicating. (01-101) Polarity C Turn ON RESET not found Make sure the actuator is stopped and then turn ON RESET. 61 - Alarm is generated when return parameter has the conditions 1, 2 shown below.

Guide Cylinder Series MGG

Bore size (mm) For lock type For non-lock type Bore size (mm) Rod end lock Head end lock Bore size (mm) 20 25 32 40 50 W X Z HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 40 39 157 38.5 12(14) 98(106) 12 37 25.3 11 95 46 46 175 39 12(14) 98(106) 12 40 28.3 11 95 52 46 201 40 12(14) 101(109) 12 43 31.3 11 97 62 56 238 41 12(15) 109(118) 13 52.5 38.3 11 111 75 67 285 47 14(16) 125(137) 14

IDX-OM-W019

CMay. 2021 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

specification Dust seal specification TSUBAKI CABLEVEYOR specification Clean room specification (-X60) LJ1H 10/20/30 (Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116 TSUBAKI CABLEVEYOR specification (-X40) LJ1H 10/20/30 (Horizontal mount) 122 LJ1S 10/20/30 (Horizontal mount) 128 101

MXW Series Long Stroke Slide Table

29 169 41 66 6 1 412 52 MXW20-175 140 237 128.5 50.5 194 66 91 6 1 462 48 MXW20-200 164 264 152 56 219 91 116 7 1 512 52 MXW20-225 189 288 177.5 73.5 244 116 141 7 1 562 48 48 MXW20-250 215 312 203 59 269 141 166 8 2 612 151 MXW Series Long Stroke Slide Table Dimensions MXW 25 Stroke: 100, 125, 150 Operating port 2-Rc (PT) 1/8 (mm) J 20 Width across hexagon socket hole 5 Scale:15% 11

Stability of suction position,

ZP3EA-YAL16 [Weight: 116.6 g] M16 x 1.5 Width across flats 22 Width across flats 19 M14 x 1 6 6 25 24.5 49.5 16 5 5 25 41 M5 x 0.8/ Effective thread depth 5 Rc1/8 14.5 9 9.9 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM 7 M10 x 1 M16 x 1.5 Applicable pad part no.