A NVHS2000 1/8, 1/4 1/8 40 56 36 28 22 25 NVHS3000 1/4, 3/8 1/4 53 74 45 48 28 30 NVHS4000 1/4, 3/8, 1/2 3/8 70 80 48 54 36 30 D I M E N S I O N S S E R I E S (N)VHS 3 P O R T VA LV E H O W T O O R D E R S E R I E S (N)VHS S H U TO F F V A LV E S (N)VHS 00 W I T H L O C K I N G FA C I L I T Y Standard N North American B O D Y S I Z E A N D A P P L I C A B L E FRL S E R I E S 2 2000 3 2500,
Front flange Rear flange Double clevis SCQ2 Bore size L, #3 (#3+#6+#8) SCQ2 Bore size L, #4 (#4+#6+#8) SCQ2 Bore size L, #5 (#5+#6+#8) 2.3-115 Series CDQ2 Auto Switch Specifications Refer to p.5.3-2 for of auto switch specifications.
(mm) 0 stroke Stroke end 2~8 0.8 1.2 10~32 1 3 40, 50 2 5 H O W T O O R D E R S E E N E X T P A G E F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G F L AT T Y P E Flat Flat with rib ZPT10 U C 10 12 12 21 32.5 55.5 68.5 3 1.7 E:M5x0.8 E:M3x0.5 Model A B C Y ZPT13 U C 13 15 12 21 32.5 55.5 68.5 3 1.8 D F D F ZPT16 U C 16 18 12.5 21.5 33 56 69 3.5 1.2 ZPT02U 2 2.6 1.2 3 6 5 8 0.8
2 F G H J K L M N P Vacuum inlet direction q Pad dia.
3/8 Stainless steel E 230 VAC B N.O. 1/2 F 24 VDC L M 5 20A C37 N.C.
3 !4 !5 !6 CQ2A32-L-PS CQ2A40-L-PS CQ2A50-L-PS CQ2A63-L-PS CQ2A80-L-PS CQ2A100-L-PS 32 40 50 63 80 100 Set of left nos. !4, !5, !6 Seal kit includes !4, !5, !6. Order the seal kit, based on each bore size. Nickel plated For only CDQ2A 32 to 63 7-6-124 125 7-6-125 126 Series CQ2 Dimensions: 32 to 50 The dimensions are the same with or without an auto switch.
T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T
Retraction End (mm) Stroke adjustment range (mm) B C F G H J K 1) E D A Applicable size Model MXQ-AT6(L) 5 16.5 MXQ6(L) 17.5 19 10.5 6 8 7 2.5 M5 x 0.8 M2.5 x 6 MXQ-AT6(L)-X11 15 26.5 MXQ-AT8(L) 5 19.5 MXQ8(L) 21 22 12.5 8 10 8 3 M6 x 1 M3 x 8 MXQ-AT8(L)-X11 15 29.5 D H E MXQ-AT8(L)-X12 25 39.5 F MXQ-AT12(L) 5 23.5 MXQ12(L) M8 x 1 M4 x 10 28 29 16 16 10 12 4 MXQ-AT12(L)-X11 15 33.5 G MXQ-AT12
Rc 3/8 (Hexagon socket head taper plug) Rc 3/8 (Hexagon socket head taper plug) Stopper bolt adjusting unit Cylinder for driving (MY1BH-) RR SS RR SS NH H EY HL UU (TT) N A Rc 3/8 (Port) Rc 3/8 (Port) Z + Stroke T-slot section for mounting UU (TT) PL Rc 3/8 (Hexagon socket head taper plug) Rc 3/8 (Port) Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) MY1HTG MY1HTG (mm) A EY H HL L
Piping capacity y 0.02 L Selection Graph (3) Conductance by Tube I.D.
