3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Refer to p.0-33 to 0-36 for Safety lnstructions and common precautions. Caution Warning How to Use L and M Plug Connector Manual Override Without an electric signal for the solenoid valve the manual override is used for switching the main valve.

MXS

36 38 G 15 15 15 17 15 25 35 HA 40 40 40 25 36 72 76 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111 M 71 71 71 83 103 149 203 KA NA 2 2 2 2 2 4 4 Z 70 70 70 82 102 148 202 MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-100 26.5 36.5 46.5 56.5 66.5 91.5 116.5 SMXS12A, #4(#1+#4) SMXS12A, #5(#2+#5) SMXS12A, #6(#3+#6+#7) SMXS12B, #4(#1+#4) SMXS12B, #5(#2+#5)

CG5-S

(Same side) A HS Number of switches 20 25 32 40 50 63 80 100 31.5 26 24 Mounting surface Port surface Port surface Port surface 31.5 28.5 24 32.5 33 25 37 36.5 28 45.5 42 36 45.5 48.5 36 Switch type 56 57.5 46 Minimum stroke (mm) 10 15 75 57 68 46 15

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

CL

CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

Heater: 422 B XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

With switch unit + Auto switch R73, Rotation 180, Side port location MDSUB20-180S-R73 Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors.

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

MK

40 46.8 52 36 40 0.15 0.15 Note 1) Above figure is for D-A73/A80.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

24.5 28 17 27 38 Data 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 +0.036 0 8 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 (29.3) (33.1) (40.4) (49.2) +0.036 0 +0.036 0 +0.043 0 +0.043 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 10 10 10 10 42 48 53 60 20 25 32 40 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 +0.036 0 10 10 +0.043 0 12 12 +0.043 0 14

RLQ

CL CL1 MLGC CNG Compact overall length 36 to 50 mm increase in length compared to compact cylinders Series CDQ2.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Number of pages has been increased from 16 to 36. VX Edition B The IO-Link compatible type has been added. Number of pages has been increased from 36 to 40. WR Edition C Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

INFORMATION Step Motor Controller 5 types of communication protocols New New

bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22 bytes Terminating resistor Not included Memory EEPROM LED indicator PWR, RUN, ALM, ERR PWR, ALM, MS, NS PWR, ALM, SF, BF PWR, ALM, MS, NS PWR, ALM, COM Cable length [m] Actuator cable: 20 or less Cooling system Natural air cooling Operating temperature

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

46 16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219

Intrinsically Safe Valve

8.6 Double 4 Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position single L-type plug connector (L) 53-SY5120-L-01 (-F2) With foot bracket 53-SY5120-L-01-F1 21 22.6 47 4.5 38 16.7 16.6 1.2 22 29 2 x M3 x 0.5 thread depth 3.5 (For mounting bracket) 14.7 2 x 3.2 (For mounting) 65 40 11.6 Insulator: Black () A B Insulator: Red (+) Manual override 16.2 2 x 3.2 (Manifold mounting hole) 36

HRX-OM-W060

Description Port size tightening piping torque specifications Chiller side 1 union 178 to 185Nm Circulating fluid outlet port Filter side Rc1 1 36 to 38Nm 1.0MPa or more CH1 Circulating fluid return port Rc1 2 36 to 38Nm 1.0MPa or more Tank drain port Rc3/4 2 28 to 30Nm Chiller side 1/2 union 64 to 70Nm Circulating fluid outlet port Filter side Rc1/2 1 20 to 25Nm 0.8MPa or more CH2 Circulating

HRX-OM-W032

Table 3-11 Piping port size Description Port size Recommended Recommended piping tightening torque specifications Circulating fluid outlet port Rc1 36 to 38Nm 1.0 MPa or more Circulating fluid return port Rc1 36 to 38Nm 1.0 MPa or more 1.0 MPa or more (Automatic fluid fill pressure: Automatic fluid fill port Rc1/2 20 to 25Nm 0.2 to 0.5 MPa Overflow port Rc1 36 to 38Nm ID 25 mm or more Length

MHF2

36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x 0.8 thread depth 5.5