3M/SMseries

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100

G Pressure gauge*7 E Vacuum pressure switch (Vacuum 2 outputs) F Vacuum pressure switch (Compound pressure 2 outputs) !

ZR

ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL Vacuum Switch/Suction Filter Unit: ZR1-F ZY Specifications ZQ Unit no. ZR1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF Refer to page 13-3-13 regarding vacuum switch.

LEF-OM002xx

Move M Speed Position Pushing F TriggLV In pos Change of positioning stop position Position: 50mm 30mm mm/s mm % % mm 0 Absolute 250 50.00 0 0 0.50 Input 30 Step data No. Move M Speed Position Pushing F TriggLV In pos mm/s mm % % mm 0 Absolute 250 30.00 0 0 0.50 6.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

N T, F, N are order made specifications.

PSE20xA.eng

Other parameter settings Front protective cover (Model: ZS-26-01) Normal operation mode Item Default setting Item Default setting [F80] Power saving mode OFF [F 3] Digital filter setting [F 4] Auto-preset function [F 5] Auto shift setting [F 6] Fine adjustment of display value 0.00 sec.

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

BM2-032 BM2-040 D-C7, D-C8, D-H7 D-B5, D-B6, D-G5 D-A3A, D-A44A, D-G39A, D-K39A BM2-020 BM2-025 BA2-032 BA2-040 BA2-020 BA2-025 BM3-032 BM3-040 BM3-020 BM3-025 Caution Mounting Type and Accessories 1. Be careful of the snap ring springing out. When replacing the rod seal, take care that the snap ring does not spring out while you are removing it.

Magnetically Coupled Rodless Cylinder

F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x

VQ5000

and T1 kits) (2) 1 station Station (2) 01 Note 1) When two or more symbols are specified, indicate them alphabetically.

70pvpump

Diaphragm material 1 VXA PTFE (Fluoro resin) JIS Symbol Style VN Port size 1 3 Built-in solenoid valve Air operated LVC 01 1/8 (6A) FLUID OUT AIR SUP AIR EXH LVA Thread type FLUID IN Nil T Rc NPTF G NPT LVH Built-in solenoid valve F LVD N T, F, N are options.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

COQ2BP

Standard Small lK)lnt Q f contacl f!)$utls In 1 8% 1 1'11:11011. The figure a seal vent $MC PneumatICS' unique figure 8 seal incorporales vents that allow pressufized air to flow into an Integrated cavity forcing the seal firmly against the opposite side 01 the piston seal groove creating a much tighter, more positive barrier against leakage.

PF3W3.eng

Front In measurement mode, when the button is pressed for 2 seconds or longer, [F 0] is displayed. This [F ] indicates the mode for changing each functional setting. Press the button for 2 seconds or longer to return to measurement mode. 2. [P_1] or [n_1] and the set value are displayed alternately.

VQC

(F, P kit) Top entry Side entry Replaceable One-touch fittings Single mounting screw, clamp construction SI unit for I/O (DeviceNet, PROFIBUS-DP, CANopen, AS-i, etc.)

Air Cylinder CLA Series Fine Lock Model

Contact your sales representative tor further details. .f f'' r'r *x , r:r,r..t :':,:':,t Simple maintenance and overhauling It is easy to disassemble and simple to release lock-up unit by manual override.

PSE530/200

rated pressure range, Ambient temperature 25 3C) Linearity 1% F .S. or less Repeatability 1% F .S. or less Power supply voltage effect 1% F .S. or less based on the analog output at 18 V ranging from 12 to 24 VDC Enclosure IP40 Temperature range 0 to 50C; Stored: 10 to 70C (No freezing or condensation) Resistance Withstand voltage 1000 VAC, 50/60Hz for 1 minute between external terminals

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Contact your sales representative tor further details. .f f'' r'r *x , r:r,r..t :':,:':,t Simple maintenance and overhauling It is easy to disassemble and simple to release lock-up unit by manual override.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.