VX

' 002 003 Z 5 % *%+ * ,* -07 ( =+4 7> 08 (? =+4 7> Terminal box 13 ( =+4 7> Electrical entry Nil # T 5 % & 23 (( =+4 7> 51 4 ! G 53 55 56 (? ! C ) ! ! D !"# Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

Vacuum Ejector Series ZM

Stations 1 2 3 4 5 6 7 8 9 10 ZZM-CR-01 ZZM-CR-02 ZZM-CR-03 ZZM-CR-04 ZZM-CR-05 ZZM-CR-06 ZZM-CR-07 ZZM-CR-08 ZZM-CR-09 ZZM-CR-10 SP ZCUK AMJ AMV AEP (2) (3) HEP Note Quantity Adapter A Adapter B Silencer Blanking plate No. 1 2 3 4 5 6 7 8 9 10 11 Model ZZM-SA ZZM-BP ZZM-ADAZZM-ADBZZM-GE ZZM-EPLZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPRZZM-CRDescription 2 1 1 Station: 1 1 1 1 Manifold part no.

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

DOC1020530

Test operation . 21 5.1 Operation procedure . 21 5.2 JOG Mode . 22 5.3 Positioning Mode . 23 5.3.1 Positioning Mode . 24 5.3.2 Motor speed configuration . 25 5.3.3 Acceleration/deceleration time configuration . 26 5.3.4 Move distance Configuration and Operation . 27 6.

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

Air Cylinder CP Series Cylinder Positioner Assembly

1 2 5x.2B \71 1.57 140) M18r1 5 1.22 (31) 0 6 3 (16) 3.86 {981 1.91 (23) Q5 .3: ?

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

Water-cooledThermo-chiller

Continue Communication Error WRN 23 DI level of the circulating fluid has gone below the limitation set by the customer. (Only for DI control kit option Y) Continue DI Low Level WRN 24 The error occurred in the circulating pump inverter. This alarm is applicable to the HRWlll-HlS only.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Note) Elbow 06 08 10 12 6 8 10 12 Control type Meter-out Meter-in 0 1 Note) For applicable tubing O.D. selection, refer to the Model on page 603. Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

Manifold Specifications

146.5 Single 95.5 73 With light/surge voltage suppressor: Type MZ With light/surge voltage suppressor Pg7 94 86.5 P PE EA EB n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215 12 223 232 13 240 249 14 257 266 15 274 283 16 291 300 17 308 317 18 325 334 19 342 351 20 359 368 21 376 385 22 393 402 23

Manifold Specifications

VQ7 0.1 to 1.0 MPa EVS How to Order VFN VV5ZS3 1 08 01 5 AP D 51F Coil voltage of air release valve Series VZS3000 Manifold Note) How to take out the lead wire of air release valve is the same method as the other valve equipped on the same manifold.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A 1.08 B 0.38 C 5/8-18 UNF D 20JM-08 0.94 3/4", 7/8" 1 1/16" JM-10 1.12 1.30 0.42 3/4-16 UNF 1 1/4", 1 1/2" Data JM-14 1.61 1.86 0.43 1 1/4 -12 UNF 2" 6-14-21 22 Series NCM Double Acting/Single Rod/Band Mounting Auto Switch Mounting Position and Mounting Height D-H7/H7W/H7F/H7BAL D-C7/C8 HS HS 0.63 0.63 SMC SMC 1.02 A B A B 1.14 (1.42) ( ): D-H7LF D-G59/K59 D-B5/B6/B59W

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

NAIV

(g) 120 1 1 0 100 90 80 l|AN20002 U1 35 (1.9) .04 (17) NAN3OO-N03 % 60 (3.3) .06 t25) NANtrco+to4 90 (5.0) .08 (35) 60 NAN50(rN0,6 3A 160 (8.8) .36 (165) NAN6OO.NI O 1 27O llsl .46 e25) NAN700+i12 1]4 444 Q4l 1 .87 (4901 Supply pressure: 7l PSI Distance from silencer: NAN200-500-) 31t NAN6O0-7OO+ 6.5fi MN800_900 ,10f1 NANSOO-N,'4 1\h 590 (33) 2.21 (580) NANgOO-N2O 2 960 (53) 3.13 (820) Construction

VZ5000

Round head combination screw Round head combination screw ( ) M3 x 31 With spring washer ( ) M3 x 47 With spring washer Adapter Plate Assembly DXT201-3-2A Round head combination screw Series VZ500 Base mounted ( ) M3 x 38 With spring washer Gasket Round head combination screw Individual EXH spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 DXT199-23-1 ( ) M3 x 31 With spring washer Gasket

Compact Proportional Solenoid Valve Series PVQ

Max. operating pressure Symbol 16 23 40 VCHR 1.6 mm 0.7 MPa Without sub-plate (with mounting screw M3 x 8L, 2 pcs.)

AS

Inch size Metric size 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 Control type 04 06 08 10 12 0 1 Meter-out Meter-in Use 1/8" tube.

AS

Note) AS-FP Metric size Inch size Meter-out Meter-in 0 1 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 AS-FM 04 06 08 10 12 AS-D AS-T With One-touch fitting ASP Thread type M3 Port size Note) For applicable tubing O.D. selection, refer to the Model on page 484. Use 1/8" tube.