Vacuum Pad

Dimensions: With Buffer ZP3P-T20PTSFJM-B5 ZP3P-T20PTSFKM-B5 Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 5 1.6 5 Width across flats 14 Width across flats 14 3 3 3 3 17 21 A D B 17 21 A D B M10 x 1 M10 x 1 M5 x 0.8 Gasket M5 x 0.8 Gasket Width across flats 14 Width across flats 14 20 2.5 20 2.5 1.6 Dimensions Dimensions Part no.

VM

Push button (Flush) VM120-01-33 VM130-01-33 Panel mounting hole JIS Symbol 2 port 3 port R port (3 port only) 0.5 MPa supply 4.9 mm P.T. 21 N F.O.F. 2-4.6 mounting hole 1.6 mm O.T. 6.5 mm T.T. 5-6-15 14 Series VM100 Series VM100/Side Ported Twist selector (2 position) VM120-01-34R/B/G/Y VM130-01-34R/B/G/Y JIS Symbol 2 port Panel mounting hole 3 port R port (3 port only) Courtesy of Steven

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) S 28 28 NA 102.5 101.5 45 45 20 20 NB LB 21.5 23 WW WA WB Bore size A M4 x 0.7 D GC B F H MM GB GA C NN Z X 6 6 LC 5.5 5.5 Y 9 9 LH 14 14 LT 2.3 2.3 LX 33 33 LY 25 25 LZ 42 42 16 10 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 15 15 29.5 29.5 4 5 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 M5 x 0.8 M12 x 1.0 689 Air Cylinder CJ2 10-/1121-/22Double Foot (M):

7

) 25.5 30 28 61 (67) 4 B VXD2 70 20 11.5 14 50 33 37 27 64.5 52.5 Model Mounting bracket dimensions Port size P a b d e f 3/8, 1/2 47.5 71.5 57 34 39 VXD2 4 B ( ): Denotes the Normally Open (N.O.) dimensions. 149 For Heated water/High temperature oil VXD Series 4 B Dimensions/VXD2 Body Material: C37, Stainless Steel Conduit terminal (U2) (V2) E 34 C 32 25 T A M G1/2 IN OUT B K L I F J 2 x

PFxx-OMA1007

For all unused M12 connectors. 14 Seal cap (1 pc.)

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

C92

136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 12 16 20 20 25 30 32 40 G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 G1/2 G3/4 13,5 15,5 17 17 22 19,5 25 30 58 64,5 77 80,5 92 97

A_HEC-OM-K001

HED003-W2 A B 13 19 HED003-C2A B (Temperature Controller) HED003-HW13 19 (Heat Exchanger) HED005-W2 A B 13 19 HED005-C2A B (Temperature Controller) HED005-HW13 19 (Heat Exchanger) HED007-W2 A B 13 19 HED007-C2A B (Temperature Controller) HED007-HW13 19 (Heat Exchanger) Keep this manual available whenever necessary.

Special Specifications:

-20-9 Mist Separator 14-20-16 Micro Mist Separator 14-20-22 Odor Removal Filter 14-20-42 Note: Some models have different heights depending on the port size.

Standard Combinations

14 7 7 4 1/4, 3/8, 1/2 220 147 48 110 38 72.5 75 50 40 40 18 9 9 4 Accessory/Optional specifications (2) (3) (3) (3) (3) (3) With auto-drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Upward facing handle Model H2 J K L B B B B B C ACG20 ACG30 ACG40 87 24 33 12 5.5 105 91 87 108.5 35 14 7 156 123 122 128 148 114.5 40 18 9 186 155 154 160 180 Note 1) In

Digital Flow Switch (Integrated display type)

P PF2M701/702/705/710/725/750-01(-L) 66 14 2.8 depth 8.4 PF2M701/702/705/710/725/750-N1(-L) 68 14 2.8 depth 8.4 PF2M701/702/705/710/725/750-F1(-L) 70 14 2.8 depth 8.4 PF2M711/721-02(-L) 70 17 2.8 depth 6.2 PF2M711/721-N2(-L) 70 17 2.8 depth 6.2 PF2M711/721-F2(-L) 78 21 2.8 depth 6.2 -101No.PF-OMW0007-E PF2M7#L-#1/2(-L) (mm) Model A C B P PF2M701/702/705/710/725/750L-01(-L) 84.4 11 14 2.8

C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

CJP

MB MB1 Symbol Bore size (mm) S A A' B B' D F F' GA GB H J K MM NN R 5 st 10 st 15 st 20 st 30 st CA2 6 10 15 35.5 40.5 45.5 30.5 7 M10 x 1.0 7 9 14 14 3 8 6.5 6 6 17 6 8 M3 x 0.5 35.5 40.5 45.5 55.5 30.5 M12 x 1.0 8 10 12 15 17 5 8 6.5 6 7 20 7 8 M4 x 0.7 CS1 M14 x 1.0 35.5 40.5 45.5 55.5 30.5 10 12 14 20 19 6 10 8.5 6 7 24 9 8 M5 x 0.8 C76 Symbol Z C With auto switch Bore size (mm) W 5

Compact Cylinder

Rod end nut material: Carbon steel Surface treatment: Nickel plated 8 Series CQU Compact Cylinder: Plate Type Double Acting, Single Rod Auto Switch Proper Mounting Position (Stroke End Detection) and Its Mounting Height D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V B A A C Hs A B Hv (mm) D-A9V D-A9 D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL A B A B Size Hv A B C A B Hs 23 Hv C Hs 20.5 20

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P

VS7-6

VS7-8-FG-S AXT510-12 AXT510-21 AXT510-13 AXT510-13 AXT510-13 AXT510-14-2 AXT510-14-2 AXT510-14-2 AXT510-14-1 AXT510-14-1 AXT510-14-1 MY-16N MY-16N MY-14N Description No.

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

14 J.S.T.

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

DOC1003626

output signal 3 * B contact (normally closed) * By default 2.4.2 Contact output signal 4 to 6 Contact output signal 4 to 6 can be set to "signal type", "contact form".