Manifold Type: 42 (Base Mounted), Valve Stations: 9 Stations, A, B Port: 02N (NPT1/4)

Manifold Type: 42 (Base Mounted), Valve Stations: 10 Stations, A, B Port: 02N (NPT1/4)

Manifold Type: 42 (Base Mounted), Valve Stations: 7 Stations, A, B Port: 02N (NPT1/4), CE Marked: Q (CE Marked)

Manifold Type: 42 (Base Mounted), Valve Stations: 4 Stations, A, B Port: 02N (NPT1/4)

Manifold Type: 42 (Base Mounted, Bar Manifold, External Pilot Capable, Individual Wiring), Valve Stations: 11 Stations, A, B Port: 02N (NPT1/4)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)

SI Unit: 0 (w/o SI Unit), Stations: 8 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4), Mounting Method: D (DIN Rail Mounting)

Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)

Manifold Type: 42P (Base Mounted, Bar Manifold, External Pilot Capable, Flat Cable), Valve Stations: 8 Stations, A, B Port: 02N (NPT1/4)

C95Series

'(mm) dirEH;tion (inch2) 25 50 75 100 125 145 OUT 1.25 31 62 93 125 156 181 , 32 . 12 IN 1,07 27 54 80 107 134 155 i (2) Load of piston rod should always be aligned OUT 1.95 49 97 146 195 244 283 40 16 IN 1.64 41 82 123 164 205 237 parallel with rhe cylinder axis. Cll Avoid damaging (scratches, nicks) on the piston rod, which would lead to damage of rod seal, resulting m air leakage.

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5H9 ( ) depth 5 +0.030 0 NN x M6 x 1 thread depth 12 A B 1 24 5.1 5.1 10.5 9.5 10.5 A B G (NN 1) x H H 21 9 21 9 A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123

7

P. 123 For Oil VXE Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 124, 125 VXP How to Order . P. 126 VXR For Heated water VXH Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 127, 128 How to Order .

Aluminum High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

MU

MUB32 MUB40 MUB50 MUB63 Model MUB25 MUB32 MUB40 MUB50 MUB63 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 7-8-6 7 Plate Cylinder Double Acting, Single Rod Series MU Dimensions of Each Mounting Axial foot style (mm) ZZ 109 122 133 159 169 Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 79 90 96 116 123

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 2-5.1 8 6 22.5 22.5 (mm) 4-M5 x 0.8 thread depth 4.5 W Z ZZ SS S Model CXSW6-10 CXSW6-20 CXSW6-30 CXSW6-40 CXSW6-50 (Piping port) (Opposite side: Same) 66 103 46 40 10 (Z) (13) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50