/ indicator light T NPTF F G S L N NPT Z Refer to Table 1 below for applicability.
min 1.7 to 17.0 l/min 2 to 16 l/min 0.1 l/min 0.1 l/pulse 3% F .S. or less 2% F .S. or less 0.35 to 4.5 l/min 0.35 to 4.5 l/min 0.5 to 4 l/min 0.05 l/min 0.05 l/pulse 3.5 to 45 l/min 3.5 to 45 l/min 5 to 40 l/min 0.5 l/min 0.5 l/pulse 7 to 110 l/min 7 to 110 l/min 10 to 100 l/min 1 l/min 1 l/pulse IF Data 5% F .S. or less 3% F .S. or less 5% F .S. or less (0 to 50C, based on 25C) 70 mA or
A al B D Il f J t( l(l wt wt (I$odel) D!npirg (on!l!nl Pfir20f{f t, -2, -3 t40.2 t45-3 illA (L{t}frt33rl.5 9.5 29.8 30.5 8/.0 5.3 fl/A x/ato.g P | 25iltI l, -2, -3 t40.2145.3 N/A (MR M36 , r.5 9.5 29.0 30.5 87.0 ).J r.r/A N/A 33.0t6.0 Pfl2Zonr t, -2, -3 207.0 2l?.0 t/A (|'lr) n33,1.5 9.5 ?
J H MM D E e 10 f l CX 0.1 0.4 NB Air release Air release C NA T B SS + Q + l + Stroke U ZZ + Q + l + Stroke S + Stroke K F L MA Width across flats G A RR SS + Stroke ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) e CX J B C F GA GB NA NB P R S T CD RR SS U L l f Q B-rod C-rod B-rod C-rod 32 21.5 15 52 25 to 1400 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209
C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.
closed center: VFR630 -F(Z) 3 position exhaust center: VFR640 -F(Z) 3 position pressure center: VFR650 -F(Z) 0 1 0 1 0 1 2 position double: VFR620 -F(Z) 263 3-2.3 146 93 (Electrical entry) 45 117 A B A B 72 90 108 PE EA EB PE P Manual override 170 186 4-9 (Mounting hole) (Non-locking) G 1/2 Light/Surge voltage suppressor (For FZ) Other dimensions are the same as the single type. 3-5-97
(psi) Nominal ~upport bracket nominal ~ymbo l symbol ~nd~cJjemallc diagram " Rod f1ang~: Head flange: --i '< "C II> 92 113 103 Fooi: L 44 G .F. " [I" , , III 1 L,F 73 79 70 86 :.T w~ 102 58 66 72 44 45 47 38 en 3 0 0 ~ "'i f" 27 73 34 33 G 22 102 27 26 (') 'cS. ,j" C. r '\ ~ T .
plug connector (L): SYJ3 20-L-M3 (-F) M8 connector (WO): SYJ3 20-WO-M3 (-F) M plug connector (M): SYJ3 20-M-M3 (-F) 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 28 [35] 12.6 M8 x 1 32.5 15 39.1 [46.1] Approx. 300 (Lead wire length) 50.1 [52.3] 40.3 [42.5] 49.2 41.8 53.1 46.6 35.3 13.5 13.5 13.5 111.5 [115.9] 91.9 [96.3] 109.7 15 15 22.1 15 22.1 22.1 Refer to page 1-5-79 for dimentions
VQ7 2 position single EVS 0.47 4/2 5/3 Page 3-3-16 Non-locking push type VFN (A/B EA/EB) L plug connector (M) (Standard) 2 position double With surge voltage suppressor (G)(L) (M)(D) With light/ surge voltage suppressor (L)(M) (D)(F) 100 VAC 50/60 Hz VZ5000 200 VAC 50/60 Hz 24 VDC 2.4 4/2 5/3 M plug connector (M) (Option) Page 3-3-53 24 VAC 50/60 Hz Locking B type (Slotted) (A/B
[F 2] OUT2 OUT1 -40No.PF-OMP0001CN-F [F 3] <> [F 3] [F 3][rES] [rES][] [F 3] -41No.PF-OMP0001CN-F [F10] <> [F10] [F10][FLo] [FLo][] [F10] 3) 90 L(9 ft 3 3 3 50 L 60,010 L 203,481,020 L (54 ) (44 ) ((46 )) -42No.PF-OMP0001CN-F [F13] ON <> [F13] [F13][rEv] [rEv][] ON OFF() ON() [F13] -43No.PF-OMP0001CN-F [F20] [---] =00 = ONEEPROM 100+100 OFF <> [F20] [F20][inP] [inP