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Construction /Operation Auto switch (optional) Indicator (optional) Bonnet assembly (includes ) Piston seal Magnet (built-in only for auto switch) Actuation port Piston Exterior seal (maintenance part) Shaft seal Name plate Plate Port P (pressure port) P Port R (exhaust port) Solenoid valve R Heater (optional) Bellows side exhaust With solenoid valve Bellows Spring Body Valve Valve seal (

IDFA Series 10-3 10 2 IDX-OM-W017 11 R 11 R R (GFCI) GFCI1GFCI11-2 11-1 1. 2. 3. 4. GFCI 5. 6. 7. 11-2 IDFA4E/6E/8E/11E-23-R 5A 30mA IDFA15E1-23-R 10A 30mA 11-3 1) 2) 3) IDFA Series 11-1 11 1 IDX-OM-W017 11 R 9.5mm L N 6.5mm 11-4 () () 11-5 1-1 IDFA Series 11-4 11 2 IDX-OM-W017 12 T 12 T T 12-2, 12-3 12-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Construction /Operation Auto switch (optional) Indicator (optional) Bonnet assembly (includes ) Piston seal Magnet (built-in only for auto switch) Actuation port Piston Exterior seal (maintenance part) Shaft seal Name plate Plate Port P (pressure port) P Port R (exhaust port) Solenoid valve R Heater (optional) Bellows side exhaust With solenoid valve Bellows Spring Body Valve Valve seal (

B e r u t y q w Immersion type q Piping 10 1 (25A) w Tank size e IN/OUT port size r Thread type H Immersion type 6 6 inch Nil None R Rc N NPT F G y Fluid and ambient temperatures t Outlet pipe dimensions and thread type ( p. 9 ) Symbol 1 2 3 4 Pipe projection Short Long Short Long Thread type None None G1" G1" B 40 to 60C u Pilot port size Nil 1/4 1 1/8 Pipe thread (Pipe for the OUT port

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

IDX-OM-W014-C / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 ) *1) ISO 4414

ADH-E400 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFC60/70/80/90 Series 9-1 IDX-OM-W095 L 9.3 Rc1/225 30 5 IDFC60 2722IDFC70,IDFC80,IDFC90 22 IDFC60 (IDFC70/80/90) 1) 2830Nm 2) 9.4 1 1 IDFC60/70/80/90 Series 9-2 IDX-OM-W095 R 10 R R (GFCI) 10.1 10.2 IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R (A) 10 15 20 30 (mA) 30 IDFC60/70/80/90 Series 10-1 IDX-OM-W095 R 10.3 M3.5

I = m + mL kgm 2 r Find the actual moment of inertia I.

Note 4) For external pilot option, -R, indicate the external pilot specification R for the applicable valves as well. Note 5) The built-in silencer type does not satisfy the IP67 standard.

How to Order G LG1 05 1 Cable length 05 5m Compatible models G R Y Matsushita Electric Industrial Co., LTD Mitsubishi Electric Corporation Yaskawa Electric Corporation Cable compatibility table Model Manufacturer's No.

Description Standard Brass Stainless steel Body Valve assembly q Stainless steel, Brass NBR,Polyacetal Stainless steel FKM/EPDM w Piston assembly Piston spring Polyacetal, NBR e y t O-ring Pilot cover NBR Aluminum Stainless steel r FKM/EPDM 17-3-94 3 Series VXA21/22 Direct Air Operated 2 Port Valve For Air, Gas, Vacuum, Water and Oil The VX series will be revised shortly.

2 2 1 3 3 4 0 V() X1 1 24 V() X2 2 4 2 3 5 4 0 V() X2 1 24 V() X3 2 6 3 3 7 4 0 V() X3 1 24 V() X4 2 8 4 3 9 4 0 V() X4 1 24 V(X5 2 10 5 3 11 4 0 V() X5 1 24 V() X6 2 12 6 3 13 4 0 V() X6 1 24 V() X7 2 14 7 3 15 4 0 V() X7 -23No.EX-OMN0035CN-A EX600-DXPF EX600-DXNF 0~7 1 24 V 0~7 1 24 V 0~7 2 0~7 2 4.7 k 4.7 k DC24 V DC24 V 0~7 3 0~7 3 4.7 k 4.7 k 0~7 4 0 V 0~7 4 0 V

EX600-DX E EX600-DX F 1 1 2 Configuration Configuration 3 4 1 2 5 1 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 Configuration 2 1 3 5 4 7 6 9 8 11 10 13 12 3 7 6 5 Group Pin number 3 1 0 2 13 11 12 10 8 6 9 7 5 3 1 4 2 Pin number 4 3 2 2 1 4 3 2 1 4 3 2 4 3 2 1 4 4 24 V (control and input) X3 24 V (control and input) X2 24 V (control and input) X1 24 V (control and input) X0 0 V (control and input

(X1) =1) 2 : LECPMJ(2)CC-Link =3LECPMJ(1)CC-Link =1 2 (STATION No. (X10)=0STATION No. (X1) =3) 3 : LECPMJ(3)CC-Link =5LECPMJ(2CC-Link =3 2 (STATION No. (X10)=0STATION No. (X1) =5) 17 - 4.2 LECPMJ () () 1() 1 () 1 (1 ) 2 () (2 ) 4 (4 ) 9.

Step 4 Item Selected item Symbol r VXB2 1 5 A H B L L Yes r Indicator For special options, refer to page 5. Step 5 3 Angle Seat Valve / Air Operated Type VXB Series For Steam Can be used with air or water Flow Rate Characteristics N.C.

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

Base, Body Seal material Aluminum NBR, FKM, EPDM LQ Port A Port A LVN Port P TI/ TIL Port R Energized open Energized closed PA PAX PB Model Manifold base model Port A Rc Port P Rc Port R Rc VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Manifold Manifold stations Manifold B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 17-3-105 The VX series will be revised shortly.

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.