ZU

27 27 27 Vacuum pressure 13 13 13 13 0 0 0 2 4 6 8 10 12 0 0.1 0.2 0.3 0.4 0.5 0.6 0 2 4 6 8 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) Suction flow rate N (l/min(ANR)) Suction flow rate N (l/min(ANR)) Supply pressure (MPa) ZU07S Max. vacuum pressure: 85 kPa ZU07L Max. vacuum pressure: 48 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 93

XG_-OMV0028

12 18 2 A 16 U 17 21 23 2B 9 10B 11 9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4.

Ejector Valve Unit Series ZYY/ZYX

Note 2) V, S and R specifications are 45T, 45T1.

High Vacuum Slit Valve

The lever fixed in lateral and vertical position leans when the plate 27 moves up and makes the guide pin of the lever unengaged from the guide groove of the plate 27.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

5V, 12V 3-wire (PNP) Grommet 2-wire 12V Connector 3-wire (NPN) IC circuit 5V, 12V Diagnostic indication (2-color display) Relay PLC 24V Yes IC circuit 3-wire (PNP) 5V, 12V 12V 2-wire Grommet Water resistant (2-color display) 3-wire (NPN) With timer IC circuit Diagnostic indication (2-color display) Latch type with diagnostic output (2-color display) 5V, 12V F79F 4-wire (NPN) F7LF Lead

KN Series Nozzles for Blowing

Weight (g) Connection thread KN-R01-100 KN-R01-150 KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 1 1.5 1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 R 3/4 R 3/4 R 1 10 10 14 14 14 14 14 17 17 22 22 27 27 36 21.4 21 31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1

Series H, DL, L, LL Self-align Fittings

If using any other type, it may cause the air leakage or tube coming off. 1 2 3 2 1 4 107

ISE70_75.eng

Spanner flats on 4-sides, for 24 mm wrench Window comparator mode To set each of these functions, refer to the SMC website (URL http://www.smcworld.com) for more detailed information, or contact SMC. 1 Brown DC(+) 1 Brown DC(+) 1 Brown DC(+) 2 White OUT1 (PNP) 2 White NC 2 White OUT2 (NPN or PNP) Indication LED (Green): Displays the switch condition.

0.4

VP4 MODEL SB RD SD VQ 1/2 VQ 1/2 VQ 4/5 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assembly (AXT100-B04A) on the unused conduit port (G1/2).

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

x 2.6 (For mounting) 2 x 2.6 (For mounting) 23 23 23 23 2 x 2.6 (For mounting) 2 x 2.6 60.6 (For mounting) 27 Refer to page 375 for dimensions with connector cable. 318 5 Port Solenoid Valve 10-SYJ5000 2 Position Single [ ]: AC G H G H Grommet (G), (H): 10-SYJ5143-01 Built-in throttle valve: 10-SYJ5153-01 Max. 13.5 19.4 10.3 1/8 (A, B port) 11.5 17 8.5 24 2 x 4.3 (For mounting) 37.5 4 Manual

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

I/O size of port 1 and 2: 16 byte/16 byte for each I/O size of port 3 and 4: 2 byte/2 byte for each Unit 16/16/2/2 byte I/O size of port 1: 32 byte/32 byte each I/O size of port 2 to 4: 2 byte/2 byte for each 32/2/2/2 byte direct Data order is not swapped.

Compressed Air Cleaning Filter Series

Y300 2 pcs.

HRX-OM-M090

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-R016

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-R005

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-R005 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list (2) (4) 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-W038

2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

2/3 Port Valve

22 2, 23 2 1 2 3 2 3 4 2 3 4 2 3 4 2 3 4 1 2 3 Option (Bracket) Grommet: G Conduit: C Min. pitch for bracket is H mm.

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

New

B1 A B 2 x P 1(IN), 2(OUT) port 2 x M5 Thread depth N 2 x P 1(IN), 2(OUT) port B 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge